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Runzi Chang, Ph.D. - Publications

Affiliations: 
2004 University of California, Berkeley, Berkeley, CA, United States 
Area:
Energy (ENE); Integrated Circuits (INC); Physical Electronics (PHY); Semiconductor manufacturing; Solid-State Devices
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2 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2005 Chang R, Spanos CJ. Dishing-radius model of copper CMP dishing effects Ieee Transactions On Semiconductor Manufacturing. 18: 297-303. DOI: 10.1109/Tsm.2005.845110  0.473
2004 Chang R, Cao Y, Spanos CJ. Modeling the electrical effects of metal dishing due to CMP for on-chip interconnect optimization Ieee Transactions On Electron Devices. 51: 1577-1583. DOI: 10.1109/Ted.2004.834898  0.472
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