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Roger T. Howe - Publications

Affiliations: 
1984-1985 Carnegie Mellon University, Pittsburgh, PA 
 1985-1987 Massachusetts Institute of Technology, Cambridge, MA, United States 
 1987-2005 Electrical Engineering University of California, Berkeley, Berkeley, CA, United States 
 2005- Electrical Engineering Stanford University, Palo Alto, CA 
Website:
http://web.stanford.edu/group/howe/
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Year Citation  Score
2020 Mustafazade A, Pandit M, Zhao C, Sobreviela G, Du Z, Steinmann P, Zou X, Howe RT, Seshia AA. A vibrating beam MEMS accelerometer for gravity and seismic measurements. Scientific Reports. 10: 10415. PMID 32591608 DOI: 10.1038/S41598-020-67046-X  0.556
2019 Nicaise SM, Lin C, Azadi M, Bozorg-Grayeli T, Adebayo-Ige P, Lilley DE, Pfitzer Y, Cha W, Van Houten K, Melosh NA, Howe RT, Schwede JW, Bargatin I. Micron-gap spacers with ultrahigh thermal resistance and mechanical robustness for direct energy conversion. Microsystems & Nanoengineering. 5: 31. PMID 31636923 DOI: 10.1038/S41378-019-0071-4  0.707
2019 Schindler P, Riley DC, Bargatin I, Sahasrabuddhe K, Schwede JW, Sun S, Pianetta P, Shen ZX, Howe RT, Melosh NA. Surface Photovoltage-Induced Ultralow Work Function Material for Thermionic Energy Converters. Acs Energy Letters. 4: 2436-2443. PMID 31633034 DOI: 10.1021/Acsenergylett.9B01214  0.668
2019 Chia C, Shulaker MM, Provine J, Jeffrey SS, Howe RT. ALD HfO Films for Defining Microelectrodes for Electrochemical Sensing and Other Applications. Acs Applied Materials & Interfaces. PMID 31305057 DOI: 10.1021/Acsami.9B06891  0.382
2017 Shulaker MM, Hills G, Park RS, Howe RT, Saraswat K, Wong HP, Mitra S. Three-dimensional integration of nanotechnologies for computing and data storage on a single chip. Nature. 547: 74-78. PMID 28682331 DOI: 10.1038/Nature22994  0.329
2016 Wu T, Hamann SS, Ceballos AC, Chang CE, Solgaard O, Howe RT. Design and fabrication of silicon-tessellated structures for monocentric imagers. Microsystems & Nanoengineering. 2: 16019. PMID 31057822 DOI: 10.1038/Micronano.2016.19  0.322
2016 Harrison KL, Clary WA, Provine J, Howe RT. Back-end-of-line compatible Poly-SiGe lateral nanoelectromechanical relays with multi-level interconnect Microsystem Technologies. 1-6. DOI: 10.1007/S00542-016-2932-1  0.312
2015 Yuan H, Chang S, Bargatin I, Wang NC, Riley DC, Wang H, Schwede JW, Provine J, Pop E, Shen ZX, Pianetta PA, Melosh NA, Howe RT. Engineering Ultra-Low Work Function of Graphene. Nano Letters. 15: 6475-80. PMID 26401728 DOI: 10.1021/Acs.Nanolett.5B01916  0.673
2015 Arun A, Gupta C, Howe R. Polyether ether ketone (PEEK) fluidic cell to study electrochemistry of microelectrodes on silicon substrate Ecs Solid State Letters. 4: P67-P71. DOI: 10.1149/2.0021510Ssl  0.344
2015 Ng EJ, Harrison KL, Yang Y, Ahn CH, Hong VA, Howe RT, Kenny TW. Stable Encapsulated Charge-Biased Resonators Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2015.2483365  0.318
2014 Tang WM, Aboudi U, Provine J, Howe RT, Wong HSP. Improved performance of bottom-contact organic thin-film transistor using Al doped HfO2 gate dielectric Ieee Transactions On Electron Devices. 61: 2398-2403. DOI: 10.1109/Ted.2014.2325042  0.334
2014 Park B, Jung IW, Provine J, Gellineau A, Landry J, Howe RT, Solgaard O. Double-layer silicon photonic crystal fiber-tip temperature sensors Ieee Photonics Technology Letters. 26: 900-903. DOI: 10.1109/Lpt.2014.2309345  0.309
2014 Shavezipur M, Harrison K, Lee WS, Mitra S, Wong HSP, Howe RT. Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays Journal of Microelectromechanical Systems. DOI: 10.1109/Jmems.2014.2335157  0.343
2014 Lee JH, Bargatin I, Vancil BK, Gwinn TO, Maboudian R, Melosh NA, Howe RT. Microfabricated thermally isolated low work-function emitter Journal of Microelectromechanical Systems. 23: 1182-1187. DOI: 10.1109/Jmems.2014.2307882  0.742
2014 Chou SH, Voss J, Vojvodic A, Howe RT, Abild-Pedersen F. DFT study of atomically-modified alkali-earth metal oxide films on tungsten Journal of Physical Chemistry C. 118: 11303-11309. DOI: 10.1021/Jp4120578  0.303
2013 Littau KA, Sahasrabuddhe K, Barfield D, Yuan H, Shen ZX, Howe RT, Melosh NA. Microbead-separated thermionic energy converter with enhanced emission current. Physical Chemistry Chemical Physics : Pccp. 15: 14442-6. PMID 23881241 DOI: 10.1039/C3Cp52895B  0.31
