☰

Harmeet Singh, Ph.D. - Publications

Affiliations: 
2000 University of California, Berkeley, Berkeley, CA, United States 
Tree Info Similar researchers PubMed Report error

9 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2002 Ullal SJ, Singh H, Daugherty J, Vahedi V, Aydil ES. Formation and removal of composite halogenated silicon oxide and fluorocarbon films deposited on chamber walls during plasma etching of multiple film stacks Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 1939-1946. DOI: 10.1116/1.1502698  0.544
2002 Ullal SJ, Singh H, Daugherty J, Vahedi V, Aydil ES. Maintaining reproducible plasma reactor wall conditions: SF6 plasma cleaning of films deposited on chamber walls during Cl2/O2 plasma etching of Si Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 20: 1195-1201. DOI: 10.1116/1.1479733  0.55
2002 Ullal SJ, Singh H, Vahedi V, Aydil ES. Deposition of silicon oxychloride films on chamber walls during Cl2/O2 plasma etching of Si Journal of Vacuum Science and Technology, Part a: Vacuum, Surfaces and Films. 20: 499-506. DOI: 10.1116/1.1450578  0.331
2001 Singh H, Coburn JW, Graves DB. Measurements of neutral and ion composition, neutral temperature, and electron energy distribution function in a CF4 inductively coupled plasma Journal of Vacuum Science and Technology, Part a: Vacuum, Surfaces and Films. 19: 718-729. DOI: 10.1116/1.1354603  0.518
2000 Singh H, Coburn JW, Graves DB. Appearance potential mass spectrometry: discrimination of dissociative ionization products Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 18: 299-305. DOI: 10.1116/1.582183  0.491
2000 Singh H, Coburn JW, Graves DB. Surface loss coefficients of CFx and F radicals on stainless steel Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 18: 2680-2684. DOI: 10.1116/1.1308585  0.507
2000 Singh H, Graves DB. Measurements of the electron energy distribution function in molecular gases in a shielded inductively coupled plasma Journal of Applied Physics. 88: 3889-3898. DOI: 10.1063/1.373036  0.501
2000 Singh H, Coburn JW, Graves DB. Recombination coefficients of O and N radicals on stainless steel Journal of Applied Physics. 88: 3748-3755. DOI: 10.1063/1.1289046  0.517
1999 Singh H, Coburn JW, Graves DB. Mass spectrometric detection of reactive neutral species: Beam-to-background ratio Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 17: 2447-2455. DOI: 10.1116/1.581981  0.485
Show low-probability matches.