Robert D. Grober

Affiliations: 
Yale University, New Haven, CT 
Area:
Optics Physics, Analytical Chemistry
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"Robert Grober"
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Gilbert D. Feke grad student 2001 Yale
Peter J. Schuck grad student 2003 Yale
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Mason MD, Ray K, Grober RD, et al. (2004) Single molecule acid-base kinetics and thermodynamics. Physical Review Letters. 93: 073004
Mason MD, Ray K, Feke GD, et al. (2003) Calibration and validation of projection lithography in chemically amplified resist systems using fluorescence imaging Proceedings of Spie - the International Society For Optical Engineering. 5038: 473-482
Feke GD, Grober RD, Pohlers G, et al. (2002) Calibration and validation of projection lithography focusing by fluorescence detection of latent photoacid images in chemically amplified resist Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 164-166
Feke GD, Grober RD, Pohlers G, et al. (2001) On-wafer spectrofluorometric method for determination of relative quantum yields of photoacid generation in chemically amplified resists. Analytical Chemistry. 73: 3472-80
Feke GD, Grober RD, Pohlers G, et al. (2001) Method for measuring profiles of photoacid patterns in chemically amplified resists Materials Research Society Symposium - Proceedings. 636
Wu Q, Feke GD, Grober RD, et al. (1999) Realization of numerical aperture 2.0 using a gallium phosphide solid immersion lens Applied Physics Letters. 75: 4064-4066
Feke GD, Snow DP, Grober RD, et al. (1998) Interferometric back focal plane microellipsometry. Applied Optics. 37: 1796-802
Bukofsky SJ, Feke GD, Wu Q, et al. (1998) Imaging of photogenerated acid in a chemically amplified photoresist Applied Physics Letters. 73: 408-410
Bukofsky SJ, Grober RD. (1997) Video rate near-field scanning optical microscopy Applied Physics Letters. 71: 2749-2751
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