2013 Voss J, Vojvodic A, Chou SH, Howe RT, Bargatin I, Abild-Pedersen F. Thermionic current densities from first principles. The Journal of Chemical Physics. 138: 204701. PMID 23742494 DOI: 10.1063/1.4805002  0.647
2013 Schwede JW, Sarmiento T, Narasimhan VK, Rosenthal SJ, Riley DC, Schmitt F, Bargatin I, Sahasrabuddhe K, Howe RT, Harris JS, Melosh NA, Shen ZX. Photon-enhanced thermionic emission from heterostructures with low interface recombination. Nature Communications. 4: 1576. PMID 23481384 DOI: 10.1038/Ncomms2577  0.652
2013 Parsa R, Lee WS, Shavezipur M, Provine J, Maboudian R, Mitra S, Wong HSP, Howe RT. Laterally actuated platinum-coated polysilicon NEM relays Journal of Microelectromechanical Systems. 22: 768-778. DOI: 10.1109/Jmems.2013.2244779  0.524
2013 Hennessy RG, Shulaker MM, Messana M, Graham AB, Klejwa N, Provine J, Kenny TW, Howe RT. Vacuum encapsulated resonators for humidity measurement Sensors and Actuators, B: Chemical. 185: 575-581. DOI: 10.1016/J.Snb.2013.05.016  0.301
2012 Chou SH, Voss J, Bargatin I, Vojvodic A, Howe RT, Abild-Pedersen F. An orbital-overlap model for minimal work functions of cesiated metal surfaces. Journal of Physics. Condensed Matter : An Institute of Physics Journal. 24: 445007. PMID 23018485 DOI: 10.1088/0953-8984/24/44/445007  0.641
2012 Paik KH, Liu Y, Tabard-Cossa V, Waugh MJ, Huber DE, Provine J, Howe RT, Dutton RW, Davis RW. Control of DNA capture by nanofluidic transistors. Acs Nano. 6: 6767-75. PMID 22762282 DOI: 10.1021/Nn3014917  0.717
2012 Roper CS, Gutés A, Carraro C, Howe RT, Maboudian R. Single crystal silicon nanopillars, nanoneedles and nanoblades with precise positioning for massively parallel nanoscale device integration. Nanotechnology. 23: 225303. PMID 22572054 DOI: 10.1088/0957-4484/23/22/225303  0.745
2012 Yoneoka S, Lee J, Liger M, Yama G, Kodama T, Gunji M, Provine J, Howe RT, Goodson KE, Kenny TW. Electrical and thermal conduction in atomic layer deposition nanobridges down to 7 nm thickness. Nano Letters. 12: 683-6. PMID 22224582 DOI: 10.1021/Nl203548W  0.342
2012 Lee JH, Bargatin I, Park J, Milaninia KM, Theogarajan LS, Sinclair R, Howe RT. Smart-cut layer transfer of single-crystal SiC using spin-on-glass Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 30. DOI: 10.1116/1.4734006  0.675
2012 Chong S, Lee B, Mitra S, Howe RT, Wong HSP. Integration of nanoelectromechanical relays with silicon nMOS Ieee Transactions On Electron Devices. 59: 255-258. DOI: 10.1109/Ted.2011.2172946  0.33
2012 Lee JH, Bargatin I, Gwinn TO, Vincent M, Littau KA, Maboudian R, Shen ZX, Melosh NA, Howe RT. Microfabricated silicon carbide thermionic energy converter for solar electricity generation Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1261-1264. DOI: 10.1109/MEMSYS.2012.6170386  0.704
2012 Sedky S, Tawfik H, Ashour M, Graham AB, Provine J, Wang Q, Zhang XX, Howe RT. Microencapsulation of silicon cavities using a pulsed excimer laser Journal of Micromechanics and Microengineering. 22. DOI: 10.1088/0960-1317/22/7/075012  0.307
2012 Chen JWP, Provine J, Klejwa N, Howe RT. A dry wafer-reconstitution process with zero insertion force by embedded alignment guide tabs Journal of Micromechanics and Microengineering. 22. DOI: 10.1088/0960-1317/22/6/065007  0.342
2012 Sahasrabuddhe K, Schwede JW, Bargatin I, Jean J, Howe RT, Shen ZX, Melosh NA. A model for emission yield from planar photocathodes based on photon-enhanced thermionic emission or negative-electron-affinity photoemission Journal of Applied Physics. 112. DOI: 10.1063/1.4764106  0.66
2012 Lee JH, Bargatin I, Melosh NA, Howe RT. Optimal emitter-collector gap for thermionic energy converters Applied Physics Letters. 100. DOI: 10.1063/1.4707379  0.65
2012 Broderick SR, Suh C, Provine J, Roper CS, Maboudian R, Howe RT, Rajan K. Application of principal component analysis to a full profile correlative analysis of FTIR spectra Surface and Interface Analysis. 44: 365-371. DOI: 10.1002/Sia.3813  0.743
2012 Lee JH, Bargatin I, Iwami K, Littau KA, Vincent M, Maboudian R, Shen ZX, Melosh NA, Howe RT. Encapsulated thermionic energy converter with stiffened suspension Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 493-496.  0.671
2012 Snapp JP, Lee JH, Provine J, Bargatin I, Maboudian R, Lee TH, Howe RT. Sidewall silicon carbide emitters for terahertz vacuum electronics Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 336-338.  0.714
