Thomas D. Mantei

Affiliations: 
University of Cincinnati, Cincinnati, OH 
Area:
Electronics and Electrical Engineering, Materials Science Engineering, Chemical Engineering
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"Thomas Mantei"
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Publications

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Lin C-, Li F, Mantei TD. (1999) Low-Temperature Plasma Deposition Of Dielectric Coatings From Organosilicon Precursors Journal of Vacuum Science and Technology. 17: 735-740
Mantei TD, Ring Z, Schweizer M, et al. (1996) Low Temperature Synthesis of Diamond Films with Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Japanese Journal of Applied Physics. 35: 2516-2519
Ring Z, Mantei TD, Tlali S, et al. (1995) Plasma Synthesis Of Diamond At Low Temperature With A Pulse Modulated Magnetoactive Discharge Applied Physics Letters. 66: 3380-3382
Ring Z, Mantei TD, Choo AG, et al. (1994) Optimization of diamond growth with statistical experiment design in an electron cyclotron resonance plasma Applied Physics Letters. 65: 121-123
Mantei TD. (1994) The plasma etching of electronic material Jom. 46: 36-39
Chang JJ, Mantei TD, Vuppuladhadium R, et al. (1992) Effects of oxygen and pressure on diamond synthesis in a magnetoactive microwave discharge Journal of Applied Physics. 71: 2918-2923
Chang JJ, Mantei TD, Vuppuladhadium R, et al. (1991) Low temperature and low pressure diamond synthesis in a microwave electron cyclotron resonance discharge Applied Physics Letters. 59: 1170-1172
Chang J, Mantei TD, Vuppuladhadium R, et al. (1990) ECR Enhancement of Low Pressure PECVD Diamond Synthesis Mrs Proceedings. 202
Mantei TD, Wicker TE, Kazmierzak D. (1984) Plasma Processing Reactor with Surface Magnetic Field Confinement Mrs Proceedings. 38
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