Year |
Citation |
Score |
2020 |
Young MJ, Yanguas-Gil A, Letourneau S, Coile M, Mandia D, Bedford NM, Aoun B, Cavanagh AS, George SM, Elam JW. Probing the atomic-scale structure of amorphous aluminum oxide grown by atomic layer deposition. Acs Applied Materials & Interfaces. PMID 32309922 DOI: 10.1021/Acsami.0C01905 |
0.721 |
|
2020 |
Mahuli N, Cavanagh AS, George SM. Atomic layer deposition of aluminum oxyfluoride thin films with tunable stoichiometry Journal of Vacuum Science & Technology A. 38: 022407. DOI: 10.1116/1.5135014 |
0.675 |
|
2019 |
Lu W, Lee Y, Gertsch JC, Murdzek J, Cavanagh AS, Kong L, Del Alamo J, George SM. In situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multi-gate MOSFETs. Nano Letters. PMID 31251069 DOI: 10.1021/Acs.Nanolett.9B01525 |
0.545 |
|
2019 |
Sobell ZC, Cavanagh AS, George SM. Growth of cobalt films at room temperature using sequential exposures of cobalt tricarbonyl nitrosyl and low energy electrons Journal of Vacuum Science & Technology A. 37: 060906. DOI: 10.1116/1.5113711 |
0.603 |
|
2019 |
Clancey JW, Cavanagh AS, Smith JET, Sharma S, George SM. Volatile Etch Species Produced during Thermal Al2O3 Atomic Layer Etching The Journal of Physical Chemistry C. 124: 287-299. DOI: 10.1021/Acs.Jpcc.9B06104 |
0.501 |
|
2018 |
Sprenger JK, Sun H, Cavanagh AS, Roshko A, Blanchard PT, George SM. Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 °C. The Journal of Physical Chemistry. C, Nanomaterials and Interfaces. 122. PMID 33101567 DOI: 10.1021/Acs.Jpcc.8B00796 |
0.699 |
|
2018 |
Sprenger JK, Sun H, Cavanagh AS, George SM. Electron-enhanced atomic layer deposition of silicon thin films at room temperature Journal of Vacuum Science & Technology a: Vacuum, Surfaces, and Films. 36: 01A118. DOI: 10.1116/1.5006696 |
0.668 |
|
2018 |
Sprenger JK, Sun H, Cavanagh AS, Roshko A, Blanchard PT, George SM. Electron-Enhanced Atomic Layer Deposition of Boron Nitride Thin Films at Room Temperature and 100 °C The Journal of Physical Chemistry C. 122: 9455-9464. DOI: 10.1021/acs.jpcc.8b00796 |
0.48 |
|
2016 |
Sprenger JK, Cavanagh AS, Sun H, Wahl KJ, Roshko A, George SM. Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100 °C Using Sequential Surface Reactions. Chemistry of Materials : a Publication of the American Chemical Society. 28. PMID 31092972 DOI: 10.1021/Acs.Chemmater.6B00676 |
0.677 |
|
2016 |
Young MJ, Hare CD, Cavanagh AS, Musgrave CB, George SM. Rapid Growth of Crystalline Mn5O8 by Self-Limited Multilayer Deposition using Mn(EtCp)2 and O3. Acs Applied Materials & Interfaces. PMID 27351207 DOI: 10.1021/Acsami.6B04529 |
0.658 |
|
2016 |
Sprenger JK, Cavanagh AS, Sun H, Wahl KJ, Roshko A, George SM. Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100 °c Using Sequential Surface Reactions Chemistry of Materials. 28: 5282-5294. DOI: 10.1021/acs.chemmater.6b00676 |
0.637 |
|
2015 |
Xie M, Sun X, Zhou C, Cavanagh AS, Sun H, Hu T, Wang G, Lian J, George SM. Amorphous ultrathin TiO2 atomic layer deposition films on carbon nanotubes as anodes for lithium ion batteries Journal of the Electrochemical Society. 162: A974-A981. DOI: 10.1149/2.0501506Jes |
