Charles A. Jones, Ph.D. - Publications
Affiliations: | 2004 | University of North Carolina, Chapel Hill, Chapel Hill, NC |
Area:
Cancer NanotechnologyYear | Citation | Score | |||
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2007 | Li YX, Yang D, Jones CA, Desimone JM, Irene EA. Etching Si O2 with HF/pyridine-supercritical carbon dioxide solutions and resultant interfacial electronic properties Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25: 1139-1142. DOI: 10.1116/1.2743651 | 0.459 | |||
2004 | Jones CA, Zweber A, DeYoung JP, McClain JB, Carbonell R, DeSimone JM. Applications of "dry" processing in the microelectronics industry using carbon dioxide Critical Reviews in Solid State and Materials Sciences. 29: 97-109. DOI: 10.1080/10408430490888968 | 0.45 | |||
2003 | Jones CA, Yang D, Irene EA, Gross SM, Wagner M, DeYoung J, DeSimone JM. HF etchant solutions in supercritical carbon dioxide for "dry" etch processing of microelectronic devices Chemistry of Materials. 15: 2867-2869. DOI: 10.1021/Cm034235W | 0.492 | |||
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