Year |
Citation |
Score |
2015 |
Ng E, Yang Y, Hong VA, Ahn CH, Heinz DB, Flader I, Chen Y, Everhart CLM, Kim B, Melamud R, Candler RN, Hopcroft MA, Salvia JC, Yoneoka S, Graham AB, et al. The long path from MEMS resonators to timing products Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2015: 1-2. DOI: 10.1109/MEMSYS.2015.7050869 |
0.793 |
|
2013 |
Ng EJ, Lee HK, Ahn CH, Melamud R, Kenny TW. Stability of silicon microelectromechanical systems resonant thermometers Ieee Sensors Journal. 13: 987-993. DOI: 10.1109/Jsen.2012.2227708 |
0.723 |
|
2013 |
Lee HK, Melamud R, Kim B, Chandorkar S, Salvia JC, Kenny TW. The effect of the temperature-dependent nonlinearities on the temperature stability of micromechanical resonators Journal of Applied Physics. 114. DOI: 10.1063/1.4825327 |
0.736 |
|
2012 |
Kim B, Melamud R, Candler RA, Hopcroft MA, Kenny TW. MEMS packaging for reliable resonators and oscillators Ieee Mtt-S International Microwave Symposium Digest. DOI: 10.1109/MWSYM.2012.6259391 |
0.781 |
|
2012 |
Partridge A, Lee H, Melamud R, Assaderaghi F. MEMS oscillators Technical Proceedings of the 2012 Nsti Nanotechnology Conference and Expo, Nsti-Nanotech 2012. 219-222. |
0.607 |
|
2012 |
Melamud R, Hagelin PM, Arft CM, Grosjean C, Arumugam N, Gupta P, Hill G, Lutz M, Partridge A, Assaderaghi F. Mems enables oscillators with sub-ppm frequency stability and sub-ps jitter Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop. 66-69. |
0.635 |
|
2011 |
Lee HK, Ward PA, Duwel AE, Salvia JC, Qu YQ, Melamud R, Chandorkar SA, Hopcroft MA, Kim B, Kenny TW. Verification of the phase-noise model for MEMS oscillators operating in the nonlinear regime 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 510-513. DOI: 10.1109/TRANSDUCERS.2011.5969667 |
0.676 |
|
2011 |
Lee HK, Melamud R, Chandorkar SA, Qu YQ, Salvia JC, Kim B, Hopcroft MA, Kenny TW. Influence of the A-F effect on the temperature stability of silicon micromechanical resonators 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, Transducers'11. 506-509. DOI: 10.1109/TRANSDUCERS.2011.5969666 |
0.758 |
|
2011 |
Chen KL, Wang S, Salvia JC, Melamud R, Howe RT, Kenny TW. Wafer-level epitaxial silicon packaging for out-of-plane RF MEMS resonators with integrated actuation electrodes Ieee Transactions On Components, Packaging and Manufacturing Technology. 1: 310-317. DOI: 10.1109/Tcpmt.2010.2100711 |
0.61 |
|
2011 |
Lee HK, Melamud R, Chandorkar S, Salvia J, Yoneoka S, Kenny TW. Stable operation of MEMS oscillators far above the critical vibration amplitude in the nonlinear regime Journal of Microelectromechanical Systems. 20: 1228-1230. DOI: 10.1109/Jmems.2011.2170821 |
0.596 |
|
2011 |
Lee HK, Melamud R, Kim B, Hopcroft MA, Salvia JC, Kenny TW. Electrostatic tuning to achieve higher stability microelectromechanical composite resonators Journal of Microelectromechanical Systems. 20: 1355-1365. DOI: 10.1109/Jmems.2011.2168083 |
0.797 |
|
2011 |
Bahl G, Salvia JC, Melamud R, Kim B, Howe RT, Kenny TW. AC polarization for charge-drift elimination in resonant electrostatic MEMS and oscillators Journal of Microelectromechanical Systems. 20: 355-364. DOI: 10.1109/Jmems.2010.2100027 |
0.768 |
|
2011 |
Ng EJ, Lee HK, Ahn CH, Melamud R, Kenny TW. Stability measurements of silicon MEMS resonant thermometers Proceedings of Ieee Sensors. 1257-1260. DOI: 10.1109/ICSENS.2011.6127252 |
0.65 |
|
2011 |