2011 Jain JR, Ly-Gagnon DS, Balram KC, White JS, Brongersma ML, Miller DAB, Howe RT. Tensile-strained germanium-on-insulator substrate fabrication for silicon-compatible optoelectronics Optical Materials Express. 1: 1121-1126. DOI: 10.1364/Ome.1.001121  0.399
2011 Lee JH, Bargatin I, Provine J, Liu F, Seo MK, Maboudian R, Brongersma ML, Melosh NA, Shen ZX, Howe RT. Effect of illlumination on thermionic emission from microfabricated silicon carbide structures 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2658-2661. DOI: 10.1109/TRANSDUCERS.2011.5969879  0.707
2011 Laboriante I, Klejwa N, Suwandi A, Carraro C, Howe RT, Maboudian R. Suppression of wear in cyclically loaded polycrystalline silicon MEMS via a thin silicon carbide coating 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 2319-2322. DOI: 10.1109/TRANSDUCERS.2011.5969544  0.485
2011 Chen KL, Wang S, Salvia JC, Melamud R, Howe RT, Kenny TW. Wafer-level epitaxial silicon packaging for out-of-plane RF MEMS resonators with integrated actuation electrodes Ieee Transactions On Components, Packaging and Manufacturing Technology. 1: 310-317. DOI: 10.1109/Tcpmt.2010.2100711  0.357
2011 Parsa R, Shavezipur M, Lee WS, Chong S, Lee D, Wong HSP, Maboudian R, Howe RT. Nanoelectromechanical relays with decoupled electrode and suspension Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1361-1364. DOI: 10.1109/MEMSYS.2011.5734687  0.394
2011 Mallick SB, Jung IW, Meisner AM, Provine J, Howe RT, Solgaard O. Multilayered monolithic silicon photonic crystals Ieee Photonics Technology Letters. 23: 730-732. DOI: 10.1109/Lpt.2011.2132698  0.314
2010 Schwede JW, Bargatin I, Riley DC, Hardin BE, Rosenthal SJ, Sun Y, Schmitt F, Pianetta P, Howe RT, Shen ZX, Melosh NA. Photon-enhanced thermionic emission for solar concentrator systems. Nature Materials. 9: 762-7. PMID 20676086 DOI: 10.1038/Nmat2814  0.663
2010 Bahl G, Salvia J, Bargatin I, Yoneoka S, Melamud R, Kim B, Chandorkar S, Hopcroft MA, Bahl R, Howe RT, Kenny TW. Charge-drift elimination in resonant electrostatic MEMS Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 108-111. DOI: 10.1109/MEMSYS.2010.5442555  0.619
2010 Yoneoka S, Roper CS, Candler RN, Chandorkar SA, Graham AB, Provine J, Maboudian R, Howe RT, Kenny TW. Characterization of encapsulated micromechanical resonators sealed and coated with polycrystalline SiC Journal of Microelectromechanical Systems. 19: 357-366. DOI: 10.1109/Jmems.2010.2040460  0.772
2010 Bahl G, Melamud R, Kim B, Chandorkar SA, Salvia JC, Hopcroft MA, Elata D, Hennessy RG, Candler RN, Howe RT, Kenny TW. Model and observations of dielectric charge in thermally oxidized silicon resonators Journal of Microelectromechanical Systems. 19: 162-174. DOI: 10.1109/Jmems.2009.2036274  0.304
2010 Graham AB, Messana MW, Hartwell PG, Provine J, Yoneoka S, Melamud R, Kim B, Howe RT, Kenny TW. A method for wafer-scale encapsulation of large lateral deflection MEMS devices Journal of Microelectromechanical Systems. 19: 28-37. DOI: 10.1109/Jmems.2009.2035717  0.39
2010 Ziaei-Moayyed M, Elata D, Quévy EP, Howe RT. Differential internal dielectric transduction of a Lamé-mode resonator Journal of Micromechanics and Microengineering. 20. DOI: 10.1088/0960-1317/20/11/115036  0.327
2009 Kant R, Ferralis N, Provine J, Maboudian R, Howe RT. Experimental investigation of silicon surface migration in low pressure nonreducing gas environments Electrochemical and Solid-State Letters. 12: H437-H440. DOI: 10.1149/1.3236781  0.638
2009 Roper CS, Howe RT, Maboudian R. Room-temperature wet etching of polycrystalline and nanocrystalline silicon carbide thin films with hf and hn O3 Journal of the Electrochemical Society. 156: D104-D107. DOI: 10.1149/1.3061944  0.759
2009 Roper CS, Radmilovic V, Howe RT, Maboudian R. Electrical and mechanical characterization of doped and annealed polycrystalline 3C-SiC thin films Journal of the Electrochemical Society. 156: D5-D10. DOI: 10.1149/1.3000002  0.745
2009 Klejwa N, Misra R, Provine J, Howe RT, Klejwa SJ. Laser print patterning of planar spiral inductors and interdigitated capacitors Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27: 2745-2749. DOI: 10.1116/1.3264673  0.342
2009 Chen KL, Salvia J, Potter R, Howe RT, Kenny TW. Performance evaluation and equivalent model of silicon interconnects for fully-encapsulated RF MEMS devices Ieee Transactions On Advanced Packaging. 32: 402-409. DOI: 10.1109/Tadvp.2008.2005114  0.339
