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Yunfei Deng, Ph.D. - Publications

Affiliations: 
2005 University of California, Berkeley, Berkeley, CA, United States 
Area:
Integrated Circuits (INC); Solid-State Devices
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5 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2004 Deng Y, Neureuther AR. Characterization of material contrast and effective wavelength effects in immersion inspection Journal of Vacuum Science & Technology B. 22: 1006-1011. DOI: 10.1116/1.1735820  0.435
2004 Mateus CFR, Huang MCY, Deng Y, Neureuther AR, Chang-Hasnain CJ. Ultrabroadband Mirror Using Low-Index Cladded Subwavelength Grating Ieee Photonics Technology Letters. 16: 518-520. DOI: 10.1109/Lpt.2003.821258  0.473
2003 Deng Y, Neureuther AR. Electromagnetic characterization of nanoimprint mold inspection Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 130-134. DOI: 10.1116/1.1531648  0.531
2002 Deng Y, Pistor T, Neureuther AR. Effects of multilayer mask roughness on extreme ultraviolet lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 344-349. DOI: 10.1116/1.1447252  0.557
2000 Pistor T, Deng Y, Neureuther A. Extreme ultraviolet mask defect simulation: Low-profile defects Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 2926-2929. DOI: 10.1116/1.1324616  0.556
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