Lee HK, Melamud R, Chandorkar S, Qu YQ, Salvia J, Kenny TW. Motional impedance of resonators in the nonlinear regime Proceedings of the Ieee International Frequency Control Symposium and Exposition. DOI: 10.1109/FCS.2011.5977779 |
0.525 |
|
2011 |
Kyu Lee H, Kim B, Melamud R, Hopcroft MA, Salvia JC, Kenny TW. Influence of the temperature dependent nonlinearities on the performance of micromechanical resonators Applied Physics Letters. 99. DOI: 10.1063/1.3660235 |
0.817 |
|
2011 |
Lee FS, Salvia J, Lee C, Mukherjee S, Melamud R, Arumugam N, Pamarti S, Arft C, Gupta P, Tabatabaei S, Garlepp B, Lee HC, Partridge A, Perrott MH, Assaderaghi F. A programmable MEMS-based clock generator with sub-ps jitter performance Ieee Symposium On Vlsi Circuits, Digest of Technical Papers. 158-159. |
0.441 |
|
2010 |
Bahl G, Salvia J, Bargatin I, Yoneoka S, Melamud R, Kim B, Chandorkar S, Hopcroft MA, Bahl R, Howe RT, Kenny TW. Charge-drift elimination in resonant electrostatic MEMS Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 108-111. DOI: 10.1109/MEMSYS.2010.5442555 |
0.73 |
|
2010 |
Yoneoka S, Qu YQ, Wang S, Messana MW, Graham AB, Salvia J, Kim B, Melamud R, Bahl G, Kenny TW. High-cyclic fatigue experiments of single crystal silicon in an oxygen-free environment Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 224-227. DOI: 10.1109/MEMSYS.2010.5442524 |
0.436 |
|
2010 |
Qu YQ, Melamud R, Chandorkar S, Lee HK, Kenny TW. Stress relaxation study of sputtered platinum thin films at near room temperature using an ultra-sensitive strain gauge Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 548-551. DOI: 10.1109/MEMSYS.2010.5442445 |
0.543 |
|
2010 |
Lee HK, Salvia J, Bahl G, Melamud R, Yoneoka S, Qu YQ, Chandorkar S, Hopcroft MA, Kim B, Kenny TW. Influence of the temperature dependent A-F effect on the design and performance of MEMS oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 699-702. DOI: 10.1109/MEMSYS.2010.5442312 |
0.711 |
|
2010 |
Wang S, Chandorkar S, Salvia J, Melamud R, Qu YQ, Lee HK, Kenny TW. Nonlinearity of hermetically encapsulated high-Q double balanced breathe-mode ring resonator Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 715-718. DOI: 10.1109/MEMSYS.2010.5442308 |
0.544 |
|
2010 |
Lee HK, Yoneoka S, Bahl G, Salvia J, Qu YQ, Melamud R, Chandorkar S, Kim B, Hopcroft MA, Kenny TW. A novel characterization method for temperature compensation of composite resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 743-746. DOI: 10.1109/MEMSYS.2010.5442299 |
0.756 |
|
2010 |
Yoneoka S, Salvia JC, Bahl G, Melamud R, Chandorkar SA, Kenny TW. Active electrostatic compensation of micromechanical resonators under random vibrations Journal of Microelectromechanical Systems. 19: 1270-1272. DOI: 10.1109/Jmems.2010.2067444 |
0.737 |
|
2010 |
Bahl G, Melamud R, Kim B, Chandorkar SA, Salvia JC, Hopcroft MA, Elata D, Hennessy RG, Candler RN, Howe RT, Kenny TW. Model and observations of dielectric charge in thermally oxidized silicon resonators Journal of Microelectromechanical Systems. 19: 162-174. DOI: 10.1109/Jmems.2009.2036274 |
0.814 |
|
2010 |
Salvia JC, Melamud R, Chandorkar SA, Lord SF, Kenny TW. Real-time temperature compensation of mems oscillators using an integrated micro-oven and a phase-locked loop Journal of Microelectromechanical Systems. 19: 192-201. DOI: 10.1109/Jmems.2009.2035932 |
0.626 |
|
2010 |
