Christian A. Zorman - Publications

Affiliations: 
Case Western Reserve University, Cleveland Heights, OH, United States 
Area:
Materials Science Engineering, Electronics and Electrical Engineering

213 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2016 Scardelletti MC, Jordan JL, Ponchak GE, Zorman CA. Wireless capacitive pressure sensor with directional RF chip antenna for high temperature environments Ieee International Conference On Wireless For Space and Extreme Environments, Wisee 2015. DOI: 10.1109/WiSEE.2015.7392992  1
2016 Scardelletti MC, Jordan JL, Meredith RD, Harsh K, Pilant E, Ursey MW, Beheim GM, Hunter GW, Zorman CA. Demonstration of a Packaged Capacitive Pressure Sensor System Suitable for Jet Turbofan Engine Health Monitoring Proceedings - Electronic Components and Technology Conference. 2016: 877-888. DOI: 10.1109/ECTC.2016.380  1
2016 Rafique S, Han L, Zorman CA, Zhao H. Synthesis of Wide Bandgap β-Ga2O3 Rods on 3C-SiC-on-Si Crystal Growth and Design. 16: 511-517. DOI: 10.1021/Acs.Cgd.5B01562  1
2015 Howe DS, Dunning J, Zorman C, Garverick SL, Bogie KM. Development of an Integrated Surface Stimulation Device for Systematic Evaluation of Wound Electrotherapy Annals of Biomedical Engineering. 43: 306-313. PMID 25274162 DOI: 10.1007/S10439-014-1134-1  1
2015 Wang P, Majerus SJA, Karam R, Hanzlicek B, Lin DL, Zhu H, Anderson JM, Damaser MS, Zorman CA, Ko WH. Long-term evaluation of a non-hermetic micropackage technology for MEMS-based, implantable pressure sensors 2015 Transducers - 2015 18th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers 2015. 484-487. DOI: 10.1109/TRANSDUCERS.2015.7180966  1
2015 Yang R, Zorman CA, Feng PXL. High frequency torsional-mode nanomechanical resonators enabled by very thin nanocrystalline diamond diaphragms Diamond and Related Materials. 54: 19-25. DOI: 10.1016/J.Diamond.2014.11.015  1
2015 Hess-Dunning A, Zorman CA. Electrical interfaces for recording, stimulation, and sensing Implantable Biomedical Microsystems: Design Principles and Applications. 13-38. DOI: 10.1016/B978-0-323-26208-8.00002-9  1
2015 Ghosh S, Ostrowski E, Yang R, Debnath D, Feng PXL, Zorman CA, Sankaran RM. Atmospheric-Pressure Plasma Reduction of Metal Cation-Containing Polymer Films to Produce Electrically Conductive Nanocomposites by an Electrodiffusion Mechanism Plasma Chemistry and Plasma Processing. DOI: 10.1007/S11090-015-9665-2  1
2014 de Leon A, Barnes AC, Thomas P, O'Donnell J, Zorman CA, Advincula RC. Transfer printing of self-folding polymer-metal bilayer particles. Acs Applied Materials & Interfaces. 6: 22695-700. PMID 25412118 DOI: 10.1021/Am5068172  1
2014 Ghosh S, Yang R, Kaumeyer M, Zorman CA, Rowan SJ, Feng PX, Sankaran RM. Fabrication of electrically conductive metal patterns at the surface of polymer films by microplasma-based direct writing. Acs Applied Materials & Interfaces. 6: 3099-104. PMID 24556018 DOI: 10.1021/Am406005A  1
2014 Hunter GW, Scardelletti MC, Ponchak GE, Beheim GM, Mackey JA, Spry DJ, Meredith RD, Dynys FW, Neudeck PG, Jordan JL, Chen LY, Harsh K, Zorman CA. High temperature wireless smart sensor technology based on silicon carbide electronics Ecs Transactions. 61: 127-138. DOI: 10.1149/06104.0127ecst  1
2014 Scardelletti MC, Ponchak GE, Harsh K, Mackey JA, Meredith RD, Zorman CA, Beheim GM, Dynys FW, Hunter GW. Wireless capacitive pressure sensor operating up to 400°c from 0 to 100 psi utilizing power scavenging Wisnet 2014 - Proceedings: 2014 Ieee Topical Conference On Wireless Sensors and Sensor Networks. 34-36. DOI: 10.1109/WiSNet.2014.6825503  1
2014 Hess-Dunning AE, Tyler DJ, Harris JP, Capadona JR, Weder C, Rowan SJ, Zorman CA. Microscale characterization of a mechanically adaptive polymer nanocomposite with cotton-derived cellulose nanocrystals for implantable BioMEMS Journal of Microelectromechanical Systems. 23: 774-784. DOI: 10.1109/Jmems.2014.2327035  1
2014 Trevino J, Fu XA, Mehregany M, Zorman CA. Doped polycrystalline 3C-SiC films with low stress for MEMS: Part II. Characterization using micromachined structures Journal of Micromechanics and Microengineering. 24. DOI: 10.1088/0960-1317/24/6/065001  1
2014 Fu XA, Trevino J, Mehregany M, Zorman CA. Doped polycrystalline 3C-SiC films with low stress for MEMS: Part I. Deposition conditions and film properties Journal of Micromechanics and Microengineering. 24. DOI: 10.1088/0960-1317/24/3/035013  1
2014 Jordan JL, Simons RN, Zorman CA. Contactless radio frequency probes for hightemperature characterisation of microwave integrated circuits Electronics Letters. 50: 817-819. DOI: 10.1049/el.2014.1009  1
2014 Hess-Dunning AE, Smith RL, Zorman CA. Development of polynorbornene as a structural material for microfluidics and flexible biomems Journal of Applied Polymer Science. 131. DOI: 10.1002/App.40969  1
2013 Hess AE, Potter KA, Tyler DJ, Zorman CA, Capadona JR. Environmentally-controlled microtensile testing of mechanically-adaptive polymer nanocomposites for ex vivo characterization. Journal of Visualized Experiments : Jove. e50078. PMID 23995288 DOI: 10.3791/50078  1
2013 Falk AL, Buckley BB, Calusine G, Koehl WF, Dobrovitski VV, Politi A, Zorman CA, Feng PX, Awschalom DD. Polytype control of spin qubits in silicon carbide. Nature Communications. 4: 1819. PMID 23652007 DOI: 10.1038/Ncomms2854  1
2013 Du J, Zorman CA. A polycrystalline SiC-on-Si architecture for capacitive pressure sensing applications beyond 400 °c: Process development and device performance Journal of Materials Research. 28: 120-128. DOI: 10.1557/Jmr.2012.260  1
2013 Hess-Dunning AE, Tyler DJ, Zorman CA. Stretchable thin-film metal structures on a stimuli-responsive polymer nanocomposite for mechanically-dynamic microsystems 2013 Transducers and Eurosensors Xxvii: the 17th International Conference On Solid-State Sensors, Actuators and Microsystems, Transducers and Eurosensors 2013. 2229-2232. DOI: 10.1109/Transducers.2013.6627247  1
2013 Labarbera MA, Zorman CA, Scardelletti MC. Long-term thermal mechanical stability of PECVD amorphous silicon carbide films for harsh environment microelectromechanical systems Ieee Sensors 2013 - Proceedings. DOI: 10.1109/ICSENS.2013.6688575  1
2013 Barnes AC, Zorman CA. Polycrystalline diamond circular resonant diaphragms with low onset of nonlinear response Ieee Sensors 2013 - Proceedings. DOI: 10.1109/ICSENS.2013.6688504  1
