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Siavash Pourkamali - Publications

Affiliations: 
Electrical Engineering University of Denver, Denver, CO, United States 
Area:
Electronics and Electrical Engineering, Mechanical Engineering
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92 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2018 Qaradaghi V, Dousti B, Choi Y, Lee GS, Hu W, Pourkamali S. Surface Area Enhancement of Nanomechanical Disk Resonators Using MWCNT for Mass Sensing Applications. Ieee Transactions On Ultrasonics, Ferroelectrics, and Frequency Control. PMID 30507529 DOI: 10.1109/Tuffc.2018.2884247  0.523
2018 Ramezany A, Pourkamali S. Ultrahigh Frequency Nanomechanical Piezoresistive Amplifiers for Direct Channel-Selective Receiver Front-Ends. Nano Letters. 18: 2551-2556. PMID 29589755 DOI: 10.1021/acs.nanolett.8b00242  0.334
2018 Mahdavi M, Mehdizadeh E, Pourkamali S. Piezoelectric MEMS resonant dew point meters Sensors and Actuators a-Physical. 276: 52-61. DOI: 10.1016/J.Sna.2018.04.024  0.611
2017 Mehdizadeh E, Kumar V, Wilson JC, Pourkamali S. Inertial Impaction on MEMS Balance Chips for Real-Time Air Quality Monitoring Ieee Sensors Journal. 17: 2329-2337. DOI: 10.1109/Jsen.2017.2675958  0.44
2017 Kumar V, Sebdani SM, Pourkamali S. Sensitivity Enhancement of a Lorentz Force MEMS Magnetometer With Frequency Modulated Output Ieee\/Asme Journal of Microelectromechanical Systems. 26: 870-878. DOI: 10.1109/Jmems.2017.2693818  0.523
2016 Ramezany A, Mahdavi M, Pourkamali S. Nanoelectromechanical resonant narrow-band amplifiers. Microsystems & Nanoengineering. 2: 16004. PMID 31057815 DOI: 10.1038/micronano.2016.4  0.339
2016 Kumar V, Mehdizadeh E, Pourkamali S. Microelectromechanical parallel scanning nanoprobes for nanolithography Ieee Transactions On Nanotechnology. 15: 457-464. DOI: 10.1109/Tnano.2016.2543606  0.374
2016 Maldonado-Garcia M, Wilson JC, Pourkamali S. Horizontal chip-scale cascade impactor with integrated resonant mass balances Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2016: 1070-1073. DOI: 10.1109/MEMSYS.2016.7421819  0.358
2016 Kumar V, Pourkamali S. Lorentz force MEMS magnetometer with frequency modulated output Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2016: 589-592. DOI: 10.1109/MEMSYS.2016.7421694  0.447
2016 Mahdavi M, Abbasalipour A, Ramezany A, Pourkamali S. Micromachined Frequency-Output Force Probes Ieee Sensors Journal. 16: 5520-5521. DOI: 10.1109/JSEN.2016.2572604  0.45
2016 Kumar V, Jafari R, Pourkamali S. Ultra-Low Power Digitally Operated Tunable MEMS Accelerometer Ieee Sensors Journal. 16: 8715-8721. DOI: 10.1109/Jsen.2016.2571558  0.307
2015 Ramezany A, Mahdavi M, Moses A, Pourkamali S. Sail-shaped piezoelectric micro-resonators for high resolution gas flowmetry 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 2252-2255. DOI: 10.1109/TRANSDUCERS.2015.7181410  0.355
2015 Mahdavi M, Ramezany A, Kumar V, Pourkamali S. SNR improvement in amplitude modulated resonant MEMS sensors via thermal-piezoresistive internal amplification Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 913-916. DOI: 10.1109/MEMSYS.2015.7051108  0.316
2015 Maldonado-Garcia M, Mehdizadeh E, Kumar V, Wilson JC, Pourkamali S. Chip-scale aerosol impactor with integrated resonant mass balances for real time monitoring of airborne particulate concentrations Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 885-888. DOI: 10.1109/MEMSYS.2015.7051101  0.349