2009 Roper CS, Candler R, Yoneoka S, Kenny T, Howe RT, Maboudian R. Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiC Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1031-1034. DOI: 10.1109/SENSOR.2009.5285964  0.704
2009 Chen KL, Chandrahalim H, Grahaml AB, Bhave SA, Howe RT, Kenny TW. Epitaxial silicon microshell vacuum-encapsulated cmos-compatible 200 mhz bulk-mode resonator Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 23-26. DOI: 10.1109/MEMSYS.2009.4805309  0.761
2008 Roper CS, Howe RT, Maboudian R. Large-scale polycrystalline SiC micromachining technologies Ecs Transactions. 16: 63-71. DOI: 10.1149/1.2992229  0.687
2008 Roper CS, Radmilovic V, Howe RT, Maboudian R. Effects of annealing on residual stress and strain gradient of doped polycrystalline SiC thin films Electrochemical and Solid-State Letters. 11: D35-D37. DOI: 10.1149/1.2831906  0.747
2008 Provine J, Roper C, Schuller JA, Brongersma ML, Maboudian R, Howe RT. The dependence of poly-crystalline SiC mid-infrared optical properties on deposition conditions 2008 Ieee/Leos International Conference On Optical Mems and Nanophotonics, Opt Mems. 182-183. DOI: 10.1109/OMEMS.2008.4607889  0.476
2008 Arellano N, Quévy EP, Provine J, Maboudian R, Howe RT. Silicon nanowire coupled micro-resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 721-724. DOI: 10.1109/MEMSYS.2008.4443758  0.73
2008 Roper CS, Radmilovic V, Howe RT, Maboudian R. Characterization of polycrystalline 3C-SiC films deposited from the precursors 1,3-disilabutane and dichlorosilane Journal of Applied Physics. 103. DOI: 10.1063/1.2907871  0.733
2008 Zhang J, Zimmer JW, Howe RT, Maboudian R. Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications Diamond and Related Materials. 17: 23-28. DOI: 10.1016/J.Diamond.2007.09.010  0.738
2007 Paulo AS, Arellano N, Plaza JA, He R, Carraro C, Maboudian R, Howe RT, Bokor J, Yang P. Suspended mechanical structures based on elastic silicon nanowire arrays. Nano Letters. 7: 1100-4. PMID 17375964 DOI: 10.1021/Nl062877N  0.775
2007 Chandrahalim H, Bhave SA, Quévy EP, Howe RT. Aqueous transduction of poly-sige disk resonators Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 313-316. DOI: 10.1109/SENSOR.2007.4300131  0.732
2007 Provine J, Catrysse PB, Roper CS, Maboudian R, Fan S, Howe RT. Phonon polariton reflectance spectra in a silicon carbide membrane hole array Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-Leos. 466-467. DOI: 10.1109/LEOS.2007.4382481  0.703
2007 Low CW, Liu TJK, Howe RT. Characterization of polycrystalline silicon-germanium film deposition for modularly integrated MEMS applications Journal of Microelectromechanical Systems. 16: 68-77. DOI: 10.1109/Jmems.2006.886030  0.807
2007 Zhang J, Carraro C, Howe RT, Maboudian R. Electrical, mechanical and metal contact properties of polycrystalline 3C-SiC films for MEMS in harsh environments Surface and Coatings Technology. 201: 8893-8898. DOI: 10.1016/J.Surfcoat.2007.05.007  0.74
2007 Zhang J, Howe RT, Maboudian R. Nickel and platinum ohmic contacts to polycrystalline 3C-silicon carbide Materials Science and Engineering B: Solid-State Materials For Advanced Technology. 139: 235-239. DOI: 10.1016/J.Mseb.2007.03.006  0.716
2007 San Paulo A, Quevy E, Black J, Howe RT, White R, Bokor J. Mode shape imaging of out-of-plane and in-plane vibrating RF micromechanical resonators by atomic force microscopy Microelectronic Engineering. 84: 1354-1357. DOI: 10.1016/J.Mee.2007.01.223  0.482
2006 Roper CS, Carraro C, Howe RT, Maboudian R. Silicon carbide thin films using 1,3-disilabutane single precursor for MEMS applications-A review Ecs Transactions. 3: 267-280. DOI: 10.1149/1.2357267  0.741
2006 Low CW, Liu TJK, Howe RT. Study of poly-SiGe structural properties for modularly integrated MEMS Ecs Transactions. 3: 1131-1142. DOI: 10.1149/1.2355907  0.77
2006 Roper CS, Radmilovic V, Howe RT, Maboudian R. Single-source chemical vapor deposition of SiC films in a large-scale low-pressure CVD growth, chemical, and mechanical characterization reactor Journal of the Electrochemical Society. 153: C562-C566. DOI: 10.1149/1.2208911  0.765
2006 Zhang J, Howe RT, Maboudian R. Electrical characterization of n-type polycrystalline 3C-silicon carbide thin films deposited by 1,3-disilabutane Journal of the Electrochemical Society. 153: G548-G551. DOI: 10.1149/1.2188327  0.724
2006 Srikantha Phani A, Seshia AA, Palaniapan M, Howe RT, Yasaitis JA. Modal coupling in micromechanical vibratory rate gyroscopes Ieee Sensors Journal. 6: 1144-1152. DOI: 10.1109/Jsen.2006.881432  0.732