2013 Wang P, Lachhman SB, Sun D, Majerus SJA, Damaser MS, Zorman CA, Feng PXL, Ko WH. Non-hermetic micropackage for chronic implantable systems 46th International Symposium On Microelectronics, Imaps 2013. 166-170.  1
2012 Lachhman SB, Zorman CA, Ko WH. Adhesion and Moisture Barrier Characteristics of Roller-Cast Polydimethylsiloxane Encapsulants for Implantable Microsystems. Proceedings of Ieee Sensors / Ieee International Conference On Sensors ; Sponsored by the Ieee Sensor Council. Ieee International Conference On Sensors. 2012: 1-4. PMID 23418410 DOI: 10.1109/ICSENS.2012.6411369  1
2012 Lachhman S, Zorman CA, Ko WH. Multi-layered poly-dimethylsiloxane as a non-hermetic packaging material for medical MEMS Conference Proceedings : ... Annual International Conference of the Ieee Engineering in Medicine and Biology Society. Ieee Engineering in Medicine and Biology Society. Conference. 2012: 1655-1658. PMID 23366225 DOI: 10.1109/EMBC.2012.6346264  1
2012 Smith RA, Fissell WH, Fleischman AJ, Zorman CA. A low-cost automated streaming potential measurement system. Journal of Laboratory Automation. 17: 125-33. PMID 22357558 DOI: 10.1177/2211068211425663  1
2012 Zamani H, Lee SW, Avishai A, Zorman CA, Mohan Sankaran R, Feng PXL. Focused ion beam (FIB) nanomachining of silicon carbide (SiC) stencil masks for nanoscale patterning Materials Science Forum. 717: 889-892. DOI: 10.4028/Www.Scientific.Net/Msf.717-720.889  1
2012 Zorman C, Eldridge A, Du J, Johnston M, Dubnisheva A, Manley S, Fissell W, Fleischman A, Roy S. Amorphous silicon carbide as a non-biofouling structural material for biomedical microdevices Materials Science Forum. 717: 537-540. DOI: 10.4028/Www.Scientific.Net/Msf.717-720.537  1
2012 Barnes AC, Zorman CA, Feng PXL. Amorphous silicon carbide (a-SiC) thin square membranes for resonant micromechanical devices Materials Science Forum. 717: 533-536. DOI: 10.4028/Www.Scientific.Net/Msf.717-720.533  1
2012 Capadona JR, Tyler DJ, Zorman CA, Rowan SJ, Weder C. Mechanically adaptive nanocomposites for neural interfacing Mrs Bulletin. 37: 581-589. DOI: 10.1557/Mrs.2012.97  1
2012 Zorman CA, Barnes AC, Feng PXL. Diaphragm-based microsystems using thin film silicon carbide Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2012.6411566  1
2012 Barnes AC, Lee J, Rawlinson PT, Feng PXL, Zorman CA. Pressure dependence of thin polycrystalline silicon carbide diaphragm resonators Proceedings of Ieee Sensors. DOI: 10.1109/ICSENS.2012.6411366  1
2012 Zorman CA, Barnes AC. Silicon Carbide BioMEMS Silicon Carbide Biotechnology. 351-376. DOI: 10.1016/B978-0-12-385906-8.00010-6  1
2012 Zamani H, Lee J, Rajgopal S, Zorman CA, Mehregany M, Feng PXL. Radio-frequency multi-mode micromechanical disk resonators in 500nm thin silicon carbide (SiC) Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 363-366.  1
2011 Harris JP, Hess AE, Rowan SJ, Weder C, Zorman CA, Tyler DJ, Capadona JR. In vivo deployment of mechanically adaptive nanocomposites for intracortical microelectrodes. Journal of Neural Engineering. 8: 046010. PMID 21654037 DOI: 10.1088/1741-2560/8/4/046010  1
2011 Ferrell N, Groszek J, Li L, Smith R, Butler RS, Zorman CA, Roy S, Fissell WH. Basal lamina secreted by MDCK cells has size- and charge-selective properties. American Journal of Physiology. Renal Physiology. 300: F86-90. PMID 20980405 DOI: 10.1152/Ajprenal.00484.2010  1
2011 Hess AE, Zorman CA. Fabrication and characterization of MEMS-based structures from a bio-inspired, chemo-responsive polymer nanocomposite Materials Research Society Symposium Proceedings. 1299: 147-152. DOI: 10.1557/Opl.2011.56  1
2011 Fu XA, Dunning JL, Mehregany M, Zorman CA. Low stress polycrystalline SiC thin films suitable for MEMS applications Journal of the Electrochemical Society. 158: H675-H680. DOI: 10.1149/1.3575160  1
2011 Scardelletti MC, Karnick DA, Ponchak GE, Zorman CA. Conformal thin film packaging for SiC sensor circuits in harsh environments 2011 Ieee Radio and Wireless Week, Rww 2011 - 2011 Ieee Topical Conference On Wireless Sensors and Sensor Networks, Wisnet 2011. 53-56. DOI: 10.1109/WISNET.2011.5725031  1
2011 Barnes AC, Roberts RC, Tien NC, Zorman CA, Feng PXL. Silicon carbide (SiC) membrane nanomechanical resonators with multiple vibrational modes 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2614-2617. DOI: 10.1109/TRANSDUCERS.2011.5969837  1
2011 Hess AE, Shanmuganathan K, Capadona JR, Hsu L, Rowan S, Weder C, Tyler DJ, Zorman CA. Mechanical behavior of microstructures from a chemo-responsive polymer nanocomposite based on cotton cellulose nanofibers Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 453-456. DOI: 10.1109/MEMSYS.2011.5734459  1
2011 Hess AE, Sabens DM, Martin HB, Zorman CA. Diamond-on-polymer microelectrode arrays fabricated using a chemical release transfer process Journal of Microelectromechanical Systems. 20: 867-875. DOI: 10.1109/Jmems.2011.2159099  1
2011 Scardelletti MC, Ponchak GE, Jordan JL, Varaljay NC, McQuaid EA, Zorman CA. Temperature dependence of SiC thin film metal-insulator-metal (MIM) capacitors on alumina over a temperature range from 25 to 500°C Proceedings - Electronic Components and Technology Conference. 1058-1063. DOI: 10.1109/ECTC.2011.5898641  1
2011 Smith RA, Goldman K, Fissell WH, Fleischman AJ, Zorman CA, Roy S. Removal of endotoxin from deionized water using micromachined silicon nanopore membranes Journal of Micromechanics and Microengineering. 21. DOI: 10.1088/0960-1317/21/5/054029  1
2011 Hess AE, Capadona JR, Shanmuganathan K, Hsu L, Rowan SJ, Weder C, Tyler DJ, Zorman CA. Development of a stimuli-responsive polymer nanocomposite toward biologically optimized, MEMS-based neural probes Journal of Micromechanics and Microengineering. 21. DOI: 10.1088/0960-1317/21/5/054009  1
2011 Smith RA, Fleischman AJ, Fissell WH, Zorman CA, Roy S. A system to measure minute hydraulic permeability of nanometer scale devices in a non-destructive manner Measurement Science and Technology. 22. DOI: 10.1088/0957-0233/22/4/045802  1
2011 Rajasekhara S, Neuner BH, Zorman CA, Jegenyes N, Ferro G, Shvets G, Ferreira PJ, Kovar D. The influence of impurities and planar defects on the infrared properties of silicon carbide films Applied Physics Letters. 98. DOI: 10.1063/1.3585098  1
