Xianmin Tang, Ph.D.
Affiliations: | 2000 | College of William and Mary, Williamsburg, VA |
Area:
Fluid and Plasma Physics, Electronics and Electrical Engineering, Industrial EngineeringGoogle:
"Xianmin Tang"Mean distance: (not calculated yet)
Parents
Sign in to add mentor| Dennis M. Manos | grad student | 2000 | William and Mary | |
| (Low damage processing and process characterization.) | ||||
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Publications
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| Tang X, Wang Q, Manos DM. (2000) Process damage assessment of a low energy inductively coupled plasma-based neutral source Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 1262-1267 |
| Tang X, Manos DM. (2000) Optical emission studies and neutral stream characterization of a surface reflection materials processing source Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 18: 1359-1365 |
| Tang X, Manos DM. (1999) Time-resolved electrostatic probe studies of a pulsed inductively-coupled plasma Plasma Sources Science and Technology. 8: 594-602 |
| Tang X, Nichols CA, Manos DM. (1999) Stripping and cleaning of photoresist using low energy neutrals Journal of Applied Physics. 86: 2419-2424 |