2015 Kumar V, Mahdavi M, Guo X, Mehdizadeh E, Pourkamali S. Ultra sensitive lorentz force MEMS magnetometer with pico-tesla limit of detection Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 204-207. DOI: 10.1109/MEMSYS.2015.7050922  0.355
2014 Mehdizadeh E, Rahafrooz A, Pourkamali S. Self-controlled fabrication of single-crystalline silicon nanobeams using conventional micromachining. Nanotechnology. 25: 315303. PMID 25036338 DOI: 10.1088/0957-4484/25/31/315303  0.759
2014 Mehdizadeh E, Rostami M, Guo X, Pourkamali S. Atomic resolution disk resonant force and displacement sensors for measurements in liquid Ieee Electron Device Letters. 35: 874-876. DOI: 10.1109/Led.2014.2331675  0.481
2014 Mehdizadeh E, Kumar V, Pourkamali S. Sensitivity enhancement of lorentz force MEMS resonant magnetometers via internal thermal-piezoresistive amplification Ieee Electron Device Letters. 35: 268-270. DOI: 10.1109/Led.2013.2293349  0.545
2014 Mahdavi M, Guerra G, McCurry H, Pourkamali S, Abdolvand R. Piezoelectric resonant MEMS balances with high liquid phase Q Proceedings of Ieee Sensors. 2014: 1948-1951. DOI: 10.1109/ICSENS.2014.6985413  0.499
2014 Mehdizadeh E, Kumar V, Guo X, Pourkamali S. High-Q Lorentz force MEMS magnetometer with internal self-amplification Proceedings of Ieee Sensors. 2014: 706-709. DOI: 10.1109/ICSENS.2014.6985097  0.392
2014 Mehdizadeh E, Pourkamali S. Deep submicron parallel scanning probe lithography using two-degree-of-freedom microelectromechanical systems actuators with integrated nanotips Micro and Nano Letters. 9: 673-675. DOI: 10.1049/Mnl.2014.0272  0.302
2014 Mehdizadeh E, Chapin JC, Gonzales JM, Rahafrooz A, Abdolvand R, Purse BW, Pourkamali S. Microelectromechanical disk resonators for direct detection of liquid-phase analytes Sensors and Actuators, a: Physical. 216: 136-141. DOI: 10.1016/J.Sna.2014.05.022  0.769
2013 Mehdizadeh E, Wilson JC, Hajjam A, Rahafrooz A, Pourkamali S. Aerosol impactor with embedded MEMS resonant mass balance for real-time particulate mass concentration monitoring 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 661-664. DOI: 10.1109/Transducers.2013.6626853  0.814
2013 Guo X, Yi YB, Pourkamali S. Thermal-piezoresistive resonators and self-sustained oscillators for gas recognition and pressure sensing Ieee Sensors Journal. 13: 2863-2872. DOI: 10.1109/Jsen.2013.2258667  0.53
2013 Hajjam A, Pourkamali S. Self-contained frequency trimming of micromachined silicon resonators via localized thermal oxidation Journal of Microelectromechanical Systems. 22: 1066-1072. DOI: 10.1109/Jmems.2013.2263218  0.829
2013 Mehdizadeh E, Guo X, Pourkamali S, Hajjam A, Rahafrooz A. Nano-precision force and displacement measurements using MEMS resonant structures Ieee Sensors 2013 - Proceedings. DOI: 10.1109/ICSENS.2013.6688240  0.827
2013 Hall HJ, Rahafrooz A, Brown JJ, Bright VM, Pourkamali S. I-shaped thermally actuated VHF resonators with submicron components Sensors and Actuators, a: Physical. 195: 160-166. DOI: 10.1016/J.Sna.2012.12.006  0.792
2013 Guo X, Yi YB, Pourkamali S. A finite element analysis of thermoelastic damping in vented MEMS beam resonators International Journal of Mechanical Sciences. 74: 73-82. DOI: 10.1016/J.Ijmecsci.2013.04.013  0.403
