John R Abelson
Affiliations: | Materials Science and Engineering | University of Illinois, Urbana-Champaign, Urbana-Champaign, IL |
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Children
Sign in to add traineeJennifer E. Gerbi | grad student | 2001 | UIUC |
Hyun-Chul Jin | grad student | 2001 | UIUC |
Junghwan Sung | grad student | 2001 | UIUC |
Sreenivas Jayaraman | grad student | 2005 | UIUC |
Bong-Sub Lee | grad student | 2006 | UIUC |
Lakshminarayana Nittala | grad student | 2006 | UIUC |
Brent A. Sperling | grad student | 2006 | UIUC |
Stephanie N. Bogle | grad student | 2009 | UIUC |
Navneet Kumar | grad student | 2009 | UIUC |
Teresa S. Lazarz | grad student | 2009 | UIUC |
Andrew N. Cloud | grad student | 2013 | UIUC |
Kristof Darmawikarta | grad student | 2013 | UIUC |
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Publications
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Abelson JR, Girolami GS. (2020) New strategies for conformal, superconformal, and ultrasmooth films by low temperature chemical vapor deposition Journal of Vacuum Science & Technology A. 38: 030802 |
Zhang ZV, Liu S, Girolami GS, et al. (2020) Area-selective chemical vapor deposition of cobalt from dicobalt octacarbonyl: Enhancement of dielectric-dielectric selectivity by adding a coflow of NH3 Journal of Vacuum Science & Technology A. 38: 033401 |
Mohimi E, Zhang ZV, Mallek JL, et al. (2019) Low temperature chemical vapor deposition of superconducting vanadium nitride thin films Journal of Vacuum Science & Technology A. 37: 031509 |
Mohimi E, Canova K, Zhang Z, et al. (2019) Low temperature chemical vapor deposition of superconducting molybdenum carbonitride thin films Journal of Vacuum Science & Technology A. 37: 021503 |
Talukdar TK, Girolami GS, Abelson JR. (2019) Seamless fill of deep trenches by chemical vapor deposition: Use of a molecular growth inhibitor to eliminate pinch-off Journal of Vacuum Science & Technology A. 37: 021509 |
Humood M, Ozkan T, Mohimi E, et al. (2019) A framework for modeling the nanomechanical and nanotribological properties of high temperature HfBxCy coatings Wear. 280-288 |
Sandin C, Talukdar T, Abelson JR, et al. (2018) Bottom-Up Synthesis And Mechanical Behavior Of Refractory Coatings Made Of CNT-Hafnium Diboride Composites. Acs Applied Materials & Interfaces |
Zhang P, Zhang Z, Abelson JR, et al. (2018) Chemical vapor deposition of magnetic iron-cobalt alloy thin films: Use of ammonia to stabilize growth from carbonyl precursors Journal of Vacuum Science & Technology A. 36: 061505 |
Talukdar TK, Liu S, Zhang Z, et al. (2018) Conformal MgO film grown at high rate at low temperature by forward-directed chemical vapor deposition Journal of Vacuum Science & Technology A. 36: 051504 |
Talukdar TK, Wang WB, Girolami GS, et al. (2018) Superconformal coating and filling of deep trenches by chemical vapor deposition with forward-directed fluxes Journal of Vacuum Science & Technology A. 36: 051513 |