John R Abelson

Affiliations: 
Materials Science and Engineering University of Illinois, Urbana-Champaign, Urbana-Champaign, IL 
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Jennifer E. Gerbi grad student 2001 UIUC
Hyun-Chul Jin grad student 2001 UIUC
Junghwan Sung grad student 2001 UIUC
Sreenivas Jayaraman grad student 2005 UIUC
Bong-Sub Lee grad student 2006 UIUC
Lakshminarayana Nittala grad student 2006 UIUC
Brent A. Sperling grad student 2006 UIUC
Stephanie N. Bogle grad student 2009 UIUC
Navneet Kumar grad student 2009 UIUC
Teresa S. Lazarz grad student 2009 UIUC
Andrew N. Cloud grad student 2013 UIUC
Kristof Darmawikarta grad student 2013 UIUC
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Publications

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Abelson JR, Girolami GS. (2020) New strategies for conformal, superconformal, and ultrasmooth films by low temperature chemical vapor deposition Journal of Vacuum Science & Technology A. 38: 030802
Zhang ZV, Liu S, Girolami GS, et al. (2020) Area-selective chemical vapor deposition of cobalt from dicobalt octacarbonyl: Enhancement of dielectric-dielectric selectivity by adding a coflow of NH3 Journal of Vacuum Science & Technology A. 38: 033401
Mohimi E, Zhang ZV, Mallek JL, et al. (2019) Low temperature chemical vapor deposition of superconducting vanadium nitride thin films Journal of Vacuum Science & Technology A. 37: 031509
Mohimi E, Canova K, Zhang Z, et al. (2019) Low temperature chemical vapor deposition of superconducting molybdenum carbonitride thin films Journal of Vacuum Science & Technology A. 37: 021503
Talukdar TK, Girolami GS, Abelson JR. (2019) Seamless fill of deep trenches by chemical vapor deposition: Use of a molecular growth inhibitor to eliminate pinch-off Journal of Vacuum Science & Technology A. 37: 021509
Humood M, Ozkan T, Mohimi E, et al. (2019) A framework for modeling the nanomechanical and nanotribological properties of high temperature HfBxCy coatings Wear. 280-288
Sandin C, Talukdar T, Abelson JR, et al. (2018) Bottom-Up Synthesis And Mechanical Behavior Of Refractory Coatings Made Of CNT-Hafnium Diboride Composites. Acs Applied Materials & Interfaces
Zhang P, Zhang Z, Abelson JR, et al. (2018) Chemical vapor deposition of magnetic iron-cobalt alloy thin films: Use of ammonia to stabilize growth from carbonyl precursors Journal of Vacuum Science & Technology A. 36: 061505
Talukdar TK, Liu S, Zhang Z, et al. (2018) Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition Journal of Vacuum Science & Technology A. 36: 051504
Talukdar TK, Wang WB, Girolami GS, et al. (2018) Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes Journal of Vacuum Science & Technology A. 36: 051513
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