2012 Rahafrooz A, Pourkamali S. Thermal-piezoresistive energy pumps in micromechanical resonant structures Ieee Transactions On Electron Devices. 59: 3587-3593. DOI: 10.1109/Ted.2012.2215863  0.786
2012 Hall HJ, Rahafrooz A, Brown JJ, Bright VM, Pourkamali S. Thermally actuated I-shaped electromechanical VHF resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 737-740. DOI: 10.1109/MEMSYS.2012.6170291  0.802
2012 Hajjam A, Rahafrooz A, Gonzales J, Abdolvand R, Pourkamali S. Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 704-707. DOI: 10.1109/MEMSYS.2012.6170284  0.851
2012 Hajjam A, Pourkamali S. Fabrication and characterization of MEMS-based resonant organic gas sensors Ieee Sensors Journal. 12: 1958-1964. DOI: 10.1109/Jsen.2011.2181360  0.749
2012 Hajjam A, Logan A, Pourkamali S. Doping-induced temperature compensation of thermally actuated high-frequency silicon micromechanical resonators Journal of Microelectromechanical Systems. 21: 681-687. DOI: 10.1109/Jmems.2012.2185217  0.808
2012 Li X, Rahafrooz A, Pourkamali S. Fabrication and characterization of miniaturized photo-electro-chemical solar cells Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2012.6411391  0.683
2012 Iqbal A, Chapin JC, Mehdizadeh E, Rahafrooz A, Purse BW, Pourkamali S. Real-time bio-sensing using micro-channel encapsulated thermal- piezoresistive rotational mode disk resonators Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2012.6411385  0.714
2012 Guo X, Rahafrooz A, Yi YB, Pourkamali S. Self-sustained micromechanical resonant pressure sensors Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2012.6411382  0.784
2012 Mehdizadeh E, Chapin J, Gonzales J, Rahafrooz A, Abdolvand R, Purse B, Pourkamali S. Direct detection of biomolecules in liquid media using piezoelectric rotational mode disk resonators Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2012.6411373  0.788
2012 Hajjam A, Guo Y, Dietrich K, Pourkamali S. MEMS resonant human breath sensors for survivor detection in disaster areas Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2012.6411042  0.775
2012 Rahafrooz A, Pourkamali S. Jitter characterization of fully-micromechanical thermal-piezoresistive oscillators 2012 Ieee International Frequency Control Symposium, Ifcs 2012, Proceedings. 533-536. DOI: 10.1109/FCS.2012.6243732  0.741
2012 Guo X, Yi YB, Rahafrooz A, Pourkamali S. Gas sensing using thermally actuated dual plate resonators and self-sustained oscillators 2012 Ieee International Frequency Control Symposium, Ifcs 2012, Proceedings. 813-817. DOI: 10.1109/FCS.2012.6243727  0.795
2012 Hajjam A, Rahafrooz A, Pourkamali S. Electrostatic frequency tuning of thermal piezoresistive MEMS resonators 2012 Ieee International Frequency Control Symposium, Ifcs 2012, Proceedings. 584-587. DOI: 10.1109/FCS.2012.6243687  0.864
2012 Hajjam A, Rahafrooz A, Pourkamali S. Input-output insulation in thermal-piezoresisitive resonant microsctructures using embedded oxide beams 2012 Ieee International Frequency Control Symposium, Ifcs 2012, Proceedings. 425-428. DOI: 10.1109/FCS.2012.6243682  0.849
2012 Mehdizadeh E, Gonzales J, Rahafrooz A, Abdolvand R, Pourkamali S. Piezoelectirc rotational mode disk resonators for liquid viscosity monitoring Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 359-362.  0.779
2012 Rahafrooz A, Pourkamali S. Zero bias operation of thermal-piezoresistive micromechanical resonators via internal electromechanical mixing Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 375-378.  0.803