2011 Zorman CA, Parro RJ. Micro- and Nanomechanical Structures for Silicon Carbide MEMS and NEMS Silicon Carbide. 1: 411-451. DOI: 10.1002/Pssb.200844135  1
2010 Feng XL, Matheny MH, Zorman CA, Mehregany M, Roukes ML. Low voltage nanoelectromechanical switches based on silicon carbide nanowires. Nano Letters. 10: 2891-6. PMID 20698601 DOI: 10.1021/Nl1009734  1
2010 Groszek J, Li L, Ferrell N, Smith R, Zorman CA, Hofmann CL, Roy S, Fissell WH. Molecular conformation and filtration properties of anionic Ficoll. American Journal of Physiology. Renal Physiology. 299: F752-7. PMID 20668097 DOI: 10.1152/Ajprenal.00324.2010  1
2010 Du J, Zorman CA. The process and mechanism of low temperature silicon carbide-to-silicon direct bonding using amorphous hydrogenated silicon carbide films Micro and Nanosystems. 2: 100-107. DOI: 10.2174/1876402911002020100  1
2010 Hess AE, Sabens DM, Martin HB, Zorman CA. Polycrystalline diamond-on-polymer electrode arrays fabricated using a polymer-based transfer process Electrochemical and Solid-State Letters. 13. DOI: 10.1149/1.3479691  1
2010 Scardelletti MC, Stanton JW, Ponchak GE, Jordan JL, Zorman CA. PVD silicon carbide as a thin film packaging technology for antennas on LCP substrates for harsh environments 2010 Ieee Radio and Wireless Symposium, Rww 2010 - Paper Digest. 72-75. DOI: 10.1109/RWS.2010.5434263  1
2009 Burla RK, Chen L, Zorman CA, Mehregany M. Development of nickel wire bonding for high-temperature packaging of SiC devices Ieee Transactions On Advanced Packaging. 32: 564-574. DOI: 10.1109/Tadvp.2009.2015593  1
2009 Fu XA, Dunning J, Zorman CA, Mehregany M. Stress and strain gradient control of polycrystalline SiC films Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1087-1090. DOI: 10.1109/SENSOR.2009.5285948  1
2009 Feng XL, Matheny MH, Karabalin RB, Zorman CA, Mehregany M, Roukes ML. Silicon Carbide (SiC) top-down nanowire electromechanical resonators Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 2246-2249. DOI: 10.1109/SENSOR.2009.5285595  1
2009 Hess A, Dunning J, Harris J, Capadona JR, Shanmuganathan K, Rowan SJ, Weder C, Tyler DJ, Zorman CA. A bio-inspired, chemo-responsive polymer nanocomposite for mechanically dynamic microsystems Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 224-227. DOI: 10.1109/SENSOR.2009.5285522  1
2009 Pehlivanoǧlu IE, Zorman CA, Young DJ. Silicon carbide MEMS oscilator Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 569-572. DOI: 10.1109/SENSOR.2009.5285388  1
2009 Young DJ, Pehlivanoǧlu IE, Zorman CA. Silicon carbide MEMS-resonator-based oscillator Journal of Micromechanics and Microengineering. 19. DOI: 10.1088/0960-1317/19/11/115027  1
2009 Chang W, Zorman C. Grain size control of (111) polycrystalline 3C-SiC films by doping used as folded-beam MEMS resonators for energy dissipation Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems. 15: 875-880. DOI: 10.1007/S00542-009-0836-Z  1
2009 Zorman CA. Silicon carbide as a material for biomedical microsystems Dtip of Mems and Moems - Symposium On Design, Test, Integration and Packaging of Mems/Moems. 107-114.  1
2008 Chang WT, Zorman C. Electrical Characterization of Microelectromechanical Silicon Carbide Resonators. Sensors (Basel, Switzerland). 8: 5759-5774. PMID 27873838 DOI: 10.3390/S8095759  0.52
2008 Scardelletti MC, Ponchak GE, Merritt S, Minor JS, Zorman CA. Electrically small folded slot antenna utilizing capacitive loaded slot lines 2008 Ieee Radio and Wireless Symposium, Rws. 731-734. DOI: 10.1109/RWS.2008.4463596  1
2008 Scardelletti MC, Zorman CA, Oldham DR. RF MEMS switches with SiC microbridges for improved reliability 2008 Ieee International Symposium On Antennas and Propagation and Usnc/Ursi National Radio Science Meeting, Apsursi. DOI: 10.1109/APS.2008.4619927  1
2008 Duzhko V, Du J, Zorman CA, Singer KD. Electric field patterning of organic nanoarchitectures with self-assembled molecular fibers Journal of Physical Chemistry C. 112: 12081-12084. DOI: 10.1021/Jp805010K  1
2008 Parro RJ, Scardelletti MC, Varaljay NC, Zimmerman S, Zorman CA. Amorphous SiC as a structural layer in microbridge-based RF MEMS switches for use in software-defined radio Solid-State Electronics. 52: 1647-1651. DOI: 10.1016/J.Sse.2008.06.004  1
2008 Nagappa S, Zupan M, Zorman CA. Mechanical characterization of chemical-vapor-deposited polycrystalline 3C silicon carbide thin films Scripta Materialia. 59: 995-998. DOI: 10.1016/J.Scriptamat.2008.07.010  1
2008 Chang W, Zorman CA. Determination of Young’s moduli of 3C (110) single-crystal and (111) polycrystalline silicon carbide from operating frequencies Journal of Materials Science. 43: 4512-4517. DOI: 10.1007/S10853-008-2648-4  1
2008 Sheth DB, Suresh G, Yang J, Ladas T, Zorman CA, Gratzl M. MEMS device to monitor biological oxygen uptake at arrays of single cells and small cell clusters Electroanalysis. 20: 627-634. DOI: 10.1002/Elan.200704122  1
2007 Ferrara LA, Fleischman AJ, Dunning JL, Zorman CA, Roy S. Effects of biomedical sterilization processes on performance characteristics of MEMS pressure sensors. Biomedical Microdevices. 9: 809-14. PMID 17530408 DOI: 10.1007/S10544-007-9093-Z  1
2007 Hess A, Parro R, Du J, Dunning J, Scardelletti M, Zorman CA. PECVD silicon carbide as a thin film packaging material for microfabricated neural electrodes Materials Research Society Symposium Proceedings. 1009: 8-13. DOI: 10.1557/Proc-1009-U04-03  1
2007 Shvets G, Korobkin D, Urzhumov Y, Neuner B, Fietz C, Zorman C, Taubner T, Hillenbrand R. Extraordinary Optical Properties of SiC Membranes: Superlensing, Sub-Surface Imaging, and Enhanced Transmission through Hole Arrays in Mid-IR Frontiers in Optics. DOI: 10.1364/Fio.2007.Fthr1  0.6
2007 Summers JB, Scardelletti M, Parro R, Zorman CA. Development of amorphous SiC for MEMS-based microbridges Proceedings of Spie - the International Society For Optical Engineering. 6464. DOI: 10.1117/12.704705  1
2007 Du J, Zorman CA. Low temperature a-SiC/Si direct bonding technology for MEMS/NEMS Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 2075-2078. DOI: 10.1109/SENSOR.2007.4300573  1
2007 Hess AE, Dunning JL, Tyler DJ, Zorman CA. A polynorbornene-based microelectrode array for neural interfacing Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 1235-1238. DOI: 10.1109/SENSOR.2007.4300360  1
