David R. Boris, Ph.D.

Affiliations: 
2009 University of Wisconsin, Madison, Madison, WI 
Area:
Fluid and Plasma Physics, Nuclear Engineering
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Parents

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Gerald L. Kulcinski grad student 2009 UW Madison
 (Novel diagnostic approaches to characterizing the performance of the Wisconsin inertial electrostatic confinement plasma.)
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Publications

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Johnson MJ, Boris DR, Petrova TB, et al. (2019) Characterization of a Compact, Low-Cost Atmospheric-Pressure Plasma Jet Driven by a Piezoelectric Transformer Ieee Transactions On Plasma Science. 47: 434-444
Boris DR, Walton SG. (2018) Precise control of ion and radical production using electron beam generated plasmas Journal of Vacuum Science & Technology A. 36: 060601
Boris DR, Petrova TB, Petrov GM, et al. (2017) Atomic fluorine densities in electron beam generated plasmas: A high ion to radical ratio source for etching with atomic level precision Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 35: 01A104
Petrov GM, Petrova TB, Boris DR, et al. (2017) Parametric study of low-pressure electron beam generated Ar–SF6plasma and implications for processing Plasma Sources Science and Technology. 26: 095006
Petrova TB, Petrov GM, Boris DR, et al. (2017) Non-equilibrium steady-state kinetics of He-air atmospheric pressure plasmas Physics of Plasmas. 24: 013501
Walton S, Boris D, Hernández S, et al. (2017) Electron beam generated plasmas: Characteristics and etching of silicon nitride Microelectronic Engineering. 168: 89-96
Ghosh S, Boris DR, Hernández SC, et al. (2017) Correlating charge fluence with nanoparticle formation during in situ plasma synthesis of nanocomposite films Plasma Processes and Polymers. 14: 1700079
Petrov GM, Boris DR, Petrova TB, et al. (2016) One-dimensional Ar-SF6 hydromodel at low-pressure in e-beam generated plasmas Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 34
Boris DR, Cothran CD, Compton CS, et al. (2016) On the Mechanism of Pulsed Electron Beam Production From an Uninterrupted Plasma Cathode Ieee Transactions On Plasma Science
Walton SG, Boris DR, Herńandez SC, et al. (2015) Electron beam generated plasmas for ultra low Te processing Ecs Journal of Solid State Science and Technology. 4: N5033-N5040
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