Shom S. Ponoth, Ph.D.
Affiliations: | 2003 | Rensselaer Polytechnic Institute, Troy, NY, United States |
Area:
Electronics and Electrical Engineering, Optics PhysicsGoogle:
"Shom Ponoth"Mean distance: (not calculated yet)
Parents
Sign in to add mentor| Peter D. Persans | grad student | 2003 | RPI | |
| (Silicon -CMOS BEOL compatible material systems and processing for on -chip optical interconnect components.) | ||||
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Publications
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| Ponoth SS, Agarwal NT, Persans PD, et al. (2005) Fabrication of micromirrors with self-aligned metallization using silicon back-end-of-the-line processes Thin Solid Films. 472: 169-179 |
| Ponoth SS, Agarwal NT, Persans PD, et al. (2004) Plasma silicon oxide-silica xerogel based planar optical waveguides Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 902-908 |
| Plawsky J, Ponoth S, Dalakos G, et al. (2004) Energy transport in plasma etching of nanoporous dielectric materials Superlattices and Microstructures. 35: 195-204 |
| Ponoth SS, Agarwal NT, Persans PD, et al. (2003) Fabrication of controlled sidewall angles in thin films using isotropic etches Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 1240-1247 |
| Ponoth S, Agarwal N, Persans P, et al. (2002) Silicon CMOS BEOL Compatible Optical Waveguide Micro-mirrors Mrs Proceedings. 744 |
| Agarwal N, Ponoth S, Plawsky J, et al. (2002) Optimized oxygen plasma etching of polyimide films for low loss optical waveguides Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 20: 1587-1591 |
| Jain A, Rogojevic S, Ponoth S, et al. (2002) Processing dependent thermal conductivity of nanoporous silica xerogel films Journal of Applied Physics. 91: 3275-3281 |
| Agarwal N, Ponoth S, Plawsky J, et al. (2001) Roughness evolution in polyimide films during plasma etching Applied Physics Letters. 78: 2294-2296 |
| Jain A, Rogojevic S, Ponoth S, et al. (2001) Porous silica materials as low-k dielectrics for electronic and optical interconnects Thin Solid Films. 398: 513-522 |
| Ponoth SS, Agarwal NT, Persans PD, et al. (2001) PECVD silicon oxide-xerogel and polymer-xerogel waveguides Materials Research Society Symposium - Proceedings. 637 |