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Christopher A. Bode, Ph.D. - Publications

Affiliations: 
2001 University of Texas at Austin, Austin, Texas, U.S.A. 
Area:
Chemical Engineering
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6 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2007 Bode CA, Wang J, He QP, Edgar TF. Run-to-run control and state estimation in high-mix semiconductor manufacturing Annual Reviews in Control. 31: 241-253. DOI: 10.1016/J.Arcontrol.2007.07.001  0.671
2005 Wang J, He QP, Qin SJ, Bode CA, Purdy MA. Recursive least squares estimation for run-to-run control with metrology delay and its application to STI etch process Ieee Transactions On Semiconductor Manufacturing. 18: 309-318. DOI: 10.1109/Tsm.2005.846819  0.545
2004 Bode CA, Sonderman TJ. Controlling the margins in 300 mm manufacturing Solid State Technology. 47: 49-52.  0.638
2002 Bode CA, Ko BS, Edgar TF. Run-to-run control and performance monitoring of overlay in semiconductor manufacturing Ifac Proceedings Volumes (Ifac-Papersonline). 15: 393-398. DOI: 10.1016/S0967-0661(03)00154-0  0.692
2002 Bode C, Ko B, Edgar T. RUN-TO-RUN CONTROL AND PERFORMANCE MONITORING OF OVERLAY IN SEMICONDUCTOR MANUFACTURING Ifac Proceedings Volumes. 35: 393-398. DOI: 10.1016/S0967-0661(03)00154-0  0.665
2000 Edgar TF, Butler SW, Campbell WJ, Pfeiffer C, Bode C, Hwang SB, Balakrishnan KS, Hahn J. Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities Automatica. 36: 1567-1603. DOI: 10.1016/S0005-1098(00)00084-4  0.513
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