| Year |
Citation |
Score |
| 1995 |
Surendra M. Radiofrequency discharge benchmark model comparison Plasma Sources Science and Technology. 4: 56-73. DOI: 10.1088/0963-0252/4/1/007 |
0.473 |
|
| 1995 |
Surendra M, Guarnieri CR, Selwyn GS, Dalvie M. Across wafer etch rate uniformity in a high density plasma reactor: Experiment and modeling Applied Physics Letters. 2415. DOI: 10.1063/1.113958 |
0.366 |
|
| 1995 |
Vahedi V, Surendra M. A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges Computer Physics Communications. 87: 179-198. DOI: 10.1016/0010-4655(94)00171-W |
0.375 |
|
| 1994 |
Joubert O, Oehrlein GS, Surendra M, Zhang Y. Reactive ion etching lag investigation of oxide etching in fluorocarbon electron cyclotron resonance plasmas Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 12: 1957-1961. DOI: 10.1116/1.578989 |
0.38 |
|
| 1994 |
Joubert O, Oehrlein GS, Surendra M. Fluorocarbon high density plasma. VI. Reactive ion etching lag model for contact hole silicon dioxide etching in an electron cyclotron resonance plasma Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 12: 665-670. DOI: 10.1116/1.578850 |
0.408 |
|
| 1994 |
Dalvie M, Surendra M, Selwyn GS, Guarnieri CR. Detection and modelling of electrode topography effects on particle traps Plasma Sources Science and Technology. 3: 442-447. DOI: 10.1088/0963-0252/3/3/030 |
0.423 |
|
| 1994 |
Surendra M, Vender D. Collisionless electron heating by radio-frequency plasma sheaths Applied Physics Letters. 65: 153-155. DOI: 10.1063/1.112656 |
0.437 |
|
| 1994 |
Surendra M. Study of capacitive rf discharge characteristics through particle simulations Ieee International Conference On Plasma Science. 136. |
0.324 |
|
| 1993 |
Surendra M, Dalvie M. Moment analysis of rf parallel-plate-discharge simulations using the particle-in-cell with Monte Carlo collisions technique. Physical Review. E, Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics. 48: 3914-3924. PMID 9961048 DOI: 10.1103/Physreve.48.3914 |
0.358 |
|
| 1993 |
Dalvie M, Selwyn GS, Surendra M, Guarnieri CR, McGill JJ. Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges Applied Physics Letters. 63: 3279-3281. DOI: 10.1063/1.110174 |
0.396 |
|
| 1993 |
Dalvie M, Surendra M, Selwyn GS. Self-consistent fluid modeling of radio frequency discharges in two dimensions Applied Physics Letters. 62: 3207-3209. DOI: 10.1063/1.109079 |
0.437 |
|
| 1992 |
Surendra M, Graves DB, Plano LS. Self-consistent dc glow-discharge simulations applied to diamond film deposition reactors Journal of Applied Physics. 71: 5189-5198. DOI: 10.1063/1.350575 |
0.576 |
|
| 1991 |
Surendra M, Graves DB. Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges. Physical Review Letters. 66: 1469-1472. PMID 10043217 DOI: 10.1103/Physrevlett.66.1469 |
0.588 |
|
| 1991 |
Graves DB, Surendra M. Modeling and simulation of plasma processes Technical Digest - International Electron Devices Meeting, Iedm. 1991: 887-890. DOI: 10.1109/IEDM.1991.235283 |
0.508 |
|
| 1991 |
Surendra M, Graves DB. Particle Simulations of Radio-Frequency Glow Discharges Ieee Transactions On Plasma Science. 19: 144-157. DOI: 10.1109/27.106808 |
0.621 |
|
| 1991 |
Surendra M, Graves DB. Capacitively coupled glow discharges at frequencies above 13.56 MHz Applied Physics Letters. 59: 2091-2093. DOI: 10.1063/1.106112 |
0.562 |
|
| 1990 |
Surendra M, Graves DB, Jellum GM. Self-consistent model of a direct-current glow discharge: Treatment of fast electrons. Physical Review. A. 41: 1112-1125. PMID 9903193 DOI: 10.1103/Physreva.41.1112 |
0.532 |
|
| 1990 |
Surendra M, Graves DB, Morey IJ. Electron heating in low-pressure rf glow discharges Applied Physics Letters. 56: 1022-1024. DOI: 10.1063/1.102604 |
0.592 |
|
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