2006 Roper CS, Howe RT, Maboudian R. Stress control of polycrystalline 3C-SiC films in a large-scale LPCVD reactor using 1,3-disilabutane and dichlorosilane as precursors Journal of Micromechanics and Microengineering. 16: 2736-2739. DOI: 10.1088/0960-1317/16/12/029  0.746
2006 Zhang J, Howe RT, Maboudian R. Control of strain gradient in doped polycrystalline silicon carbide films through tailored doping Journal of Micromechanics and Microengineering. 16: L1-L5. DOI: 10.1088/0960-1317/16/10/L01  0.732
2006 Gao D, Carraro C, Howe RT, Maboudian R. Polycrystalline silicon carbide as a substrate material for reducing adhesion in MEMS Tribology Letters. 21: 226-232. DOI: 10.1007/S11249-006-9024-9  0.68
2006 Quévy EP, San Paulo A, Basol E, Howe RT, King TJ, Bokor J. Back-end-of-line poly-SiGe disk resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 234-237.  0.368
2006 Zendejas FJ, Srinivasan U, Holtz WJ, Keasling JD, Howe RT. Microfluidic generation of tunable monodisperse double emulsions for templated silica particles Micro Total Analysis Systems - Proceedings of Microtas 2006 Conference: 10th International Conference On Miniaturized Systems For Chemistry and Life Sciences. 230-232.  0.747
2005 Gao D, He R, Carraro C, Howe RT, Yang P, Maboudian R. Selective growth of Si nanowire arrays via galvanic displacement processes in water-in-oil microemulsions. Journal of the American Chemical Society. 127: 4574-5. PMID 15796513 DOI: 10.1021/Ja043645Y  0.629
2005 Takeuchi H, Wung A, Sun X, Howe RT, King TJ. Thermal budget limits of quarter-micrometer foundry CMOS for post-processing MEMS devices Ieee Transactions On Electron Devices. 52: 2081-2086. DOI: 10.1109/Ted.2005.854287  0.316
2005 Bhave SA, Howe RT. Silicon nitride-on-silicon bar resonator using internal electrostatic transduction Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 2139-2142. DOI: 10.1109/SENSOR.2005.1497527  0.582
2005 Paulo AS, Bokor J, Howe RT, He R, Yang P, Gao D, Carraro C, Maboudian R. Mechanical elasticity of single and double clamped silicon nanobeams fabricated by the vapor-liquid-solid method Applied Physics Letters. 87. DOI: 10.1063/1.2008364  0.709
2005 Zendejas FJ, Srinivasan U, Holtz WJ, Keasling JD, Howe RT. Microfluidic generation of tunable emulsions for templated monodisperse silica Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 2: 1473-1476.  0.757
2005 Bhave SA, Gao D, Maboudian R, Howe RT. Fully-differential poly-SiC lamé-mode resonator and checkerboard filter Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 223-226.  0.512
2004 Maharbiz MM, Holtz WJ, Howe RT, Keasling JD. Microbioreactor arrays with parametric control for high-throughput experimentation. Biotechnology and Bioengineering. 86: 485-90. PMID 15146839  0.615
2004 Maharbiz MM, Holtz WJ, Howe RT, Keasling JD. Microbioreactor arrays with parametric control for high-throughput experimentation. Biotechnology and Bioengineering. 85: 376-81. PMID 14755555 DOI: 10.1002/Bit.10835  0.645
2004 Low CW, Bircumshaw BL, Dorofeeva T, Solomon G, King TJ, Howe RT. Stress stability of poly-SiGe and various oxide films in humid environments Materials Research Society Symposium Proceedings. 854: 22-27. DOI: 10.1557/Proc-854-U3.3  0.803
2004 Wijesundara MBJ, Valente G, Ashurst WR, Howe RT, Pisano AP, Carraro C, Maboudian R. Single-Source Chemical Vapor Deposition of 3C-SiC Films in a LPCVD Reactor I. Growth, Structure, and Chemical Characterization Journal of the Electrochemical Society. 151: C210-C214. DOI: 10.1149/1.1646141  0.691
2004 Gao D, Wijesundara MBJ, Carraro C, Howe RT, Maboudian R. Transformer coupled plasma etching of 3C-SiC films using fluorinated chemistry for microelectromechanical systems applications Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 513-518. DOI: 10.1116/1.1648067  0.662
2004 Bircumshaw BL, Wasilik ML, Kim EB, Su YR, Takeuchi H, Low CW, Liu G, Pisano AP, King TJ, Howe RT. Hydrogen peroxide etching and stability of p-type poly-SiGe films Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 514-519. DOI: 10.1109/MEMSYS.2003.1189799  0.775
2004 Takeuchi H, Quévy E, Bhave SA, King TJ, Howe RT. Ge-blade damascene process for post-CMOS integration of nano-mechanical resonators Ieee Electron Device Letters. 25: 529-531. DOI: 10.1109/Led.2004.831898  0.638
2004 Gao D, Wijesundara MBJ, Carraro C, Howe RT, Maboudian R. Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology Ieee Sensors Journal. 4: 441-448. DOI: 10.1109/Jsen.2004.828859  0.68