2007 Fu XA, Trevino J, Noh S, Zorman CA, Mehregany M. Nitrogen doped polcrystalline 3C-SiC films deposited by LPCVD for MEMS applications Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 509-512. DOI: 10.1109/SENSOR.2007.4300179  1
2007 Chang WT, Mehregany M, Zorman CA. Energy dissipation in folded-beam MEMS resonators made from singleCrystal and poly crystalline 3C-SiC films Proceedings of the 2nd Ieee International Conference On Nano/Micro Engineered and Molecular Systems, Ieee Nems 2007. 740-744. DOI: 10.1109/NEMS.2007.352124  1
2007 Roberts RC, Du J, Ong AK, Li D, Zorman CA, Tien NC. Electrostatically driven touch-mode poly-SiC micro speaker Proceedings of Ieee Sensors. 284-287. DOI: 10.1109/ICSENS.2007.4388392  1
2007 Hess AE, Dunning J, Tyler D, Zorman CA. Development of a microfabricated flat interface nerve electrode based on liquid crystal polymer and polynorbornene multilayered structures Proceedings of the 3rd International Ieee Embs Conference On Neural Engineering. 32-35. DOI: 10.1109/CNE.2007.369604  1
2007 Urzhumov YA, Korobkin D, Neuner B, Zorman C, Shvets G. Optical properties of sub-wavelength hole arrays in SiC membranes Journal of Optics a: Pure and Applied Optics. 9. DOI: 10.1088/1464-4258/9/9/S07  1
2007 Enderling S, Hedley J, Jiang L, Cheung R, Zorman C, Mehregany M, Walton AJ. Characterization of frequency tuning using focused ion beam platinum deposition Journal of Micromechanics and Microengineering. 17: 213-219. DOI: 10.1088/0960-1317/17/2/005  0.6
2007 Pozzi M, Hassan M, Harris AJ, Burdess JS, Jiang L, Lee KK, Cheung R, Phelps GJ, Wright NG, Zorman CA, Mehregany M. Mechanical properties of a 3C-SiC film between room temperature and 600 °c Journal of Physics D: Applied Physics. 40: 3335-3342. DOI: 10.1088/0022-3727/40/11/012  1
2007 Gao JR, Hajenius M, Tichelaar FD, Klapwijk TM, Voronov B, Grishin E, Gol'Tsman G, Zorman CA, Mehregany M. Monocrystalline NbN nanofilms on a 3C-SiCSi substrate Applied Physics Letters. 91. DOI: 10.1063/1.2766963  1
2007 Korobkin D, Urzhumov YA, Neuner B, Zorman C, Zhang Z, Mayergoyz ID, Shvets G. Mid-infrared metamaterial based on perforated SiC membrane: Engineering optical response using surface phonon polaritons Applied Physics a: Materials Science and Processing. 88: 605-609. DOI: 10.1007/S00339-007-4084-8  1
2007 Pozzi M, Harris AJ, Burdess JS, Lee KK, Cheung R, Phelps GJ, Wright NG, Zorman CA, Mehregany M. Mechanical properties of poly crystalline 3C-SiC heteroepitaxial layers 2007 Nsti Nanotechnology Conference and Trade Show - Nsti Nanotech 2007, Technical Proceedings. 4: 65-68.  1
2006 Chen L, Fu XA, Zorman CA, Mehregany M. Novel polycrystalline SiC films containing nanoscale through-pores by selective APCVD Materials Science Forum. 527: 755-758. DOI: 10.4028/Www.Scientific.Net/Msf.527-529.755  1
2006 Fu XA, Trevino J, Mehregany M, Zorman C. Nitrogen-doping of polycrystalline 3C-SiC films deposited by low pressure chemical vapor deposition Materials Science Forum. 527: 311-314. DOI: 10.4028/Www.Scientific.Net/Msf.527-529.311  1
2006 Dunning J, Fu XA, Mehregany M, Zorman CA. Characterization of low stress, undoped LPCVD polycrystalline SiC films for MEMS applications Materials Science Forum. 527: 1103-1106. DOI: 10.4028/Www.Scientific.Net/Msf.527-529.1103  1
2006 Keesara VV, Durand DM, Zorman CA. Fabrication and characterization of flexible, microfabricated neural electrode arrays made from liquid crystal polymer and polynorbornene Materials Research Society Symposium Proceedings. 926: 58-63. DOI: 10.1557/Proc-0926-Cc06-04  1
2006 Du J, Singh N, Summers JB, Zorman CA. Development of PECVD SiC for MEMS using 3MS as the precursor Materials Research Society Symposium Proceedings. 911: 283-288. DOI: 10.1557/Proc-0911-B05-28  1
2006 Zorman CA, Fu XA, Mehregany M. Deposition techniques for SiC MEMS Silicon Carbide Micro Electromechanical Systems For Harsh Environments. 18-45. DOI: 10.1142/9781860949098_0002  1
2006 Scardelletti MC, Varaljay NC, Oldham DR, Zorman CA. PECVD silicon carbide as a chemically-resistant thin film packaging technology for microfabricated antennas Ieee Wireless and Microwave Technology Conference, Wamicon 2006. DOI: 10.1109/WAMICON.2006.351933  1
2006 Wu CH, Zorman CA, Mehregany M. Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications Ieee Sensors Journal. 6: 316-323. DOI: 10.1109/Jsen.2006.870145  1
2006 Jun SC, Huang XMH, Manolidis M, Zorman CA, Mehregany M, Hone J. Electrothermal tuning of Al-SiC nanomechanical resonators Nanotechnology. 17: 1506-1511. DOI: 10.1088/0957-4484/17/5/057  1
2006 Espinosa HD, Peng B, Moldovan N, Friedmann TA, Xiao X, Mancini DC, Auciello O, Carlisle J, Zorman CA, Merhegany M. Elasticity, strength, and toughness of single crystal silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon Applied Physics Letters. 89. DOI: 10.1063/1.2336220  1
2006 Roy S, Zorman C, Mehregany M, Deanna R, Deeb C. The mechanical properties of polycrystalline 3C-SiC films grown on polysilicon substrates by atmospheric pressure chemical-vapor deposition Journal of Applied Physics. 99. DOI: 10.1063/1.2169875  1
2006 Hatty V, Kahn H, Trevino J, Zorman CA, Mehregany M, Ballarini R, Heuer AH. Fracture toughness of low-pressure chemical-vapor-deposited polycrystalline silicon carbide thin films Journal of Applied Physics. 99. DOI: 10.1063/1.2158135  1
2006 Jiang L, Cheung R, Hedley J, Hassan M, Harris AJ, Burdess JS, Mehregany M, Zorman CA. SiC cantilever resonators with electrothermal actuation Sensors and Actuators, a: Physical. 128: 376-386. DOI: 10.1016/J.Sna.2006.01.045  1
2006 Jiang L, Anderson S, Thong E, Cheung R, Zorman CA, Mehregany M. Fabrication of hall device structures in 3C-SiC using microelectromechanical processing technology Microelectronic Engineering. 83: 1396-1399. DOI: 10.1016/J.Mee.2006.01.212  1
2006 Smith RA, Zorman CA, Fleischman AJ, Roy S. Evaluation of fluid flow through micromachined nanoporous membranes using a custom-built automated testing and data acquisition system 2006 6th Ieee Conference On Nanotechnology, Ieee-Nano 2006. 2: 806-809.  1
2006 Gao JR, Hajenius M, Tichelaar FD, Voronov B, Grishina E, Klapwijk TM, Gol'tsman G, Zorman CA. Can NbN films on 3C-SiC/Si change the IF bandwidth of hot electron bolometer mixers? 17th International Symposium On Space Terahertz Technology 2006, Isstt 2006. 127-129.  1