2012 Hajjam A, Dietrich K, Rahafrooz A, Pourkamali S. A self-controlled frequency trimming technique for micromechanical resonators Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 74-77.  0.863
2011 Rahafrooz A, Pourkamali S. High-frequency thermally actuated electromechanical resonators with piezoresistive readout Ieee Transactions On Electron Devices. 58: 1205-1214. DOI: 10.1109/Ted.2011.2105491  0.823
2011 Rahafrooz A, Pourkamali S. Controlled batch fabrication of crystalline silicon nanobeam-based resonant structures Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1345-1348. DOI: 10.1109/MEMSYS.2011.5734683  0.746
2011 Hajjam A, Rahafrooz A, Pourkamali S. Temperature compensated single-device electromechanical oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 801-804. DOI: 10.1109/MEMSYS.2011.5734546  0.828
2011 Rahafrooz A, Pourkamali S. Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 760-763. DOI: 10.1109/MEMSYS.2011.5734536  0.786
2011 Hajjam A, Wilson JC, Rahafrooz A, Pourkamali S. Self-sustained micromechanical resonant particulate microbalance/counters Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 629-632. DOI: 10.1109/MEMSYS.2011.5734503  0.816
2011 Hajjam A, Wilson JC, Pourkamali S. Individual air-borne particle mass measurement using high-frequency micromechanical resonators Ieee Sensors Journal. 11: 2883-2890. DOI: 10.1109/Jsen.2011.2147301  0.793
2011 Hajjam A, Logan A, Pourkamali S. Fabrication and characterization of MEMS-based resonant organic gas sniffers Proceedings of Ieee Sensors. 1105-1108. DOI: 10.1109/ICSENS.2011.6127389  0.762
2011 Tousifar B, Rahafrooz A, Pourkamali S. Hydrogen detection using thermally actuated MEMS resonators Proceedings of Ieee Sensors. 12-15. DOI: 10.1109/ICSENS.2011.6127387  0.79
2011 Tousifar B, Pourkamali S, Kvasnica M, Purse B. Surface functionalization and monolayer formation on silicon resonant nanoballances Proceedings of the Ieee International Frequency Control Symposium and Exposition. DOI: 10.1109/FCS.2011.5977888  0.507
2011 Hajjam A, Logan A, Pandiyan J, Pourkamali S. High frequency thermal-piezoresistive MEMS resonators for detection of organic gases Proceedings of the Ieee International Frequency Control Symposium and Exposition. DOI: 10.1109/FCS.2011.5977884  0.767
2011 Rahafrooz A, Pourkamali S. High frequency dual-mode thermal-piezoresistive oscillators Proceedings of the Ieee International Frequency Control Symposium and Exposition. DOI: 10.1109/FCS.2011.5977864  0.781
2011 Rahafrooz A, Pourkamali S. Characterization of rotational mode disk resonator quality factors in liquid Proceedings of the Ieee International Frequency Control Symposium and Exposition. DOI: 10.1109/FCS.2011.5977863  0.74
2010 Rahafrooz A, Hajjam A, Tousifar B, Pourkamali S. Thermal actuation, a suitable mechanism for high frequency electromechanical resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 200-203. DOI: 10.1109/MEMSYS.2010.5442530  0.854
2010 Hajjam A, Wilson JC, Rahafrooz A, Pourkamali S. Fabrication and characterization of resonant aerosol particle mass sensors Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 863-866. DOI: 10.1109/MEMSYS.2010.5442343  0.852
2010 Ho GK, Sundaresan K, Pourkamali S, Ayazi F. Micromechanical IBARs: Tunable high-Q resonators for temperature- compensated reference oscillators Journal of Microelectromechanical Systems. 19: 503-515. DOI: 10.1109/Jmems.2010.2044866  0.547