Graham AB, Messana MW, Hartwell PG, Provine J, Yoneoka S, Melamud R, Kim B, Howe RT, Kenny TW. A method for wafer-scale encapsulation of large lateral deflection MEMS devices Journal of Microelectromechanical Systems. 19: 28-37. DOI: 10.1109/Jmems.2009.2035717 |
0.642 |
|
2010 |
Kim B, Melamud R, Candler RA, Hopcroft MA, Jha CM, Chandorkar S, Kenny TW. Encapsulated MEMS resonators- A technology path for MEMS into frequency control applications 2010 Ieee International Frequency Control Symposium, Fcs 2010. 1-4. DOI: 10.1109/FREQ.2010.5556386 |
0.76 |
|
2009 |
Qu YQ, Melamud R, Kenny TW. Using encapsulated MEMS resonators to measure evolution in thin film stress Transducers 2009 - 15th International Conference On Solid-State Sensors, Actuators and Microsystems. 1138-1141. DOI: 10.1109/SENSOR.2009.5285931 |
0.545 |
|
2009 |
Chen KL, Melamud R, Wang S, Kenny TW. An integrated solution for wafer-level packaging and electrostatic actuation of out-of-plane devices Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 1071-1074. DOI: 10.1109/MEMSYS.2009.4805572 |
0.435 |
|
2009 |
Graham AB, Messana M, Hartwell P, Provinel J, Yoneoka S, Kim B, Melamud R, Howe RT, Kenny TW. Wafer scale encapsulation of large lateral deflection MEMS structures Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 745-748. DOI: 10.1109/MEMSYS.2009.4805490 |
0.421 |
|
2009 |
Salvia J, Melamud R, Chandorkar S, Lee HK, Qu YQ, Lord SF, Murmann B, Kenny TW. Phase lock loop based temperature compensation for mems oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 661-664. DOI: 10.1109/MEMSYS.2009.4805469 |
0.504 |
|
2009 |
Melamud R, Chandorkar SA, Kim B, Lee HK, Salvia JC, Bahl G, Hopcroft MA, Kenny TW. Temperature-insensitive composite micromechanical resonators Journal of Microelectromechanical Systems. 18: 1409-1419. DOI: 10.1109/Jmems.2009.2030074 |
0.852 |
|
2009 |
Chandorkar SA, Candler RN, Duwel A, Melamud R, Agarwal M, Goodson KE, Kenny TW. Multimode thermoelastic dissipation Journal of Applied Physics. 105. DOI: 10.1063/1.3072682 |
0.797 |
|
2009 |
Kim B, Candler RN, Melamud R, Hopcroft MA, Yoneoka S, Lee HK, Agarwal M, Chandorkar SA, Yama G, Kenny TW. Hermeticity and diffusion investigation in polysilicon film encapsulation for microelectromechanical systems Journal of Applied Physics. 105. DOI: 10.1063/1.3054366 |
0.77 |
|
2008 |
Kim B, Candler RN, Melamud R, Yoneoka S, Hyung KL, Yama G, Kenny TW. Identification and management of diffusion pathways in polysilicon encapsulation for MEMS devices Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 104-107. DOI: 10.1109/MEMSYS.2008.4443603 |
0.671 |
|
2008 |
Chandorkar SA, Agarwal M, Melamud R, Candler RN, Goodson KE, Kenny TW. Limits of quality factor in bulk-mode micromechanical resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 74-77. DOI: 10.1109/MEMSYS.2008.4443596 |
0.756 |
|
2008 |
Kim B, Hopcroft MA, Candler RN, Jha CM, Agarwal M, Melamud R, Chandorkar SA, Yama G, Kenny TW. Temperature dependence of quality factor in MEMS resonators Journal of Microelectromechanical Systems. 17: 755-766. DOI: 10.1109/Jmems.2008.924253 |
0.827 |
|
2008 |
Jha CM, Hopcroft MA, Chandorkar SA, Salvia JC, Agarwal M, Candler RN, Melamud R, Kim B, Kenny TW. Thermal isolation of encapsulated MEMS resonators Journal of Microelectromechanical Systems. 17: 175-184. DOI: 10.1109/Jmems.2007.904332 |
0.813 |
|
2008 |