0.636 |
|
2015 |
Clancey JW, Cavanagh AS, Kukreja RS, Kongkanand A, George SM. Atomic layer deposition of ultrathin platinum films on tungsten atomic layer deposition adhesion layers: Application to high surface area substrates Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 33. DOI: 10.1116/1.4901459 |
0.668 |
|
2015 |
Lee Y, Dumont JW, Cavanagh AS, George SM. Atomic layer deposition of AlF3 using trimethylaluminum and hydrogen fluoride Journal of Physical Chemistry C. 119: 14185-14194. DOI: 10.1021/Acs.Jpcc.5B02625 |
0.695 |
|
2015 |
Wise AM, Ban C, Weker JN, Misra S, Cavanagh AS, Wu Z, Li Z, Whittingham MS, Xu K, George SM, Toney MF. Effect of Al2O3 Coating on Stabilizing LiNi0.4Mn0.4Co0.2O2 Cathodes Chemistry of Materials. 27: 6146-6154. DOI: 10.1021/Acs.Chemmater.5B02952 |
0.575 |
|
2014 |
Anderson VR, Cavanagh AS, Abdulagatov AI, Gibbs ZM, George SM. Waterless TiO2 atomic layer deposition using titanium tetrachloride and titanium tetraisopropoxide Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 32. DOI: 10.1116/1.4839015 |
0.781 |
|
2013 |
Cavanagh AS, Baker L, Clancey JW, Yin J, Kongkanand A, Wagner FT, George SM. In situ characterization of plasma-assisted Pt ALD on W ALD adhesion layers with spectroscopic ellipsometry Ecs Transactions. 58: 19-26. DOI: 10.1149/05810.0019ecst |
0.472 |
|
2013 |
Abdulagatov AI, Terauds KE, Travis JJ, Cavanagh AS, Raj R, George SM. Pyrolysis of titanicone molecular layer deposition films as precursors for conducting TiO2/carbon composite films Journal of Physical Chemistry C. 117: 17442-17450. DOI: 10.1021/Jp4051947 |
0.803 |
|
2013 |
Jung YS, Lu P, Cavanagh AS, Ban C, Kim GH, Lee SH, George SM, Harris SJ, Dillon AC. Unexpected improved performance of ALD coated LiCoO2/graphite li-ion batteries Advanced Energy Materials. 3: 213-219. DOI: 10.1002/Aenm.201200370 |
0.524 |
|
2012 |
Wang L, Travis JJ, Cavanagh AS, Liu X, Koenig SP, Huang PY, George SM, Bunch JS. Ultrathin oxide films by atomic layer deposition on graphene. Nano Letters. 12: 3706-10. PMID 22716769 DOI: 10.1021/Nl3014956 |
0.651 |
|
2012 |
Woo JH, Trevey JE, Cavanagh AS, Choi YS, Kim SC, George SM, Oh KH, Lee SH. Nanoscale interface Modification of LiCoO2 by Al 2O3 atomic layer deposition for solid-state Li batteries Journal of the Electrochemical Society. 159: A1120-A1124. DOI: 10.1149/2.085207Jes |
0.6 |
|
2012 |
Sun X, Xie M, Wang G, Sun H, Cavanagh AS, Travis JJ, George SM, Lian J. Atomic layer deposition of TiO 2 on graphene for supercapacitors Journal of the Electrochemical Society. 159. DOI: 10.1149/2.025204Jes |
0.534 |
|
2012 |
Baker L, Cavanagh AS, Yin J, George SM, Kongkanand A, Wagner FT. Growth of continuous and ultrathin platinum films on tungsten adhesion layers using atomic layer deposition techniques Applied Physics Letters. 101. DOI: 10.1063/1.4749819 |
0.706 |
|
2012 |