2010 Hajjam A, Rahafrooz A, Pourkamali S. Sub-100ppb/°C temperature stability in thermally actuated high frequency silicon resonators via degenerate phosphorous doping and bias current optimization Technical Digest - International Electron Devices Meeting, Iedm. DOI: 10.1109/IEDM.2010.5703317  0.853
2010 Rahafrooz A, Pourkamali S. Fully micromechanical piezo-thermal oscillators Technical Digest - International Electron Devices Meeting, Iedm. DOI: 10.1109/IEDM.2010.5703314  0.787
2010 Rahafrooz A, Pourkamali S. Rotational mode disk resonators for high-Q operation in liquid Proceedings of Ieee Sensors. 1071-1074. DOI: 10.1109/ICSENS.2010.5690808  0.742
2010 Hajjam A, Pandiyan J, Rahafrooz A, Pourkamali S. MEMS resonant sensors for detection of gasoline vapor Proceedings of Ieee Sensors. 1538-1541. DOI: 10.1109/ICSENS.2010.5690321  0.861
2010 Hajjam A, Wilson JC, Rahafrooz A, Pourkamali S. Detection and mass measurement of individual air-borne particles using high frequency micromechanical resonators Proceedings of Ieee Sensors. 2000-2004. DOI: 10.1109/ICSENS.2010.5689941  0.859
2010 Hajjam A, Wilson JC, Rahafrooz A, Pourkamali S. Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization Journal of Micromechanics and Microengineering. 20. DOI: 10.1088/0960-1317/20/12/125019  0.869
2010 Rahafrooz A, Pourkamali S. Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: I. Resonator design and modeling Journal of Micromechanics and Microengineering. 20. DOI: 10.1088/0960-1317/20/12/125018  0.818
2009 Yi YB, Rahafrooz A, Pourkamali S. Modeling and testing of the collective effects of thermoelastic and fluid damping on silicon MEMS resonators Journal of Micro/Nanolithography, Mems, and Moems. 8. DOI: 10.1117/1.3129830  0.767
2009 Rahafrooz A, Hajjam A, Pourkamali S. Thermal actuation of high frequency micromechanical resonators Proceedings - Ieee International Soi Conference. DOI: 10.1109/SOI.2009.5318786  0.873
2009 Hajjam A, Rahafrooz A, Wilson JC, Pourkamali S. Thermally actuated MEMS resonant sensors for mass measurement of micro/nanoscale aerosol particles Proceedings of Ieee Sensors. 707-710. DOI: 10.1109/ICSENS.2009.5398557  0.836
2009 Rahafrooz A, Pourkamali S. Detection of sub-ppm traces of aqueous heavy-metal ions using micro-electro-mechanical beam resonators Journal of Micromechanics and Microengineering. 19. DOI: 10.1088/0960-1317/19/11/115003  0.797
2008 Rahafrooz A, Pourkamali S. Resonant MEMS sensors for detection of aqueous heavy metal ions with sub-ppm resolution 2008 Ieee International Conference On Electron Devices and Solid-State Circuits, Edssc. DOI: 10.1109/EDSSC.2008.4760702  0.761
2007 Qishu Q, Pourkamali S, Ayazi F. Capacitively coupled VHF silicon bulk acoustic wave filters Proceedings - Ieee Ultrasonics Symposium. 1649-1652. DOI: 10.1109/ULTSYM.2007.415  0.371
2007 Pourkamali S, Ho GK, Ayazi F. Low-impedance VHF and UHF capacitive silicon bulk acoustic-wave resonators - Part II: Measurement and characterization Ieee Transactions On Electron Devices. 54: 2024-2030. DOI: 10.1109/Ted.2007.901405  0.537
2007 Pourkamali S, Ho GK, Ayazi F. Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators - Part I: Concept and fabrication Ieee Transactions On Electron Devices. 54: 2017-2023. DOI: 10.1109/Ted.2007.901403  0.636