2004 Gao D, Carraro C, Radmilovic V, Howe RT, Maboudian R. Fracture of polycrystalline 3C-SiC films in microelectromechanical systems Journal of Microelectromechanical Systems. 13: 972-976. DOI: 10.1109/Jmems.2004.838372  0.626
2004 Sedky S, Howe RT, King TJ. Pulsed-laser annealing, a low-thermal-budget technique for eliminating stress gradient in Poly-SiGe MEMS structures Journal of Microelectromechanical Systems. 13: 669-675. DOI: 10.1109/Jmems.2004.832189  0.368
2004 Marharbiz M, Holz W, Sharifzadeh S, Keasling J, Howe R. Errata to “A Microfabricated Electrochemical Oxygen Generator for High-Density Cell Culture Arrays” Journal of Microelectromechanical Systems. 13: 386-386. DOI: 10.1109/Jmems.2004.827681  0.403
2004 Scott KL, Hirano T, Yang H, Singh H, Howe RT, Niknejad AM. High-performance inductors using capillary based fluidic self-assembly Journal of Microelectromechanical Systems. 13: 300-309. DOI: 10.1109/Jmems.2003.823234  0.362
2004 Low CW, Wasilik ML, Takeuchi H, King TJ, Howe RT. In-situ doped poly-sige LPCVD process using BCL3 for post-cmos integration of MEMS devices Proceedings - Electrochemical Society. 7: 1021-1032.  0.78
2004 Phani AS, Seshia AA, Palaniapan M, Howe RT, Yasaitis J. Coupling of resonant modes in micromechanical vibratory rate gyroscopes 2004 Nsti Nanotechnology Conference and Trade Show - Nsti Nanotech 2004. 2: 335-338.  0.602
2003 Lin BCY, King TJ, Howe RT. Optimization of poly-SiGe deposition processes for modular MEMS integration Materials Research Society Symposium - Proceedings. 782: 43-48. DOI: 10.1557/Proc-782-A2.4  0.404
2003 Jeon Y, King T, Howe RT. Properties of Phosphorus-Doped Poly-SiGe Films for Microelectromechanical System Applications Journal of the Electrochemical Society. 150: H1. DOI: 10.1149/1.1522837  0.4
2003 Yasaitis J, Judy M, Brosnihan T, Garone P, Pokrovskiy N, Sniderman D, Limb S, Howe R, Boser B, Palaniapan M, Jiang X, Bhave S. A modular process for integrating thick polysilicon MEMS devices with sub-micron CMOS Proceedings of Spie - the International Society For Optical Engineering. 4979: 145-154. DOI: 10.1117/12.478294  0.747
2003 Riehl PS, Scott KL, Muller RS, Howe RT, Yasaitis JA. Electrostatic charge and field sensors based on micromechanical resonators Journal of Microelectromechanical Systems. 12: 577-589. DOI: 10.1109/Jmems.2003.818066  0.783
2003 Maharbiz MM, Holtz WJ, Sharifzadeh S, Keasling JD, Howe RT. A microfabricated electrochemical oxygen generator for high-density cell culture arrays Journal of Microelectromechanical Systems. 12: 590-599. DOI: 10.1109/Jmems.2003.815828  0.647
2003 Franke AE, Heck JM, King TJ, Howe RT. Polycrystalline silicon-germanium films for integrated microsystems Journal of Microelectromechanical Systems. 12: 160-171. DOI: 10.1109/Jmems.2002.805051  0.799
2003 Gao D, Howe RT, Maboudian R. High-selectivity etching of polycrystalline 3C-SiC films using HBr-based transformer coupled plasma Applied Physics Letters. 82: 1742-1744. DOI: 10.1063/1.1560561  0.666
2003 Wijesundara MB, Gao D, Carraro C, Howe RT, Maboudian R. Nitrogen doping of polycrystalline 3C-SiC films grown using 1,3-disilabutane in a conventional LPCVD reactor Journal of Crystal Growth. 259: 18-25. DOI: 10.1016/S0022-0248(03)01573-2  0.657
2002 Sedky S, Schroeder J, Sands T, Howe R, King T. Pulsed Laser Annealing of Silicon-Germanium Films Mrs Proceedings. 741. DOI: 10.1557/Proc-741-J4.2  0.308
2002 Howe RT, King T. Low-Temperature LPCVD MEMS Technologies Mrs Proceedings. 729. DOI: 10.1557/Proc-729-U5.1  0.426
2002 Srinivasan U, Helmbrecht MA, Muller RS, Howe RT. MEMS: Some Self-Assembly Required Optics and Photonics News. 13: 20. DOI: 10.1364/Opn.13.11.000020  0.761
2002 Seshia AA, Palaniapan M, Roessig TA, Howe RT, Gooch RW, Schimert TR, Montague S. A vacuum packaged surface micromachined resonant accelerometer Journal of Microelectromechanical Systems. 11: 784-793. DOI: 10.1109/Jmems.2002.805207  0.74
2002 Srinivasan U, Helmbrecht MA, Rembe C, Muller RS, Howe RT. Fluidic self-assembly of micromirrors onto microactuators using capillary forces Ieee Journal On Selected Topics in Quantum Electronics. 8: 4-11. DOI: 10.1109/2944.991393  0.768
2002 Stoldt CR, Carraro C, Ashurst WR, Gao D, Howe RT, Maboudian R. A low-temperature CVD process for silicon carbide MEMS Sensors and Actuators, a: Physical. 97: 410-415. DOI: 10.1016/S0924-4247(01)00810-X  0.686