2005 Lei S, Zorman CA, Garverick SL. An oversampled capacitance-to-voltage converter IC with application to time-domain characterization of MEMS resonators Ieee Sensors Journal. 5: 1353-1361. DOI: 10.1109/Jsen.2005.859236  1
2005 Jackson KM, Dunning J, Zorman CA, Mehregany M, Sharpe WN. Mechanical properties of epitaxial 3C silicon carbide thin films Journal of Microelectromechanical Systems. 14: 664-672. DOI: 10.1109/Jmems.2005.847933  1
2005 Wiser RF, Tabib-Azar M, Mehregany M, Zorman CA. Polycrystalline silicon-carbide surface-micromachined vertical resonators - Part II: Electrical testing and material property extraction Journal of Microelectromechanical Systems. 14: 579-589. DOI: 10.1109/Jmems.2005.844748  1
2005 Wiser RF, Chung J, Mehregany M, Zorman CA. Polycrystalline silicon-carbide surface-micromachined vertical resonators - Part I: Growth study and device fabrication Journal of Microelectromechanical Systems. 14: 567-578. DOI: 10.1109/Jmems.2005.844747  1
2005 Du J, Ko WH, Mehregany M, Zorman CA. Poly-SiC capacitive pressure sensors made by wafer bonding Proceedings of Ieee Sensors. 2005: 1267-1270. DOI: 10.1109/ICSENS.2005.1597937  1
2005 Jun SC, Huang XMH, Hone J, Zorman CA, Mehregany M. Evaluation of 3C-SiC nanomechanical resonators using room temperature magnetomotive transduction Proceedings of Ieee Sensors. 2005: 1042-1045. DOI: 10.1109/ICSENS.2005.1597881  1
2005 Korobkin D, Urzhumov YA, Zorman C, Shvets G. Far-field detection of the super-lensing effect in the mid-infrared: Theory and experiment Journal of Modern Optics. 52: 2351-2364. DOI: 10.1080/09500340500275942  1
2005 Bellante JJ, Kahn H, Ballarini R, Zorman CA, Mehregany M, Heuer AH. Fracture toughness of polycrystalline silicon carbide thin films Applied Physics Letters. 86: 1-3. DOI: 10.1063/1.1864246  1
2005 Fu XA, Dunning JL, Zorman CA, Mehregany M. Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition Thin Solid Films. 492: 195-202. DOI: 10.1016/J.Tsf.2005.07.236  1
2005 Fu XA, Dunning JL, Zorman CA, Mehregany M. Polycrystalline 3C-SiC thin films deposited by dual precursor LPCVD for MEMS applications Sensors and Actuators, a: Physical. 119: 169-176. DOI: 10.1016/J.Sna.2004.09.009  1
2005 Jiang L, Hassan M, Cheung R, Harris AJ, Burdess JS, Zorman CA, Mehregany M. Dry release fabrication and testing of SiC electrostatic cantilever actuators Microelectronic Engineering. 78: 106-111. DOI: 10.1016/J.Mee.2004.12.015  1
2005 Espinosa HD, Peng B, Moldovan N, Friedmann TA, Xiao X, Mancini DC, Auciello O, Carlisle J, Zorman CA. A comparison of mechanical properties of three MEMS materials - Silicon carbide, ultrananocrystalline diamond, and hydrogen-free tetrahedral amorphous carbon (Ta-C) 11th International Conference On Fracture 2005, Icf11. 5: 3806-3811.  1
2004 Fu XA, Dunning J, Zorman CA, Mehregany M. Development of a high-throughput LPCVD process for depositing low stress poly-SiC Materials Science Forum. 457: 305-308. DOI: 10.4028/Www.Scientific.Net/Msf.457-460.305  1
2004 Huang XMH, Feng XL, Prakash MK, Kumar S, Zorman CA, Mehregany M, Roukes ML. Fabrication of suspended nanomechanical structures from bulk 6H-SiC substrates Materials Science Forum. 457: 1531-1534. DOI: 10.4028/Www.Scientific.Net/Msf.457-460.1531  1
2004 Dunning J, Fu XA, Rajgopal S, Mehregany M, Zorman CA. Characterization of polycrystalline SiC thin films for MEMS applications using surface micromachined devices Materials Science Forum. 457: 1523-1526. DOI: 10.4028/Www.Scientific.Net/Msf.457-460.1523  1
2004 Fu XA, Dunning J, Zorman CA, Mehregany M. Young's modulus and residual stress of polycrystalline 3C-SiC films grown by LPCVD and measured by the load-deflection technique Materials Science Forum. 457: 1519-1522. DOI: 10.4028/Www.Scientific.Net/Msf.457-460.1519  1
2004 Zorman CA, Mehregany M. Advanced processing techniques for silicon carbide MEMS and NEMS Materials Science Forum. 457: 1451-1456. DOI: 10.4028/Www.Scientific.Net/Msf.457-460.1451  1
2004 Fu XA, Zorman CA, Mehregany M. Surface roughness control of 3C-SiC films during the epitaxial growth process Journal of the Electrochemical Society. 151. DOI: 10.1149/1.1819833  1
2004 Mehregany M, Zorman CA. Silicon Carbide Micro- and Nanoelectromechanical Systems Proceedings of Spie - the International Society For Optical Engineering. 5344. DOI: 10.1117/12.548920  1
2004 Young DJ, Du J, Zorman CA, Ko WH. High-temperature single-crystal 3C-SiC capacitive pressure sensor Ieee Sensors Journal. 4: 464-470. DOI: 10.1109/Jsen.2004.830301  1
2004 Fu XA, Jezeski R, Zorman CA, Mehregany M. Use of deposition pressure to control residual stress in polycrystalline SiC films Applied Physics Letters. 84: 341-343. DOI: 10.1063/1.1640781  1
2004 Mehregany M, Zorman CA. Silicon Carbide Micro- and Nanoelectromechanical Systems Proceedings of Spie - the International Society For Optical Engineering. 5346.  1
2004 Rogers BR, Song Z, Marschall J, Queraltó N, Zorman CA. The effect of dissociated oxygen on the oxidation of SI, polycrystalline SIC and LPCVD SI 3N 4 Proceedings - Electrochemical Society. 268-278.  1
2004 Enderling S, Jiang L, Ross AWS, Bond S, Hedley J, Harris AJ, Burdens JS, Cheung R, Zorman CA, Mehregany M, Walton AJ. MEMS resonator tuning using focused ion beam platinum deposition 2004 Nsti Nanotechnology Conference and Trade Show - Nsti Nanotech 2004. 3: 421-424.  1
2003 Henry Huang XM, Zorman CA, Mehregany M, Roukes ML. Nanoelectromechanical systems: Nanodevice motion at microwave frequencies. Nature. 421: 496. PMID 12556880 DOI: 10.1038/421496A  0.48
2003 Fu XA, Dunning J, Rajgopal S, Zhang M, Zorman CA, Mehregany M. Mechanical properties and morphology of polycrystalline 3C-SiC films deposited on Si and SiO2 by LPCVD Materials Research Society Symposium - Proceedings. 795: 381-386. DOI: 10.1557/Proc-795-U11.3  1
2003 Chen L, Fu XA, Zorman CA, Mehregany M. Fabrication of micro- and nanoscale SiC structures using selective deposition processes Materials Research Society Symposium - Proceedings. 782: 37-42. DOI: 10.1557/Proc-782-A2.2  1
2003 Jiang L, Cheung R, Hassan M, Harris AJ, Burdess JS, Zorman CA, Mehregany M. Fabrication of SiC microelectromechanical systems using one-step dry etching Journal of Vacuum Science & Technology B. 21: 2998-3001. DOI: 10.1116/1.1627804  0.48
