Brett H. Piekarski, Ph.D.
Affiliations: | 2005 | University of Maryland, College Park, College Park, MD |
Area:
MEMS & MicrofluidicsGoogle:
"Brett Piekarski"Mean distance: 16.91 | S | N | B | C | P |
Parents
Sign in to add mentor| Donald Lad DeVoe | grad student | 2005 | University of Maryland | |
| (Lead zirconate titanate thin films for piezoelectric actuation and sensing of MEMS resonators.) | ||||
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Publications
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| Li H, Piekarski B, DeVoe DL, et al. (2008) Nonlinear oscillations of piezoelectric microresonators with curved cross-sections Sensors and Actuators, a: Physical. 144: 194-200 |
| Ferguson AT, Li L, Nagaraj VT, et al. (2005) Modeling and design of composite free-free beam piezoelectric resonators Sensors and Actuators, a: Physical. 118: 63-69 |
| Pulskamp JS, Wickenden A, Polcawich R, et al. (2003) Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 21: 2482 |
| Piekarski B, Dubey M, Zakar E, et al. (2002) Sol-Gel PZT for MEMS Applications Integrated Ferroelectrics. 42: 25-37 |
| Zakar E, Dubey M, Piekarski B, et al. (2001) Process and fabrication of a lead zirconate titanate thin film pressure sensor Journal of Vacuum Science and Technology. 19: 345-348 |
| McLane G, Polcawich R, Pulskamp J, et al. (2001) Reactive ion etching of sol-gel deposited lead zirconate titanate (pzt) thin films in sf6 plasmas Integrated Ferroelectrics. 37: 67-74 |
| Zakar E, Polcawich R, Dubey M, et al. (2001) Fabrication and testing of a PZT thin film high-pressure sensor Integrated Ferroelectrics. 41: 129-136 |
| Piekarski B, DeVoe D, Dubey M, et al. (2001) Surface micromachined piezoelectric resonant beam filters Sensors and Actuators a-Physical. 91: 313-320 |
| Zakar E, Dubey M, Polcawich R, et al. (1999) Study of PZT Film Stress in Multilayer Structures for MEMS Devices Mrs Proceedings. 605: 287 |
| Piekarski B, Dubey M, Devoe D, et al. (1999) Fabrication of suspended piezoelectric microresonators Integrated Ferroelectrics. 24: 147-154 |