2007 Sundaresan K, Ho GK, Pourkamali S, Ayaji F. Electronically temperature compensated silicon bulk acoustic resonator reference oscillators Ieee Journal of Solid-State Circuits. 42: 1425-1434. DOI: 10.1109/Jssc.2007.896521  0.56
2007 Pourkamali S, Ayazi F. Wafer-level encapsulation and sealing of electrostatic HARPSS transducers Proceedings of Ieee Sensors. 49-52. DOI: 10.1109/ICSENS.2007.4388333  0.398
2006 Ayazi F, Pourkamali S, Ho GK, Abdolvand R. High-aspect-ratio SOI vibrating micromechanical resonators and filters Ieee Mtt-S International Microwave Symposium Digest. 676-679. DOI: 10.1109/MWSYM.2006.249705  0.477
2006 Sundaresan K, Ho GK, Pourkamali S, Ayazi F. A low phase noise 100MHz silicon BAW reference oscillator Proceedings of the Custom Integrated Circuits Conference. 841-844. DOI: 10.1109/CICC.2006.320843  0.386
2006 Ho GK, Sundaresan K, Pourkamali S, Ayazi F. Temperature compensated IBAR reference oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 910-913.  0.315
2005 Sundaresan K, Ho GK, Pourkamali S, Ayazi F. A two-chip, 4-MHz, microelectromechanical reference oscillator Proceedings - Ieee International Symposium On Circuits and Systems. 5461-5464. DOI: 10.1109/ISCAS.2005.1465872  0.412
2005 Pourkamali S, Ayazi F. Electrically coupled MEMS bandpass filters: Part II. Without coupling element Sensors and Actuators, a: Physical. 122: 317-325. DOI: 10.1016/J.Sna.2005.03.039  0.422
2005 Pourkamali S, Ayazi F. Electrically coupled MEMS bandpass filters: Part I: With coupling element Sensors and Actuators, a: Physical. 122: 307-316. DOI: 10.1016/J.Sna.2005.03.038  0.453
2005 Pourkamali S, Ho GK, Ayazi F. Vertical capacitive sibars Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 211-214.  0.579
2005 Ho GK, Sundaresan K, Pourkamali S, Ayazi F. Low-motional-impedance highly-tunable I2 resonators for temperature-compensated reference oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 116-120.  0.466
2004 Hao Z, Pourkamali S, Ayazi F. VHF single-crystal silicon elliptic bulk-mode capacitive disk resonators - Part I: Design and modeling Journal of Microelectromechanical Systems. 13: 1043-1053. DOI: 10.1109/Jmems.2004.838387  0.559
2004 Pourkamali S, Hao Z, Ayazi F. VHF single crystal silicon capacitive elliptic bulk-mode disk resonators - Part II: Implementation and characterization Journal of Microelectromechanical Systems. 13: 1054-1062. DOI: 10.1109/Jmems.2004.838383  0.621
2004 Pourkamali S, Ayazi F. High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology 2004 Topical Meeting On Silicon Monolithic Integrated Circuits in Rf Systems: Digest of Papers. 147-150.  0.498
2004 Pourkamali S, Ayazi F. Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 813-816.  0.432
2003 Pourkamali S, Ayazi F. SOI-based HF and VHF single-crystal silicon resonators with SUB-100 nanometer vertical capacitive gaps Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 1: 837-840. DOI: 10.1109/SENSOR.2003.1215604  0.552
2003 Pourkamali S, Hashimura A, Abdolvand R, Ho GK, Erbil A, Ayazi F. High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps Journal of Microelectromechanical Systems. 12: 487-496. DOI: 10.1109/Jmems.2003.811726  0.548
2003 Pourkamali S, Abdolvand R, Ayazi F. A 600kHz electrically-coupled MEMS bandpass filter Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 702-705.  0.324
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