2002 Wijesundara MBJ, Stoldt CR, Carraro C, Howe RT, Maboudian R. Nitrogen doping of polycrystalline 3C-SiC films grown by single-source chemical vapor deposition Thin Solid Films. 419: 69-75. DOI: 10.1016/S0040-6090(02)00782-4  0.577
2001 Franke AE, King T, Howe RT. Integrated MEMS Technologies Mrs Bulletin. 26: 291-295. DOI: 10.1557/Mrs2001.62  0.72
2001 Muller L, Pisano A, Howe R. Microgimbal torsion beam design using open, thin-walled cross sections Journal of Microelectromechanical Systems. 10: 550-560. DOI: 10.1109/84.967378  0.521
2001 Srinivasan U, Liepmann D, Howe RT. Microstructure to substrate self-assembly using capillary forces Journal of Microelectromechanical Systems. 10: 17-24. DOI: 10.1109/84.911087  0.611
2001 Ashurst W, Yau C, Carraro C, Lee C, Kluth G, Howe RT, Maboudian R. Alkene based monolayer films as anti-stiction coatings for polysilicon MEMS Sensors and Actuators a: Physical. 91: 239-248. DOI: 10.1016/S0924-4247(01)00593-3  0.565
2001 Muller L, Howe RT, Pisano AP. High-aspect-ratio, molded microstructures with electrical isolation and embedded interconnects Microsystem Technologies. 7: 47-54. DOI: 10.1007/S005420000075  0.584
2000 Hui EE, Howe RT, Rodgers MS. Single-step assembly of complex 3-D microstructures Proceedings of the Ieee Micro Electro Mechanical Systems (Mems). 602-607.  0.557
1999 Singh A, Horsley D, Cohn M, Pisano A, Howe R. Batch transfer of microstructures using flip-chip solder bonding Journal of Microelectromechanical Systems. 8: 27-33. DOI: 10.1109/84.749399  0.547
1998 Cohn MB, Boehringer KF, Noworolski JM, Singh A, Keller CG, Goldberg KA, Howe RT. Microassembly technologies for MEMS Proceedings of Spie. 3515: 2-16. DOI: 10.1117/12.322082  0.307
1998 Srinivasan U, Houston MR, Howe RT, Maboudian R. Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines Journal of Microelectromechanical Systems. 7: 252-259. DOI: 10.1109/84.679393  0.69
1997 Roessig TA, Howe RT, Pisano AP, Smith JH. Surface-micromachined resonant accelerometer Sensors. 2: 859-862. DOI: 10.1109/Sensor.1997.635237  0.551
1997 Brosnihan TJ, Bustillo JM, Pisano AP, Howe RT. Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments Sensors. 1: 637-640. DOI: 10.1109/Sensor.1997.613732  0.581
1997 Singh A, Horsley DA, Cohn MB, Pisano AP, Howe RT. Batch transfer of microstructures using flip-chip solder bump bonding Sensors. 1: 265-268. DOI: 10.1109/Sensor.1997.613634  0.548
1997 Lin L, Pisano AP, Howe RT. A micro strain gauge with mechanical amplifier Ieee\/Asme Journal of Microelectromechanical Systems. 6: 313-321. DOI: 10.1109/84.650128  0.544
1997 Houston MR, Howe RT, Maboudian R. Effect of hydrogen termination on the work of adhesion between rough polycrystalline silicon surfaces Journal of Applied Physics. 81: 3474-3483. DOI: 10.1063/1.365045  0.521
1996 Howe RT. Recent Advances in Surface Micromachining Ieej Transactions On Sensors and Micromachines. 116: 90-97. DOI: 10.1541/Ieejsmas.116.90  0.406
1996 Fedder GK, Howe RT. Multimode digital control of a suspended polysilicon microstructure Journal of Microelectromechanical Systems. 5: 283-297. DOI: 10.1109/84.546408  0.308
1996 Boser B, Howe R. Surface micromachined accelerometers Ieee Journal of Solid-State Circuits. 31: 366-375. DOI: 10.1109/4.494198  0.33
1996 Howe RT, Boser BE, Pisano AP. Polysilicon integrated microsystems: technologies and applications Sensors and Actuators a: Physical. 56: 167-177. DOI: 10.1016/0924-4247(96)01291-5  0.587
1995 Houston MR, Howe RT, Komvopoulos K, Maboudian R. Diamond-Like Carbon Films for Silicon Passivation in Microelectromechanical Devices Mrs Proceedings. 383. DOI: 10.1557/Proc-383-391  0.566
1994 Cho Y, Pisano AP, Howe RT. Viscous damping model for laterally oscillating microstructures Ieee\/Asme Journal of Microelectromechanical Systems. 3: 81-87. DOI: 10.1109/84.294325  0.525
1994 Alley RL, Komvopoulos K, Howe RT. Self‐assembled monolayer film for enhanced imaging of rough surfaces with atomic force microscopy Journal of Applied Physics. 76: 5731-5737. DOI: 10.1063/1.358408  0.312
1994 Cho Y, Kwak BM, Pisano AP, Howe RT. Slide film damping in laterally driven microstructures Sensors and Actuators a: Physical. 40: 31-39. DOI: 10.1016/0924-4247(94)85027-5  0.548
1994 Bustillo JM, Fedder GK, Nguyen CTC, Howe RT. Process technology for the modular integration of CMOS and polysilicon microstructures Microsystem Technologies. 1: 30-41. DOI: 10.1007/Bf01367758  0.357
