Kazutoshi Takenoshita, Ph.D.

Affiliations: 
2006 University of Central Florida, Orlando, FL, United States 
Area:
Fluid and Plasma Physics, Electronics and Electrical Engineering
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Martin C. Richardson grad student 2006 University of Central Florida
 (Debris characterization and mitigation of droplet laser plasma sources for EUV lithography.)
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Publications

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Hou KC, George S, Mordovanakis AG, et al. (2008) High power fiber laser driver for efficient EUV lithography source with tin-doped water droplet targets. Optics Express. 16: 965-74
Kamtaprasad R, Bernath R, Takenoshita K, et al. (2008) EUV spectroscopy of tin-doped laser plasma source Optics Infobase Conference Papers
George SA, Hou KC, Takenoshita K, et al. (2007) 13.5 nm EUV generation from tin-doped droplets using a fiber laser. Optics Express. 15: 16348-56
George SA, Silfvast WT, Takenoshita K, et al. (2007) Comparative extreme ultraviolet emission measurements for lithium and tin laser plasmas. Optics Letters. 32: 997-9
Richardson MC, Takenoshita K, Schmid T. (2007) Tin inventory for HVM EUVL sources Proceedings of Spie - the International Society For Optical Engineering. 6517
Takenoshita K, George SA, Schmid T, et al. (2007) Characterization of the tin-doped droplet laser plasma EUVL sources for HVM Proceedings of Spie - the International Society For Optical Engineering. 6517
Schmid T, George SA, Cunado J, et al. (2007) High repetition-rate LPP-source facility for EUVL Proceedings of Spie - the International Society For Optical Engineering. 6517
Takenoshita K, Schmid T, George SA, et al. (2007) High power EUVL source demonstration of tin-doped droplet laser plasma generated by industrial solid state lasers Optics Infobase Conference Papers
Cunado J, Takenoshita K, George SA, et al. (2007) Stabilized droplet target delivery for high power EUV generation for lithography Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-Leos. 484-485
Takenoshita K, Schmid T, George SA, et al. (2007) High power EUVL source demonstration of tin-doped droplet laser plasma generated by industrial solid state lasers Conference On Lasers and Electro-Optics, 2007, Cleo 2007
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