Luciana Meli
Affiliations: | 2009-2013 | Rensselaer Polytechnic Institute, Troy, NY, United States |
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"Luciana Meli"Parents
Sign in to add mentor| Robert J. Linhardt | post-doc | 2009-2013 | RPI | |
| (Advisory Engineer, IBM, Albany, NY) | ||||
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Publications
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| Meli L, Petrillo K, De Silva A, et al. (2018) Defect detection strategies and process partitioning for single-expose EUV patterning Journal of Micro/Nanolithography, Mems, and Moems. 18: 1 |
| Silva AD, Petrillo K, Meli L, et al. (2017) Single-expose patterning development for EUV lithography Proceedings of Spie. 10143 |
| Meli L, Petrillo K, Silva AD, et al. (2017) Driving down defect density in composite EUV patterning film stacks Proceedings of Spie. 10143 |
| Seshadri I, Silva AD, Meli L, et al. (2017) Ultrathin EUV patterning stack using polymer brush as an adhesion promotion layer Proceedings of Spie. 10143 |
| Felix N, Singh L, Seshadri I, et al. (2017) Ultrathin extreme ultraviolet patterning stack using polymer brush as an adhesion promotion layer Journal of Micro/Nanolithography, Mems, and Moems. 16: 1 |
| Bonam R, Tien HY, Chou A, et al. (2016) EUV mask and wafer defectivity: Strategy and evaluation for full die defect inspection Proceedings of Spie - the International Society For Optical Engineering. 9776 |
| Petrillo K, Saulnier N, Johnson R, et al. (2015) Towards production ready processing with a state-of-the-art EUV cluster Proceedings of Spie - the International Society For Optical Engineering. 9422 |
| Meli L, Barbosa HS, Hickey AM, et al. (2014) Three dimensional cellular microarray platform for human neural stem cell differentiation and toxicology. Stem Cell Research. 13: 36-47 |
| Datta P, Meli L, Li L, et al. (2014) Microarray platform affords improved product analysis in mammalian cell growth studies. Biotechnology Journal. 9: 386-95 |
| Sterner E, Meli L, Kwon SJ, et al. (2013) FGF-FGFR signaling mediated through glycosaminoglycans in microtiter plate and cell-based microarray platforms. Biochemistry. 52: 9009-19 |