Serdar Aksu, Ph.D.
Affiliations: | 2002 | University of California, Berkeley, Berkeley, CA, United States |
Area:
Materials Science EngineeringGoogle:
"Serdar Aksu"Parents
Sign in to add mentor| Fiona M. Doyle | grad student | 2002 | UC Berkeley | |
| (The role of complexing agents in the chemical -mechanical planarization of copper.) | ||||
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Publications
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| Aksu S. (2010) Role of phosphoric acid in copper electrochemical mechanical planarization slurries Materials Research Society Symposium Proceedings. 1157: 139-144 |
| Aksu S. (2009) Potential-pH diagrams of copper for the planarization slurries with different complexing agents Ecs Transactions. 19: 15-24 |
| Aksu S. (2009) Electrochemical equilibria of copper in aqueous phosphoric acid solutions Journal of the Electrochemical Society. 156 |
| Patri UB, Aksu S, Babu SV. (2006) Role of the functional groups of complexing agents in copper slurries Journal of the Electrochemical Society. 153 |
| Aksu S, Emesh I, Başol B. (2006) Electrochemical Mechanical Planarization (eCMP) of copper overburden 2006 Proceedings - 11th International Chemical-Mechanical Planarization For Ulsi Multilevel Interconnection Conference, Cmp-Mic 2006. 19-26 |
| Aksu S. (2005) Electrochemistry of copper in aqueous oxalic acid solutions Journal of the Electrochemical Society. 152 |
| Aksu S. (2005) Potential-pH diagrams of interest to chemical mechanical planarization of copper thin films Materials Research Society Symposium Proceedings. 867: 15-20 |
| Aksu S, Wang L, Doyle FM. (2003) Effect of hydrogen peroxide on oxidation of copper in CMP slurries containing glycine Journal of the Electrochemical Society. 150 |
| Aksu S, Doyle FM. (2002) Electrochemistry of copper in aqueous ethylenediamine solutions Journal of the Electrochemical Society. 149 |
| Aksu S, Doyle FM. (2002) The role of glycine in the chemical mechanical planarization of copper Journal of the Electrochemical Society. 149 |