1993 Monk D, Krulevitch P, Howe R, Johnson G. Stress-Corrosion Cracking and Blistering of Thin Polycrystalline Silicon Films in Hydrofluoric Acid Mrs Proceedings. 308. DOI: 10.1557/Proc-308-641  0.382
1993 Monk DJ, Soane DS, Howe RT. A review of the chemical reaction mechanism and kinetics for hydrofluoric acid etching of silicon dioxide for surface micromachining applications Thin Solid Films. 232: 1-12. DOI: 10.1016/0040-6090(93)90752-B  0.32
1992 Krulevitch P, Johnson GC, Howe RT. Stress and Microstructure in Phosphorus Doped Polycrystalline Silicon Mrs Proceedings. 276. DOI: 10.1557/Proc-276-79  0.379
1992 Monk DJ, Soane DS, Howe RT. LPCVD Silicon Dioxide Sacrificial Layer Etching for Surface Micromachining Mrs Proceedings. 276. DOI: 10.1557/Proc-276-303  0.339
1992 Tang W, Lim M, Howe R. Electrostatic Comb Drive Levitation And Control Method Journal of Microelectromechanical Systems. 1: 170-178. DOI: 10.1109/Jmems.1992.752508  0.583
1991 Krulevitch P, Johnson GC, Howe RT. Stress and Microstructure in Lpcvd Polycrystalline Silicon Films: Experimental Results and Closed Form Modeling of Stresses Mrs Proceedings. 239. DOI: 10.1557/Proc-239-13  0.38
1990 Krulevitch P, Nguyen TD, Johnson GC, Howe RT, Wenk HR, Gronsky R. Lpcvd Polycrystalline Silicon Thin Films: The Evolution of Structure, Texture and Stress Mrs Proceedings. 202. DOI: 10.1557/Proc-202-167  0.378
1990 Huang J, Krulevitch P, Johnson G, Howe R, Wenk H. Investigation of Texture and Stress in Undoped Polysilicon Films Mrs Proceedings. 182. DOI: 10.1557/Proc-182-201  0.309
1990 Howe RT, Muller RS, Gabriel KJ, Trimmer WSN. Silicon micromechanics: sensors and actuators on a chip Ieee Spectrum. 27: 29-35. DOI: 10.1109/6.58424  0.648
1990 Muller RS, Howe RT. Technologies for microdynamic devices Nanotechnology. 1: 8-12. DOI: 10.1088/0957-4484/1/1/002  0.593
1990 Fan L, Howe R, Muller R. Fracture toughness characterization of brittle thin films Sensors and Actuators a: Physical. 23: 872-874. DOI: 10.1016/0924-4247(90)87049-O  0.563
1990 Tang WC, Nguyen TH, Judy MW, Howe RT. Electrostatic-comb drive of lateral polysilicon resonators Sensors and Actuators a: Physical. 21: 328-331. DOI: 10.1016/0924-4247(90)85065-C  0.607
1989 Huang J, Howe R, Lee H. Vacuum-insulated-gate field-effect transistor Electronics Letters. 25: 1571. DOI: 10.1049/El:19891055  0.307
1989 Putty MW, Chang S, Howe RT, Robinson AL, Wise KD. Process Integration for active polysilicon resonant microstructures Sensors and Actuators. 20: 143-151. DOI: 10.1016/0250-6874(89)87112-4  0.344
1989 Tang WC, Nguyen TH, Howe RT. Laterally Driven Polysilicon Resonant Microstructures Sensors and Actuators. 20: 25-32. DOI: 10.1016/0250-6874(89)87098-2  0.639
1989 Howe RT. Microsensor and microactuator applications of thin films Thin Solid Films. 181: 235-243. DOI: 10.1016/0040-6090(89)90490-2  0.383
1988 Howe RT. Surface micromachining for microsensors and microactuators Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 6: 1809. DOI: 10.1116/1.584158  0.386
1988 Bart SF, Lober TA, Howe RT, Lang JH, Schlecht MF. Design considerations for micromachined electric actuators Sensors and Actuators. 14: 269-292. DOI: 10.1016/0250-6874(88)80074-X  0.353
1987 Howe RT. Applications of Polysilicon Films in Microsensors and Microactuators Mrs Proceedings. 106. DOI: 10.1557/Proc-106-213  0.344
1987 Allen MG, Mehregany M, Howe RT, Senturia SD. Microfabricated structures for the in situ measurement of residual stress, Young's modulus, and ultimate strain of thin films Applied Physics Letters. 51: 241-243. DOI: 10.1063/1.98460  0.313
1987 Mehregany M, Howe RT, Senturia SD. Novel microstructures for the in situ measurement of mechanical properties of thin films Journal of Applied Physics. 62: 3579-3584. DOI: 10.1063/1.339285  0.324
1986 Howe RT. Polycrystalline silicon micromachining: a new technology for integrated sensors. Annals of Biomedical Engineering. 14: 187-97. PMID 3740570 DOI: 10.1007/Bf02584269  0.421
1986 Howe RT, Muller RS. Resonant-microbridge vapor sensor Ieee Transactions On Electron Devices. 33: 499-506. DOI: 10.1109/T-Ed.1986.22519  0.607
1983 Howe RT, Muller RS. Stress in polycrystalline and amorphous silicon thin films Journal of Applied Physics. 54: 4674-4675. DOI: 10.1063/1.332628  0.616
1983 Howe R, Muller R. Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical properties Sensors and Actuators. 4: 447-454. DOI: 10.1016/0250-6874(83)85056-2  0.603
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