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Christopher M. Waits, Ph.D. - Publications

Affiliations: 
2008 Electrical Engineering University of Maryland, College Park, College Park, MD 
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24 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2015 Feldman J, Hanrahan BM, Misra S, Fan XZ, Waits CM, Mitcheson PD, Ghodssi R. Vibration-based diagnostics for rotary MEMS Journal of Microelectromechanical Systems. 24: 289-299. DOI: 10.1109/Jmems.2014.2383171  0.723
2015 Hanrahan B, Sanchez L, Waits CM, Polcawich RG. Improved pyroelectric performance for thin film lead zirconate titanate (PZT) capacitors with IrO2 electrodes Smart Materials and Structures. 25. DOI: 10.1088/0964-1726/25/1/015025  0.632
2015 Hanrahan B, Misra S, Waits CM, Ghodssi R. Wear mechanisms in microfabricated ball bearing systems Wear. 326: 1-9. DOI: 10.1016/J.Wear.2014.12.032  0.711
2014 Chan WR, Waits CM, Joannopoulos JD, Celanovic I. Thermophotovoltaic and thermoelectric portable power generators Proceedings of Spie - the International Society For Optical Engineering. 9083. DOI: 10.1117/12.2054173  0.303
2014 Hanrahan B, Waits CM, Ghodssi R. Isotropic etching technique for three-dimensional microball-bearing raceways Journal of Micromechanics and Microengineering. 24. DOI: 10.1088/0960-1317/24/1/015021  0.739
2014 Hanrahan BM, Misra S, Beyaz MI, Feldman JH, Waits CM, Ghodssi R. An adhesion-dominated rolling friction regime unique to micro-scale ball bearings Tribology Letters. 56: 215-221. DOI: 10.1007/S11249-014-0401-5  0.695
2012 Hanrahan B, Feldman J, Misra S, Waits CM, Mitcheson PD, Ghodssi R. Off-the-shelf MEMS for rotary MEMS Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 579-582. DOI: 10.1109/MEMSYS.2012.6170241  0.713
2010 Waits CM, McCarthy M, Ghodssi R. A microfabricated spiral-groove turbopump supported on microball bearings Journal of Microelectromechanical Systems. 19: 99-109. DOI: 10.1109/Jmems.2009.2035525  0.57
2009 Kovalskiy A, Cech J, Tan CL, Heffner WR, Miller E, Waits CM, Dubey M, Churaman W, Vlcek M, Jain H. Chalcogenide glass thin film resists for grayscale lithography Proceedings of Spie - the International Society For Optical Engineering. 7273. DOI: 10.1117/12.811646  0.331
2009 Kovalskiy A, Cech J, Vlcek M, Waits CM, Dubey M, Heffner WR, Jain H. Chalcogenide glass e-beam and photoresists for ultrathin grayscale patterning Journal of Micro/Nanolithography, Mems, and Moems. 8. DOI: 10.1117/1.3273966  0.345
2009 Waits CM, McCarthy M, Ghodssi R. A MEMS turbopump for fuel delivery in small-scale power systems Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 644-647. DOI: 10.1109/SENSOR.2009.5285407  0.541
2009 McCarthy M, Waits CM, Ghodssi R. Dynamic friction and wear in a planar-contact encapsulated microball bearing using an integrated microturbine Journal of Microelectromechanical Systems. 18: 263-273. DOI: 10.1109/Jmems.2009.2013407  0.569
2009 Mosher L, Waits CM, Morgan B, Ghodssi R. Double-exposure grayscale photolithography Journal of Microelectromechanical Systems. 18: 308-315. DOI: 10.1109/Jmems.2008.2011703  0.53
2009 McCarthy M, Waits CM, Beyaz MI, Ghodssi R. A rotary microactuator supported on encapsulated microball bearings using an electro-pneumatic thrust balance Journal of Micromechanics and Microengineering. 19. DOI: 10.1088/0960-1317/19/9/094007  0.72
2008 Mosher LA, Waits CM, Morgan B, Ghodssi R. A new paradigm for high resolution 3D lithography Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 395-398. DOI: 10.1109/MEMSYS.2008.4443676  0.528
2007 Waits CM, Jankowski NR, Geil B, Ghodssi R. MEMS rotary actuator using an integrated ball bearing and air turbine Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 1131-1134. DOI: 10.1109/SENSOR.2007.4300334  0.483
2007 Waits CM, Geil B, Ghodssi R. Encapsulated ball bearings for rotary micro machines Journal of Micromechanics and Microengineering. 17: S224-S229. DOI: 10.1088/0960-1317/17/9/S03  0.53
2007 Kovalskiy A, Jain H, Neilson J, Vlcek M, Waits CM, Churaman W, Dubey M. On the mechanism of gray scale patterning of Ag-containing As2S3 thin films Journal of Physics and Chemistry of Solids. 68: 920-925. DOI: 10.1016/J.Jpcs.2007.01.001  0.328
2006 Kovalskiy A, Vlcek M, Jain H, Fiserova A, Waits CM, Dubey M. Development of chalcogenide glass photoresists for gray scale lithography Journal of Non-Crystalline Solids. 352: 589-594. DOI: 10.1016/J.Jnoncrysol.2005.11.046  0.367
2005 Waits CM, Morgan B, Kastantin M, Ghodssi R. Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching Sensors and Actuators, a: Physical. 119: 245-253. DOI: 10.1016/J.Sna.2004.03.024  0.584
2005 Morgan B, Waits CM, Ghodssi R. Compensated aspect ratio dependent etching (CARDE) using gray-scale technology Microelectronic Engineering. 77: 85-94. DOI: 10.1016/J.Mee.2004.09.004  0.581
2004 Morgan B, Waits CM, Krizmanic J, Ghodssi R. Development of a deep silicon phase fresnel lens using gray-scale lithography and deep reactive ion etching Journal of Microelectromechanical Systems. 13: 113-120. DOI: 10.1109/Jmems.2003.823220  0.59
2003 Waits CM, Modafe A, Ghodssi R. Investigation of gray-scale technology for large area 3D silicon MEMS structures Journal of Micromechanics and Microengineering. 13: 170-177. DOI: 10.1088/0960-1317/13/2/302  0.727
2001 Waits CM, Ghodssi R, Ervin MH, Dubey M. MEMS-based gray-scale lithography 2001 International Semiconductor Device Research Symposium, Isdrs 2001 - Proceedings. 182-185. DOI: 10.1109/ISDRS.2001.984470  0.558
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