Vimal K. Kamineni, Ph.D. - Publications

Affiliations: 
2011 Nanoscale Science and Engineering-Nanoscale Science State University of New York, Albany, Albany, NY, United States 
Area:
Nanoscience, Materials Science Engineering, Condensed Matter Physics

13 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2013 Diebold AC, Medikonda M, Muthinti GR, Kamineni VK, Fronheiser J, Wormington M, Peterson B, Race J. Fin stress and pitch measurement using X-ray diffraction reciprocal space maps and optical scatterometry Proceedings of Spie - the International Society For Optical Engineering. 8681. DOI: 10.1117/12.2023081  0.6
2013 Muthinti GR, Medikonda M, Fronheiser J, Kamineni VK, Peterson B, Race J, Diebold AC. Mueller based scatterometry measurement of nanoscale structures with anisotropic in-plane optical properties Proceedings of Spie - the International Society For Optical Engineering. 8681. DOI: 10.1117/12.2011649  0.4
2011 Nelson FJ, Kamineni VK, Zhang T, Comfort ES, Lee JU, Diebold AC. Spectroscopic ellipsometry of CVD graphene Ecs Transactions. 35: 173-183. DOI: 10.1149/1.3569909  0.4
2011 Grenouillet L, Le Tiec Y, Vu QB, Vinet M, LaRose JD, Kamineni VK, Posseme N, Fullam J, Doris BB, Diebold AC. Ellipsometry measurements on ultrathin silicon on insulator films Proceedings - Ieee International Soi Conference. DOI: 10.1109/SOI.2011.6081709  0.36
2011 Kamineni VK, Diebold AC. Overview of optical metrology of advanced semiconductor materials Aip Conference Proceedings. 1395: 33-40. DOI: 10.1063/1.3657863  1
2011 Kamineni VK, Diebold AC. Electron-phonon interaction effects on the direct gap transitions of nanoscale Si films Applied Physics Letters. 99. DOI: 10.1063/1.3650470  1
2011 Spratt WT, Huang M, Jia C, Wang L, Kamineni VK, Diebold AC, Xia H. Formation of optical barriers with excellent thermal stability in single-crystal sapphire by hydrogen ion implantation and thermal annealing Applied Physics Letters. 99. DOI: 10.1063/1.3637613  0.4
2011 Kamineni VK, Hilfiker JN, Freeouf JL, Consiglio S, Clark R, Leusink GJ, Diebold AC. Extension of Far UV spectroscopic ellipsometry studies of High-κ dielectric films to 130 nm Thin Solid Films. 519: 2894-2898. DOI: 10.1016/j.tsf.2010.12.080  0.44
2011 Tungare M, Kamineni VK, Shahedipour-Sandvik F, Diebold AC. Dielectric properties and thickness metrology of strain engineered GaN/AlN/Si (111) thin films grown by MOCVD Thin Solid Films. 519: 2929-2932. DOI: 10.1016/j.tsf.2010.12.079  0.36
2010 Nelson FJ, Kamineni VK, Zhang T, Comfort ES, Lee JU, Diebold AC. Optical properties of large-area polycrystalline chemical vapor deposited graphene by spectroscopic ellipsometry Applied Physics Letters. 97. DOI: 10.1063/1.3525940  0.52
2010 Kamineni VK, Raymond M, Bersch EJ, Doris BB, Diebold AC. Optical metrology of Ni and NiSi thin films used in the self-aligned silicidation process Journal of Applied Physics. 107. DOI: 10.1063/1.3380665  0.68
2009 Kamineni VK, Settens CM, Grill A, Antonelli GA, Matyi RJ, Diebold AC. Spectroscopic ellipsometry of porous low-κ dielectric thin films Aip Conference Proceedings. 1173: 168-172. DOI: 10.1063/1.3251215  0.4
2009 Kamineni VK, Raymond M, Bersch EJ, Doris BB, Diebold AC. Thickness measurement of thin-metal films by optical metrology Aip Conference Proceedings. 1173: 114-121. DOI: 10.1063/1.3251204  0.88
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