Salvia J, Messana M, Ohline M, Hopcroft MA, Melamud R, Chandorkar S, Lee HK, Bahl G, Murmann B, Kenny TW. Exploring the limits and practicality of Q-based temperature compensation for silicon resonators Technical Digest - International Electron Devices Meeting, Iedm. DOI: 10.1109/IEDM.2008.4796783 |
0.755 |
|
2008 |
Jha CM, Salvia J, Chandorkar SA, Melamud R, Kuhl E, Kenny TW. Acceleration insensitive encapsulated silicon microresonator Applied Physics Letters. 93. DOI: 10.1063/1.3036536 |
0.591 |
|
2008 |
Agarwal M, Chandorkar SA, Mehta H, Candler RN, Kim B, Hopcroft MA, Melamud R, Jha CM, Bahl G, Yama G, Kenny TW, Murmann B. A study of electrostatic force nonlinearities in resonant microstructures Applied Physics Letters. 92. DOI: 10.1063/1.2834707 |
0.785 |
|
2007 |
Kim B, Hopcroft MA, Melamud R, Jha CM, Agarwal M, Chandorkar SA, Kenny TW. CMOS compatible wafer-scale encapsulation with MEMS resonators 2007 Proceedings of the Asme Interpack Conference, Ipack 2007. 1: 499-504. DOI: 10.1115/IPACK2007-33234 |
0.818 |
|
2007 |
Hopcroft MA, Lee HK, Kim B, Melamud R, Chandorkar S, Agarwal M, Jha CM, Salvia J, Bahl G, Mehta H, Kenny TW. A high-stability MEMS frequency reference Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 1307-1309. DOI: 10.1109/SENSOR.2007.4300378 |
0.753 |
|
2007 |
Kim B, Hopcroft M, Jha CM, Melamud R, Chandorkar S, Agarwal M, Chen KL, Park WT, Candler R, Yama G, Partridge A, Lutz M, Kenny TW. Using MEMS to build the device and the package Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 331-334. DOI: 10.1109/SENSOR.2007.4300135 |
0.764 |
|
2007 |
Jha CM, Bahl G, Melamud R, Chandorkar SA, Hopcroft MA, Kim B, Agarwal M, Salvia J, Mehta H, Kenny TW. CMOS-compatible dual-resonator mems temperature sensor with milli-degree accuracy Transducers and Eurosensors '07 - 4th International Conference On Solid-State Sensors, Actuators and Microsystems. 229-232. DOI: 10.1109/SENSOR.2007.4300111 |
0.781 |
|
2007 |
Kim B, Melamud R, Hopcroft MA, Chandorkar SA, Bahl G, Messana M, Candler RN, Yama G, Kenny T. Si-SiO2 composite MEMS resonators in CMOS compatible wafer-scale thin-film encapsulation Proceedings of the Ieee International Frequency Control Symposium and Exposition. 1214-1219. DOI: 10.1109/FREQ.2007.4319270 |
0.796 |
|
2007 |
Agarwal M, Park KK, Candler RN, Kim B, Hopcroft MA, Chandorkar SA, Jha CM, Melamud R, Kenny TW, Murmann B. Nonlinear characterization of electrostatic MEMS resonators Proceedings of the Ieee International Frequency Control Symposium and Exposition. 209-212. DOI: 10.1109/FREQ.2006.275380 |
0.828 |
|
2007 |
Agarwal M, Mehta H, Candler RN, Chandorkar SA, Kim B, Hopcroft MA, Melamud R, Bahl G, Yama G, Kenny TW, Murmann B. Scaling of amplitude-frequency-dependence nonlinearities in electrostatically transduced microresonators Journal of Applied Physics. 102. DOI: 10.1063/1.2785018 |
0.809 |
|
2007 |
Jha CM, Bahl G, Melamud R, Chandorkar SA, Hopcroft MA, Kim B, Agarwal M, Salvia J, Mehta H, Kenny TW. High resolution microresonator-based digital temperature sensor Applied Physics Letters. 91. DOI: 10.1063/1.2768629 |
0.832 |
|
2007 |
Hopcroft MA, Kim B, Chandorkar S, Melamud R, Agarwal M, Jha CM, Bahl G, Salvia J, Mehta H, Lee HK, Candler RN, Kenny TW. Using the temperature dependence of resonator quality factor as a thermometer Applied Physics Letters. 91. DOI: 10.1063/1.2753758 |
0.836 |
|
2007 |
