Thomas Cummins, Ph.D.
Affiliations: | 2014 | Physics | University College Dublin (Ireland) |
Area:
Fluid and Plasma Physics, Atomic Physics, General PhysicsGoogle:
"Thomas Cummins"Mean distance: (not calculated yet)
Parents
Sign in to add mentor| Padraig Dunne | grad student | 2014 | University College Dublin (Ireland) | |
| (Studies of extreme ultraviolet emission from laser produced plasmas, as sources for next generation lithography.) | ||||
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Publications
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| Cummins T, O'Gorman C, Dunne P, et al. (2014) Colliding laser-produced plasmas as targets for laser-generated extreme ultraviolet sources Applied Physics Letters. 105 |
| O'Sullivan G, Cummins T, Dunne P, et al. (2013) Recent progress in source development for lithography at 6.x nm Physica Scripta |
| Donnelly T, Mazoyer M, Lynch A, et al. (2012) CO2 laser pulse shortening by laser ablation of a metal target. The Review of Scientific Instruments. 83: 035102 |
| Otsuka T, Li B, O'Gorman C, et al. (2012) A 6.7-nm beyond EUV source as a future lithography source Proceedings of Spie. 8322: 832214 |
| Higashiguchi T, Otsuka T, Yugami N, et al. (2012) Laser-produced plasma UTA emission in 3-7nm spectral region Proceedings of Spie. 8322 |
| O’Gorman C, Otsuka T, Yugami N, et al. (2012) The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm Applied Physics Letters. 100: 141108 |
| Cummins T, Otsuka T, Yugami N, et al. (2012) Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma Applied Physics Letters. 100: 061118 |
| Otsuka T, Kilbane D, Cummins T, et al. (2011) Shorter wavelength EUV source around 6.X nm by rare-earth plasma Proceedings of Spie. 8139 |
| Li B, Endo A, Otsuka T, et al. (2011) Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imaging Proceedings of Spie - the International Society For Optical Engineering. 8139 |