2003 Wiser RF, Zorman CA, Mehregany M. Fabrication and testing of vertically-actuated polycrystalline SiC micromechanical resonators for MHz frequency applications Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 2: 1164-1167. DOI: 10.1109/SENSOR.2003.1216978  1
2003 Kuo HI, Zorman CA, Mehregany M. Fabrication and testing of single crystalline 3C-SiC devices using a novel SiC-on-insulator substrate Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 1: 742-745. DOI: 10.1109/SENSOR.2003.1215580  1
2003 Huang XMH, Zorman CA, Mehregany M, Roukes ML. Quality factor issues in silicon carbide nanomechanical resonators Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 1: 722-725. DOI: 10.1109/SENSOR.2003.1215575  1
2003 Huang XMH, Prakash MK, Zorman CA, Mehregany M, Roukers ML. Free-free beam silicon carbide nanomechanical resonators Transducers 2003 - 12th International Conference On Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. 1: 342-343. DOI: 10.1109/SENSOR.2003.1215323  1
2003 Dong Y, Zorman C, Molian P. Femtosecond pulsed laser micromachining of single crystalline 3C–SiC structures based on a laser-induced defect-activation process Journal of Micromechanics and Microengineering. 13: 680-685. DOI: 10.1088/0960-1317/13/5/320  0.6
2003 Mitchell JS, Zorman CA, Kicher T, Roy S, Mehregany M. Examination of bulge test for determining residual stress, Young's modulus, and Poisson's ratio of 3C-SiC thin films Journal of Aerospace Engineering. 16: 46-54. DOI: 10.1061/(Asce)0893-1321(2003)16:2(46)  1
2003 Seyller T, Sieber N, Stark T, Ley L, Zorman CA, Mehregany M. Stacking rearrangement at 6H-SiC(0 0 0 1) surfaces during thermal hydrogenation Surface Science. 532: 698-704. DOI: 10.1016/S0039-6028(03)00157-2  1
2003 Du J, Young DJ, Zorman CA, Ko WH. Single Crystal SiC Capacitive Pressure Sensor at 400 °C Technical Digest - International Electron Devices Meeting. 783-786.  1
2003 Jiang L, Cheung R, Hassan M, Harris AJ, Burdess JS, Zorman CA, Mehregany M. Fabrication of SiC microelectromechanical systems using one-step dry etching Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 2998-3001.  1
2003 Richards BS, Lambertz A, Corkish RP, Zorman CA, Mehregany M, Ionescu M, Green MA. 3C-S1C as a future photovoltaic material Proceedings of the 3rd World Conference On Photovoltaic Energy Conversion. 2738-2741.  1
2002 Song X, Rajgopal S, Melzak JM, Zorman CA, Mehregany M. Development of a multilayer SiC surface micromachining process with capabilities and design rules comparable to conventional polysilicon surface micromachining Materials Science Forum. 389: 755-758. DOI: 10.4028/Www.Scientific.Net/Msf.389-393.755  1
2002 Dong Y, Molian P, Zorman CA, Mehregany M. High-energy femtosecond pulsed laser micromachining of thin film deposited silicon in self-focused air medium Journal of Laser Applications. 14: 221-229. DOI: 10.2351/1.1516189  0.48
2002 Wiser RF, Chung J, Mehregany M, Zorman CA. Growth of polycrystalline silicon carbide on thin polysilicon sacrificial layers for surface micromachining applications Materials Research Society Symposium - Proceedings. 741: 67-72. DOI: 10.1557/Proc-741-J4.3  1
2002 Fu XA, Zorman CA, Mehregany M. Chemical mechanical polishing of cubic silicon carbide films grown on Si(100) wafers Journal of the Electrochemical Society. 149. DOI: 10.1149/1.1517285  1
2002 Zorman CA, Rajgopal S, Fu XA, Jezeski R, Melzak J, Mehregany M. Deposition of polycrystalline 3C-SiC films on 100 mm diameter Si(100) wafers in a large-volume LPCVD furnace Electrochemical and Solid-State Letters. 5. DOI: 10.1149/1.1506461  1
2002 Roy S, DeAnna RG, Zorman CA, Mehregany M. Fabrication and characterization of polycrystalline SiC resonators Ieee Transactions On Electron Devices. 49: 2323-2332. DOI: 10.1109/Ted.2002.807445  1
2002 Grigull S, Ishimaru M, Nastasi M, Zorman CA, Mehregany M. On the stability of β-SiC with respect to chemical disorder induced by irradiation with energetic particles Philosophical Magazine Letters. 81: 55-61. DOI: 10.1080/09500830010010968  1
2002 Sieber N, Stark T, Seyller T, Ley L, Zorman CA, Mehregany M. Erratum: “Origin of the split Si–H stretch mode on hydrogen terminated 6H-SiC(0001): Titration of crystal truncation” [Appl. Phys. Lett. 80, 4726 (2002)] Applied Physics Letters. 81: 1534-1534. DOI: 10.1063/1.1502198  0.48
2002 Sieber N, Stark T, Seyller T, Ley L, Zorman CA, Mehregany M. Origin of the split Si-H stretch mode on hydrogen terminated 6H-SiC(0001): Titration of crystal truncation Applied Physics Letters. 80: 4726-4728. DOI: 10.1063/1.1488692  1
2002 Rohmfeld S, Hundhausen M, Ley L, Zorman CA, Mehregany M. Quantitative evaluation of biaxial strain in epitaxial 3C-SiC layers on Si(100) substrates by Raman spectroscopy Journal of Applied Physics. 91: 1113-1117. DOI: 10.1063/1.1427408  1
2002 Zorman CA, Mehregany M. Silicon Carbide for MEMS and NEMS - An Overview Proceedings of Ieee Sensors. 1: 1109-1114.  1
2001 Wu C, Chung J, Hong MH, Zorman CA, Pirouz P, Mehregany M. A Comparison of SiO 2 and Si 3 N 4 Masks for Selective Epitaxial Growth of 3C-SiC Films on Si Materials Science Forum. 171-174. DOI: 10.4028/Www.Scientific.Net/Msf.353-356.171  0.48
2001 Wu CH, Chung J, Hong MH, Zorman CA, Pirouz P, Mehregany M. Microstructure and surface morphology of thin 3C-SiC films grown on (100) Si substrates using an APCVD-based carbonization process Materials Science Forum. 353: 167-170. DOI: 10.4028/Www.Scientific.Net/Msf.353-356.167  1
2001 Davis RF, Gehrke T, Linthicum KJ, Rajagopal P, Roskowski AM, Zheleva T, Preble EA, Zorman CA, Mehregany M, Schwarz U, Schuck J, Grober R. Review of pendeo-epitaxial growth and characterization of thin films of GaN and AlGaN alloys on 6H-SiC(0001) and Si(111) substrates Mrs Internet Journal of Nitride Semiconductor Research. 6. DOI: 10.1557/S1092578300000260  1
2001 Kuo HI, Zorman C, Mehregany M. A novel method of fabricating SiC-On-insulator substrates for use in MEMS Materials Research Society Symposium Proceedings. 681: 101-106. DOI: 10.1557/Proc-681-I5.16  1
2001 Deeb C, Kahn H, Milhet X, Zorman C, Mehregany M, Heuer AH. Low temperature (300°C) formation of thermodynamically stable NiSi2 contacts to SiC Materials Research Society Symposium - Proceedings. 640. DOI: 10.1557/Proc-640-H5.22  1
