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Ye Xu - Publications

Affiliations: 
2006 Materials Science and Engineering Stanford University, Palo Alto, CA 
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4 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2005 Xu Y, Musgrave CB. Atomic layer deposition of high- κ dielectrics on nitrided silicon surfaces Applied Physics Letters. 86: 1-3. DOI: 10.1063/1.1922080  0.529
2005 Xu Y, Musgrave CB. A chemical mechanism for nitrogen incorporation into HfO2 ALD films using ammonia and alkylamide as precursors Surface Science. 591: L280-L285. DOI: 10.1016/J.Susc.2005.06.032  0.516
2005 Xu Y, Musgrave CB. Atomic layer deposition of hafnium nitrides using ammonia and alkylamide precursors Chemical Physics Letters. 407: 272-275. DOI: 10.1016/J.Cplett.2005.03.084  0.526
2004 Xu Y, Musgrave CB. A DFT Study of the Al2O3 Atomic Layer Deposition on SAMs: Effect of SAM Termination Chemistry of Materials. 16: 646-653. DOI: 10.1021/Cm035009P  0.505
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