Matthew J. Coppinger, Ph.D. - Publications

Affiliations: 
2011 Department of Electrical and Computer Engineering University of Delaware, Newark, DE, United States 
Area:
Electronics and Electrical Engineering

2 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2008 Xuan G, Adam TN, Lv PC, Sustersic N, Coppinger MJ, Kolodzey J, Suehle J, Fitzgerald E. Dry etching of SiGe alloys by xenon difluoride Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 26: 385-388. DOI: 10.1116/1.2891245  0.64
2006 Guangchi X, Adam TN, Suehle J, Fitzgerald E, Lv P, Sustersic N, Coppinger MJ, Kolodzey J. Xenon Difluoride dry etching of Si, SiGe alloy and Ge Third International Sige Technology and Device Meeting, Istdm 2006 - Conference Digest. 2006.  0.76
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