Year |
Citation |
Score |
2007 |
Lay NE, Ten Eyck GA, Duquette DJ, Lu TM. Direct plating of Cu on Pd plasma enhanced atomic layer deposition coated TaN Barrier Electrochemical and Solid-State Letters. 10. DOI: 10.1149/1.2388249 |
0.736 |
|
2007 |
Gedelian CA, Ten Eyck GA, Lu TM. Onset of thermal degradation in poly(p-phenylene vinylene) films deposited by chemical vapor deposition Synthetic Metals. 157: 48-52. DOI: 10.1016/J.Synthmet.2006.12.003 |
0.547 |
|
2007 |
Ten Eyck GA, Pimanpang S, Juneja JS, Bakhru H, Lu TM, Wang GC. Plasma-enhanced atomic layer deposition of palladium on a polymer substrate Chemical Vapor Deposition. 13: 307-311. DOI: 10.1002/Cvde.200606508 |
0.663 |
|
2006 |
Karabacak T, Deluca JS, Wang PI, Ten Eyck GA, Ye D, Wang GC, Lu TM. Low temperature melting of copper nanorod arrays Journal of Applied Physics. 99. DOI: 10.1063/1.2180437 |
0.649 |
|
2006 |
Kim YS, Shin J, Cho JH, Ten Eyck GA, Liu DL, Pimanpang S, Lu TM, Senkevich JJ, Shin HS. Surface characterization of copper electroless deposition on atomic layer deposited palladium on iridium and tungsten Surface and Coatings Technology. 200: 5760-5766. DOI: 10.1016/J.Surfcoat.2005.08.142 |
0.726 |
|
2006 |
Kim YS, Kim HI, Cho JH, Seo HK, Dar MA, Shin HS, Ten Eyck GA, Lu TM, Senkevich JJ. Electroless copper on refractory and noble metal substrates with an ultra-thin plasma-assisted atomic layer deposited palladium layer Electrochimica Acta. 51: 2400-2406. DOI: 10.1016/J.Electacta.2005.07.018 |
0.728 |
|
2006 |
Ten Eyck GA, Pimanpang S, Bakhru H, Lu TM, Wang GC. Atomic layer deposition of Pd on an oxidized metal substrate Chemical Vapor Deposition. 12: 290-294. DOI: 10.1002/Cvde.200506456 |
0.601 |
|
2005 |
Kim YS, Ten Eyck GA, Ye D, Jezewski C, Karabacak T, Shin HS, Senkevich JJ, Lu TM. Atomic layer deposition of Pd on TaN for Cu electroless plating Journal of the Electrochemical Society. 152. DOI: 10.1149/1.1899285 |
0.69 |
|
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