Carrie Wing-Zin Low

2007

Roger T. Howe	grad student	2007	UC Berkeley (BME Tree)
(Novel processes for modular integration of silicon -germanium MEMS with CMOS electronics.)
Tsu-Jae King Liu	grad student	2007	UC Berkeley
(Novel processes for modular integration of silicon -germanium MEMS with CMOS electronics.)

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Low CW, Liu TJK, Howe RT. (2007) Characterization of polycrystalline silicon-germanium film deposition for modularly integrated MEMS applications Journal of Microelectromechanical Systems. 16: 68-77
Low CW, Liu TJK, Howe RT. (2006) Study of poly-SiGe structural properties for modularly integrated MEMS Ecs Transactions. 3: 1131-1142
Low CW, Bircumshaw BL, Dorofeeva T, et al. (2004) Stress stability of poly-SiGe and various oxide films in humid environments Materials Research Society Symposium Proceedings. 854: 22-27
Bircumshaw BL, Wasilik ML, Kim EB, et al. (2004) Hydrogen peroxide etching and stability of p-type poly-SiGe films Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 514-519
Low CW, Wasilik ML, Takeuchi H, et al. (2004) In-situ doped poly-sige LPCVD process using BCL3 for post-cmos integration of MEMS devices Proceedings - Electrochemical Society. 7: 1021-1032