2001 Mehregany M, Zorman CA. Micromachining techniques for advanced SiC MEMS Materials Research Society Symposium - Proceedings. 640. DOI: 10.1557/Proc-640-H4.3  1
2001 Mehregany M, Zorman CA. Surface Micromachining: A Brief Introduction Mrs Bulletin. 26: 289-290. DOI: 10.1557/Mrs2001.61  0.48
2001 Yang YT, Ekinci KL, Huang XMH, Schiavone LM, Roukes ML, Zorman CA, Mehregany M. Monocrystalline silicon carbide nanoelectromechanical systems Applied Physics Letters. 78: 162-164. DOI: 10.1063/1.1338959  1
2001 Davis RF, Gehrke T, Linthicum KJ, Preble E, Rajagopal P, Ronning C, Zorman C, Mehregany M. Conventional and pendeo-epitaxial growth of GaN(0 0 0 1) thin films on Si(1 1 1) substrates Journal of Crystal Growth. 231: 335-341. DOI: 10.1016/S0022-0248(01)01462-2  0.6
2001 Davis RF, Gehrke T, Linthicum KJ, Zheleva TS, Preble EA, Rajagopal P, Zorman CA, Mehregany M. Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization Journal of Crystal Growth. 225: 134-140. DOI: 10.1016/S0022-0248(01)00836-3  1
2001 Wu CH, Chung J, Hong MH, Zorman CA, Pirouz P, Mehregany M. Comparison of SiO2 and Si3N4 masks for selective epitaxial growth of 3C-SiC films on Si Materials Science Forum. 353: 171-174.  1
2001 Davis RF, Gehrke T, Linthicum KJ, Zheleva TS, Rajagopal P, Zorman CA, Mehregany M. Pendeo-epitaxial growth and characterization of thin films of gallium nitride and related materials on SiC(0001) and Si(111) substrates Zeitschrift Fuer Metallkunde/Materials Research and Advanced Techniques. 92: 163-166.  1
2000 Rohmfeld S, Hundhausen M, Ley L, Zorman CA, Mehregany M. Raman spectroscopy on biaxially strained epitaxial layers of 3C-SiC on Si Materials Science Forum. 338. DOI: 10.4028/Www.Scientific.Net/Msf.338-342.595  1
2000 Wu CH, Zorman CA, Mehregany M. Characterization of polycrystalline SiC grown on SiO2 and Si3N4 by APCVD for MEMS applications Materials Science Forum. 541-544. DOI: 10.4028/Www.Scientific.Net/Msf.338-342.541  0.48
2000 Rajan N, Zorman CA, Mehregany M. Bulk micromachining of polycrystalline SiC using Si molds fabricated by Deep Reactive Ion Etching Materials Science Forum. 338. DOI: 10.4028/Www.Scientific.Net/Msf.338-342.1145  1
2000 Song X, Guo S, Zorman CA, Wu CH, Yasseen AA, Mehregany M. Molding-based thin film patterning techniques for SiC surface micromachining Materials Science Forum. 338. DOI: 10.4028/Www.Scientific.Net/Msf.338-342.1141  1
2000 Davis RF, Gehrke T, Linthicum KJ, Zheleva TS, Rajagopal P, Zorman CA, Mehregany M. Pendeo-epitaxial growth and characterization of GaN and related materials on 6H-SiC(0001) and Si(111) substrates Mrs Internet Journal of Nitride Semiconductor Research. 5: 49-61. DOI: 10.1557/S1092578300004075  0.48
2000 McMahon JJ, Melzak JM, Zorman CA, Chung J, Mehregany M. Deposition and characterization of in-situ boron doped polycrystalline silicon films for microelectromechanical systems applications Materials Research Society Symposium - Proceedings. 605: 31-36. DOI: 10.1557/Proc-605-31  1
2000 Mehregany M, Zorman CA, Roy S, Fleischman AJ, Wu CH, Rajan N. Silicon carbide for microelectromechanical systems International Materials Reviews. 45: 85-108. DOI: 10.1179/095066000101528322  1
2000 Yasseen AA, Wu CH, Zorman CA, Mehregany M. Fabrication and testing of surface micromachined polycrystalline SiC micromotors Ieee Electron Device Letters. 21: 164-166. DOI: 10.1109/55.830969  1
2000 Koch C, Spence JCH, Zorman C, Mehregany M, Chung J. Modelling of HREM and nanodiffraction for dislocation kinks and core reconstruction Journal of Physics Condensed Matter. 12: 10175-10183. DOI: 10.1088/0953-8984/12/49/317  1
2000 Zorman CA, Mearini GT, Hoffman RW. In situ heating study of hydrogen-containing adsorbates on polycrystalline diamond surfaces using elastic recoil detection Diamond and Related Materials. 9: 1518-1523. DOI: 10.1016/S0925-9635(00)00278-8  1
2000 Gehrke T, Linthicum KJ, Preble E, Rajagopal P, Ronning C, Zorman C, Mehregany M, Davis RF. Pendeo-epitaxial growth of gallium nitride on silicon substrates Journal of Electronic Materials. 29: 306-310. DOI: 10.1007/S11664-000-0068-6  0.6
2000 Wu CH, Zorman CA, Mehregany M. Characterization of polycrystalline SiC grown on SiO2 and Si3N4 by APCVD for MEMS applications Materials Science Forum. 338.  1
2000 DeAnna RG, Mitchell J, Zorman CA, Mehregany M. Finite-element modeling of 3C-SiC membranes 2000 International Conference On Modeling and Simulation of Microsystems - Msm 2000. 253-256.  1
2000 Davis RF, Gehrke T, Linthicum KJ, Zheleva TS, Rajagopal P, Zorman CA, Mehregany M. Pendeo-epitaxial growth and characterization of GaN and related materials on 6H-SiC(0001) and Si(111) substrates Mrs Internet Journal of Nitride Semiconductor Research. 5.  1
1999 Linthicum KJ, Gehrke T, Thomson DB, Tracy KM, Carlson EP, Smith TP, Zheleva TS, Zorman CA, Mehregany M, Davis RF. Process routes for low defect-density GaN on various substrates employing pendeo-epitaxial growth techniques Mrs Internet Journal of Nitride Semiconductor Research. 4: 477-483. DOI: 10.1557/S1092578300002921  0.48
1999 Davis RF, Gehrke T, Linthicum KJ, Zheleva TS, Rajagopal P, Zorman CA, Mehregany M. Pendeo-Epitaxial Growth and Characterization of GaN and Related Materials on 6H-SiC(0001) and Si(111) Substrates Mrs Proceedings. 595. DOI: 10.1557/Proc-595-F99W2.1  0.48
1999 Linthicum KJ, Gehrke T, Thomson D, Ronning C, Carlson EP, Zorman CA, Mehregany M, Davis RF. Pendeo-epitaxial growth of GaN on SiC and silicon substrates via metalorganic chemical vapor deposition Mrs Proceedings. 572: 307-313. DOI: 10.1557/Proc-572-307  0.48
1999 Azzam Yasseen A, Zorman CA, Mehregany M. Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries Journal of the Electrochemical Society. 146: 327-330. DOI: 10.1149/1.1391608  1
1999 Rajan N, Mehregany M, Zorman CA, Stefanescu S, Kicher TP. Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines Journal of Microelectromechanical Systems. 8: 251-257. DOI: 10.1109/84.788628  1
1999 Yasseen AA, Zorman CA, Mehregany M. Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO2 and polysilicon Journal of Microelectromechanical Systems. 8: 237-242. DOI: 10.1109/84.788626  1
1999 Mehregany M, Zorman CA. SiC MEMS: Opportunities and challenges for applications in harsh environments Thin Solid Films. 355: 518-524. DOI: 10.1016/S0257-8972(99)00374-6  1
