Brent A. Sperling, Ph.D.
Affiliations: | 2006 | University of Illinois, Urbana-Champaign, Urbana-Champaign, IL |
Area:
Materials Science EngineeringGoogle:
"Brent Sperling"Mean distance: (not calculated yet)
Parents
Sign in to add mentor| John R Abelson | grad student | 2006 | UIUC | |
| (Kinetic roughening during hot-wire chemical vapor deposition of hydrogenated amorphous silicon.) | ||||
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Publications
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| Maslar JE, Kimes WA, Sperling BA, et al. (2020) Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes. Applied Spectroscopy. 3702819885182 |
| Sperling BA, Kalanyan B, Maslar JE. (2020) Atomic Layer Deposition of Al2O3 Using Trimethylaluminum and H2O: The Kinetics of the H2O Half-Cycle Journal of Physical Chemistry C. 124: 3410-3420 |
| Maslar JE, Kimes WA, Sperling BA. (2019) Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition Processes. Journal of Research of the National Institute of Standards and Technology. 124: 1-15 |
| Sperling BA, Maslar JE. (2019) Experiment-based modelling of a vapor draw ampoule used for low-volatility precursors. Journal of Vacuum Science and Technology. B, Nanotechnology & Microelectronics : Materials, Processing, Measurement, & Phenomena : Jvst B. 37 |
| Maslar JE, Kimes WA, Sperling BA, et al. (2019) Characterization of bubbler performance for low-volatility liquid precursor delivery Journal of Vacuum Science and Technology. 37: 41506 |
| Zhang Q, Zhang S, Sperling BA, et al. (2019) Band Offset and Electron Affinity of Monolayer MoSe 2 by Internal Photoemission Journal of Electronic Materials. 48: 6446-6450 |
| Maslar JE, Kimes WA, Sperling BA. (2019) Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition Processes Journal of Research of the National Institute of Standards and Technology. 124 |
| Sperling BA, Maslar JE, Ivanov SV. (2018) infrared spectroscopy during LaO ALD using La( PrCp) and HO. Journal of Vacuum Science & Technology. a, Vacuum, Surfaces, and Films : An Official Journal of the American Vacuum Society. 36 |
| Zhao J, Kalanyan B, Barton HF, et al. (2017) Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal-Organic Framework Thin Film Growth. Chemistry of Materials : a Publication of the American Chemical Society. 29: 8804-8810 |
| Maslar JE, Kimes WA, Sperling BA, et al. (2017) Nondispersive Infrared Gas Analyzer for Vapor Density Measurements of a Carbonyl-Containing Organometallic Cobalt Precursor. Applied Spectroscopy. 71: 2632-2642 |