Xianmin Tang, Ph.D.
|2000||College of William and Mary, Williamsburg, VA|
Area:Fluid and Plasma Physics, Electronics and Electrical Engineering, Industrial Engineering
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|Tang X, Wang Q, Manos DM. (2000) Process damage assessment of a low energy inductively coupled plasma-based neutral source Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 1262-1267|
|Tang X, Manos DM. (2000) Optical emission studies and neutral stream characterization of a surface reflection materials processing source Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 18: 1359-1365|
|Tang X, Manos DM. (1999) Time-resolved electrostatic probe studies of a pulsed inductively-coupled plasma Plasma Sources Science and Technology. 8: 594-602|
|Tang X, Nichols CA, Manos DM. (1999) Stripping and cleaning of photoresist using low energy neutrals Journal of Applied Physics. 86: 2419-2424|