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Richard Gottscho

Affiliations: 
Bell Laboratories, Murray Hill, NJ, United States 
Area:
plasma processing, process control, semiconductor fabrication
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"Richard Gottscho"
Bio:

https://scholar.google.com/citations?user=Dns96QgAAAAJ
http://rwf.mit.edu/group/group/theses.html

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Parents

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Robert W. Field grad student 1979 MIT (Chemistry Tree)
 (Laser Spectroscopy of Alkaline Earth Oxide Flames and Deperturbation of Diatomic Molecular Spectra)

Children

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Eray S. Aydil post-doc 1991-1993 Bell Labs

Collaborators

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Publications

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Dixon S, Charles C, Boswell R, et al. (2013) Interactions between arrayed hollow cathodes Journal of Physics D. 46: 145204
Gottscho R. (1993) Plasmas make progress Physics World. 6: 39-47
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