Melamud R, Kim B, Chandorkar SA, Hopcroft MA, Agarwal M, Jha CM, Kenny TW. Temperature-compensated high-stability silicon resonators Applied Physics Letters. 90. DOI: 10.1063/1.2748092 |
0.842 |
|
2007 |
Agarwal M, Park KK, Chandorkar SA, Candler RN, Kim B, Hopcroft MA, Melamud R, Kenny TW, Murmann B. Acceleration sensitivity in beam-type electrostatic microresonators Applied Physics Letters. 90. DOI: 10.1063/1.2426884 |
0.817 |
|
2007 |
Hill GC, Melamud R, Declercq FE, Davenport AA, Chan IH, Hartwell PG, Pruitt BL. SU-8 MEMS Fabry-Perot pressure sensor Sensors and Actuators, a: Physical. 138: 52-62. DOI: 10.1016/J.Sna.2007.04.047 |
0.673 |
|
2007 |
Melamud R, Kim B, Hopcroft MA, Chandorkar S, Agarwal M, Jha CM, Kenny TW. Composite flexural-mode resonator with controllable turnover temperature Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 199-202. |
0.819 |
|
2007 |
Agarwal M, Mehta H, Candler RN, Chandorkar SA, Kim B, Hopcroft MA, Melamud R, Bahl G, Yama G, Kenny TW, Murmann B. Impact of miniaturization on the current handling of electrostatic MEMS resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 783-786. |
0.825 |
|
2007 |
Chandorkar SA, Mehta H, Agarwal M, Hopcroft MA, Jha CM, Candler RN, Yama G, Bahl G, Kim B, Melamud R, Goodson KE, Kenny TW. Non-isothermal micromechanical resonators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 211-214. |
0.818 |
|
2006 |
Jha CM, Hopcroft MA, Agarwal M, Chandorkar SA, Candler RN, Subramanian V, Melamud R, Bhat S, Kim B, Park KK, Kenny TW. In-chip device-layer thermal isolation of MEMS resonator for lower power budget American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) Mems. DOI: 10.1115/IMECE2006-15176 |
0.823 |
|
2006 |
Candler RN, Hopcroft MA, Kim B, Park WT, Melamud R, Agarwal M, Yama G, Partridge A, Lutz M, Kenny TW. Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators Journal of Microelectromechanical Systems. 15: 1446-1456. DOI: 10.1109/Jmems.2006.883586 |
0.794 |
|
2006 |
Agarwal M, Chandorkar SA, Candler RN, Kim B, Hopcroft MA, Melamud R, Jha CM, Kenny TW, Murmann B. Optimal drive condition for nonlinearity reduction in electrostatic microresonators Applied Physics Letters. 89. DOI: 10.1063/1.2388886 |
0.803 |
|
2006 |
Agarwal M, Park KK, Hopcroft M, Chandorkar S, Candler RN, Kim B, Melamud R, Yama G, Murmann B, Kenny TW. Effects of mechanical vibrations and bias voltage noise on phase noise of MEMS resonator based oscillators Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 2006: 154-157. |
0.821 |
|
2005 |
Melamud R, Hopcroft M, Jha C, Kim B, Chandorkar S, Candler R, Kenny TW. Effects of stress on the temperature coefficient of frequency in double clamped resonators Digest of Technical Papers - International Conference On Solid State Sensors and Actuators and Microsystems, Transducers '05. 1: 392-395. DOI: 10.1109/SENSOR.2005.1496438 |
0.829 |
|
2005 |
Melamud R, Davenport AA, Hill GC, Chan IH, Dedercq F, Hartwell PG, Pruitt BL. Development of an SU-8 Fabry-Perot blood pressure sensor Proceedings of the Ieee International Conference On Micro Electro Mechanical Systems (Mems). 810-813. DOI: 10.1109/MEMSYS.2005.1454053 |
0.647 |
|
2005 |
Agarwal M, Park K, Candler R, Hopcroft M, Jha C, Melamud R, Kim B, Murmann B, Kenny TW. Non-linearity cancellation in MEMS resonators for improved power-handling Technical Digest - International Electron Devices Meeting, Iedm. 2005: 286-289. |
0.82 |
|
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