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Jae Young Choe

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1999 Columbia University, New York, NY 
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Irving P. Herman grad student 1999 Columbia

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Choe JY, Fuller NCM, Donnelly VM, et al. (2000) Transient plasma-induced emission analysis of laser-desorbed species during Cl2 plasma etching of Si Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 18: 2669-2679
Choe JY, Herman IP, Donnelly VM. (1998) Laser-induced thermal desorption analysis of the surface during Ge etching in a Cl2 inductively coupled plasma Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 16: 3266-3273
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