1999 Hung Wu C, Zorman CA, Mehregany M. Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD Thin Solid Films. 355: 179-183. DOI: 10.1016/S0040-6090(99)00494-0  1
1999 Zorman CA, Rajan N, Mehregany M. Micromachining techniques for silicon carbide MEMS Space Technology Conference and Exposition 0.48
1999 Linthicum KJ, Gehrke T, Thomson D, Ronning C, Carlson EP, Zorman CA, Mehregany M, Davis RF. Pendeo-epitaxial growth of GaN on SiC and silicon substrates via metalorganic chemical vapor deposition Materials Research Society Symposium - Proceedings. 572: 307-313.  1
1999 Linthicum KJ, Gehrke T, Thomson DB, Carlson EP, Smith TP, Zheleva TS, Zorman CA, Mehregany M, Davis RF. Process routes for low defect-density GaN on various substrates employing pendeo-epitaxial growth techniques Materials Research Society Symposium - Proceedings. 537.  1
1998 Fleischman AJ, Roy S, Zorman CA, Mehregany M. Behaviour of Polycrystalline SiC and Si Surface-Micromachined Lateral Resonant Structures at Elevated Temperatures Materials Science Forum. 889-894. DOI: 10.4028/Www.Scientific.Net/Msf.264-268.889  0.48
1998 Fleischman AJ, Wei X, Zorman CA, Mehregany M. Surface Micromachining of Polycrystalline SiC Deposited on SiO2 by APCVD Materials Science Forum. 885-888. DOI: 10.4028/Www.Scientific.Net/Msf.264-268.885  0.48
1998 Chandra K, Zorman CA, Mehregany M. Spatial uniformity of the mechanical properties of 3C-SiC films grown on 4-inch Si wafers as a function of film growth conditions Materials Science Forum. 264: 635-638. DOI: 10.4028/Www.Scientific.Net/Msf.264-268.635  1
1998 Zorman CA, Vinod KN, Yasseen AA, Mehregany M. Fabrication of 3C-SiC on SiO2 Structures Using Wafer Bonding Techniques Materials Science Forum. 223-226. DOI: 10.4028/Www.Scientific.Net/Msf.264-268.223  0.48
1998 Wu CH, Fleischman AJ, Zorman CA, Mehregany M. Growth and characterization of SiC films on large-area Si wafers by APCVD - Temperature dependence Materials Science Forum. 264: 179-182. DOI: 10.4028/Www.Scientific.Net/Msf.264-268.179  1
1998 Linthicum KJ, Gehrke T, Thomson DB, Tracy KM, Carlson EP, Smith TP, Zheleva TS, Zorman CA, Mehregany M, Davis RF. Process Routes for Low Defect-Density GaN on Various Substrates Employing Pendeo-Epitaxial Growth Techniques Mrs Proceedings. 537. DOI: 10.1557/Proc-537-G4.9  0.48
1998 DeAnna RG, Zorman CA, Mehregany M. Finite-Element Modeling of Residual Stress in SiC Diaphragms Mrs Proceedings. 518: 221-226. DOI: 10.1557/Proc-518-221  0.48
1998 Fleischman AJ, Zorman CA, Mehregany M. Etching of 3C-SiC using CHF3/O2 and CHF3/O2/He plasmas at 1.75 Torr Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 16: 536-539. DOI: 10.1116/1.589858  1
1998 Mehregany M, Zorman CA, Rajan N, Wu CH. Silicon carbide MEMS for harsh environments Proceedings of the Ieee. 86: 1594-1609. DOI: 10.1109/5.704265  1
1998 Rajan N, Zorman CA, Mehregany M, Deanna R, Harvey RJ. Effect of MEMS-compatible thin film hard coatings on the erosion resistance of silicon micromachined atomizers Surface and Coatings Technology. 108: 391-397. DOI: 10.1016/S0257-8972(98)00596-9  1
1998 Rajan N, Zorman CA, Mehregany M, DeAnna R, Harvey R. Performance of 3C-SiC thin films as protective coatings for silicon-micromachined atomizers Thin Solid Films. 315: 170-178. DOI: 10.1016/S0040-6090(97)00708-6  1
1998 Fleischman AJ, Roy S, Zorman CA, Mehregany M. Behavior of polycrystalline SiC and Si surface-micromachined lateral resonant structures at elevated temperatures Materials Science Forum. 264: 889-892.  1
1998 Fleischman AJ, Wei X, Zorman CA, Mehregany M. Surface micromachining of polycrystalline SiC deposited on SiO2 by APCVD Materials Science Forum. 264: 885-888.  1
1998 Zorman CA, Vinod KN, Yasseen A, Mehregany M. Fabrication of 3C-SiC on SiO2 structures using wafer bonding techniques Materials Science Forum. 264: 223-226.  1
1998 Deanna RG, Fleischman AJ, Zorman CA, Mehregany M. Design, operation, and modeling of a vertical APCVD reactor for silicon carbide film growth Journal of Wide Bandgap Materials. 6: 280-295.  1
1998 Zorman CA, Roy S, Wu CH, Fleischman AJ, Mehregany M. Characterization of polycrystalline silicon carbide films grown by atmospheric pressure chemical vapor deposition on polycrystalline silicon Journal of Materials Research. 13: 406-412.  1
1997 Vinod KN, Zorman CA, Mehregany M. A novel SiC on insulator technology using wafer bonding Sensors. 1: 653-656. DOI: 10.1109/Sensor.1997.613736  0.48
1997 Zorman CA, Mehregany M, Kahn H, Heuer AH. New developments in MEMS using SiC and TiNi shape memory alloy materials Current Opinion in Solid State and Materials Science. 2: 566-570. DOI: 10.1016/S1359-0286(97)80046-0  1
1997 Roy S, Zorman CA, Wu CH, Fleischman AJ, Mehregany M. XRD and XTEM investigation of polycrystalline silicon carbide on polycrystalline silicon Materials Research Society Symposium - Proceedings. 444: 81-86.  1
1996 Fleischman AJ, Roy S, Zorman CA, Mehregany M, Matus LG. Polycrystalline silicon carbide for surface micromachining Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 234-238.  1
1995 Zorman CA, Fleischman AJ, Dewa AS, Mehregany M, Jacob C, Nishino S, Pirouz P. Epitaxial growth of 3C-SiC films on 4 in. diam (100) silicon wafers by atmospheric pressure chemical vapor deposition Journal of Applied Physics. 78: 5136-5138. DOI: 10.1063/1.359745  1
1995 Mearini GT, Krainsky IL, Dayton JA, Wang Y, Zorman CA, Angus JC, Hoffman RW, Anderson DF. Stable secondary electron emission from chemical vapor deposited diamond films coated with alkali-halides Applied Physics Letters. 242. DOI: 10.1063/1.113559  1
1994 Rybicki GC, Zorman CA. Deep level defects and carrier removal due to proton and alpha particle irradiation of InP Journal of Applied Physics. 75: 3187-3189. DOI: 10.1063/1.356144  1
1994 Mearini GT, Krainsky IL, Dayton JA, Wang Y, Zorman CA, Angus JC, Hoffman RW. Stable secondary electron emission observations from chemical vapor deposited diamond Applied Physics Letters. 65: 2702-2704. DOI: 10.1063/1.112611  1
1990 Bromwich DH, Parish TR, Zorman CA. The confluence zone of the intense katabatic winds at Terra Nova Bay, Antarctica, as derived from airborne sastrugi surveys and mesoscale numerical modeling Journal of Geophysical Research. 95: 5495-5509. DOI: 10.1029/Jd095Id05P05495  1
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