Robert F Berg, Ph.D.
|1983-||Physical Measurements Lab||National Institute of Standards and Technology, Gaithersburg, MD, United States|
Area:Vacum technology, Optical Contamination Caused by Photoresists
Bobby Berg arrived at NIST as an NRC postdoc in 1983. In subsequent years, he and Mike Moldover developed a series of novel oscillators that were used to measure the subtle viscosity increase that occurs near liquid-liquid and liquid-vapor critical points. NASA sponsorship extended that program to microgravity, and Bobby was principal investigator for experiments that flew on Space Shuttle flights in 1997 and 2003.
During 1998-2012, Bobby worked in the Pressure & Vacuum Group, where he calibrated spinning rotor gauges and developed techniques to measure gas flow rates in the range from 0.01 to 1000 cm3 per minute. The improved techniques led to viscosity measurements of helium and other gases with uncertainties small enough to test quantum mechanical ab initio calculations of gas viscosity. He also developed apparatus and techniques to measure the vapor pressures of metal-organic compounds that are used as precursors by the semiconductor manufacturing industry.
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|Berg RF. (2015) Correcting "static" measurements of vapor pressure for time dependence due to diffusion and decomposition. Journal of Chemical and Engineering Data. 60: 3496-3505|
|Berg RF. (2015) Apparatus to measure the vapor pressure of slowly decomposing compounds from 1 Pa to 10(5) Pa. Journal of Chemical and Engineering Data. 60: 3483-3495|
|Berg RF, Gooding T, Vest RE. (2014) Constant pressure primary flow standard for gas flows from 0.01cm3/min to 100cm3/min (0.007–74μmol/s) Flow Measurement and Instrumentation. 35: 84-91|
|Berg RF, May EF, Moldover MR. (2013) Viscosity Ratio Measurements with Capillary Viscometers Journal of Chemical & Engineering Data. 59: 116-124|
|Fulem M, Růžička K, Červinka C, et al. (2013) Recommended vapor pressure and thermophysical data for ferrocene The Journal of Chemical Thermodynamics. 57: 530-540|
|Berg RF, Burton WC. (2012) Noble gas viscosities at 25 °C Molecular Physics. 111: 195-199|
|Berg RF, Moldover MR. (2012) Recommended Viscosities of 11 Dilute Gases at 25 °C Journal of Physical and Chemical Reference Data. 41: 043104|
|Wright JD, Cobu T, Berg RF, et al. (2012) Calibration of laminar flow meters for process gases Flow Measurement and Instrumentation. 25: 8-14|
|Berg RF. (2011) Thermoelectric temperature control device for vapor pressure measurements. The Review of Scientific Instruments. 82: 085110|
|Berg RF, Moldover MR, Yao M, et al. (2009) Erratum: Shear thinning near the critical point of xenon [Phys. Rev. E77, 041116 (2008)] Physical Review E. 79|