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Brian Lee Bircumshaw

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2005 University of California, Berkeley, Berkeley, CA, United States 
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Albert P. Pisano grad student 2005 UC Berkeley
 (High-Q COMS-compatible poly-silicon germanium electrostatic RF MEMS resonators.)

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Bircumshaw BL, Wasilik ML, Kim EB, et al. (2004) Hydrogen peroxide etching and stability of p-type poly-SiGe films Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 514-519
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