Navneet Kumar, Ph.D.

Affiliations: 
2009 University of Illinois, Urbana-Champaign, Urbana-Champaign, IL 
Area:
Materials Science Engineering
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Parents

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John R Abelson grad student 2009 UIUC
 (Control of reaction surface in low temperature CVD to enhance nucleation and conformal coverage.)
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Publications

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Babar S, Kumar N, Zhang P, et al. (2013) Growth inhibitor to homogenize nucleation and obtain smooth HfB2 thin films by chemical vapor deposition Chemistry of Materials. 25: 662-667
Schmucker SW, Kumar N, Abelson JR, et al. (2012) Field-directed sputter sharpening for tailored probe materials and atomic-scale lithography. Nature Communications. 3: 935
Tayebi N, Yanguas-Gil A, Kumar N, et al. (2012) Hard HfB2 tip-coatings for ultrahigh density probe-based storage Applied Physics Letters. 101: 091909
Ye W, Peña Martin PA, Kumar N, et al. (2010) Direct writing of sub-5 nm hafnium diboride metallic nanostructures. Acs Nano. 4: 6818-24
Chatterjee A, Kumar N, Abelson JR, et al. (2010) Nanowear of Hafnium Diboride thin films Tribology Transactions. 53: 731-738
Yanguas-Gil A, Kumar N, Yang Y, et al. (2009) Highly conformal film growth by chemical vapor deposition. II. Conformality enhancement through growth inhibition Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 27: 1244-1248
Yanguas-Gil A, Yang Y, Kumar N, et al. (2009) Highly conformal film growth by chemical vapor deposition. I. A conformal zone diagram based on kinetics Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 27: 1235-1243
Kumar N, Yanguas-Gil A, Daly SR, et al. (2009) Remote plasma treatment of Si surfaces: Enhanced nucleation in low-temperature chemical vapor deposition Applied Physics Letters. 95
Kumar N, Noh W, Daly SR, et al. (2009) Low temperature chemical vapor deposition of hafnium nitride - Boron nitride nanocomposite films Chemistry of Materials. 21: 5601-5606
Kumar N, Yanguas-Gil A, Daly SR, et al. (2008) Growth inhibition to enhance conformal coverage in thin film chemical vapor deposition. Journal of the American Chemical Society. 130: 17660-1
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