Abdulagatov AI, Hall RA, Sutherland JL, Lee BH, Cavanagh AS, George SM. Molecular layer deposition of titanicone films using TiCl 4 and ethylene glycol or glycerol: Growth and properties Chemistry of Materials. 24: 2854-2863. DOI: 10.1021/Cm300162V |
0.828 |
|
2012 |
Jung YS, Cavanagh AS, Gedvilas L, Widjonarko NE, Scott ID, Lee SH, Kim GH, George SM, Dillon AC. Improved functionality of lithium-ion batteries enabled by atomic layer deposition on the porous microstructure of polymer separators and coating electrodes Advanced Energy Materials. 2: 1022-1027. DOI: 10.1002/Aenm.201100750 |
0.591 |
|
2011 |
Abdulagatov AI, Yan Y, Cooper JR, Zhang Y, Gibbs ZM, Cavanagh AS, Yang RG, Lee YC, George SM. Al2O3 and TiO2 atomic layer deposition on copper for water corrosion resistance. Acs Applied Materials & Interfaces. 3: 4593-601. PMID 22032254 DOI: 10.1021/Am2009579 |
0.778 |
|
2011 |
Lee Y, Yoon B, Cavanagh AS, George SM. Molecular layer deposition of aluminum alkoxide polymer films using trimethylaluminum and glycidol. Langmuir : the Acs Journal of Surfaces and Colloids. 27: 15155-64. PMID 22029704 DOI: 10.1021/La202391H |
0.681 |
|
2011 |
Leung K, Qi Y, Zavadil KR, Jung YS, Dillon AC, Cavanagh AS, Lee SH, George SM. Using atomic layer deposition to hinder solvent decomposition in lithium ion batteries: first-principles modeling and experimental studies. Journal of the American Chemical Society. 133: 14741-54. PMID 21797223 DOI: 10.1021/Ja205119G |
0.564 |
|
2011 |
Scott ID, Jung YS, Cavanagh AS, Yan Y, Dillon AC, George SM, Lee SH. Ultrathin coatings on nano-LiCoO2 for Li-ion vehicular applications. Nano Letters. 11: 414-8. PMID 21166425 DOI: 10.1021/Nl1030198 |
0.541 |
|
2011 |
Seok Jung Y, Cavanagh AS, Yan Y, George SM, Manthiram A. Effects of atomic layer deposition of Al2O3 on the LiLi0.20Mn0.54Ni0.13Co0.13O 2 cathode for lithium-ion batteries Journal of the Electrochemical Society. 158. DOI: 10.1149/2.030112Jes |
0.627 |
|
2011 |
Riley LA, Cavanagh AS, George SM, Lee SH, Dillon AC. Improved mechanical integrity of ALD-coated composite electrodes for Li-Ion batteries Electrochemical and Solid-State Letters. 14: A29-A31. DOI: 10.1149/1.3529367 |
0.541 |
|
2011 |
Baker L, Cavanagh AS, Seghete D, George SM, MacKus AJM, Kessels WMM, Liu ZY, Wagner FT. Nucleation and growth of Pt atomic layer deposition on Al2O 3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma Journal of Applied Physics. 109. DOI: 10.1063/1.3555091 |
0.797 |
|
2011 |
Seghete D, Rayner GB, Cavanagh AS, Anderson VR, George SM. Molybdenum atomic layer deposition using MoF6 and Si 2H6 as the reactants Chemistry of Materials. 23: 1668-1678. DOI: 10.1021/Cm101673U |
0.806 |
|
2011 |
Dillon AC, Riley LA, Jung YS, Ban C, Molina D, Mahan AH, Cavanagh AS, George SM, Lee SH. HWCVD MoO3 nanoparticles and a-Si for next generation Li-ion anodes Thin Solid Films. 519: 4495-4497. DOI: 10.1016/J.Tsf.2011.01.337 |
0.55 |
|
2011 |
Zhang Y, Seghete D, Abdulagatov A, Gibbs Z, Cavanagh A, Yang R, George S, Lee Y. Investigation of the defect density in ultra-thin Al2O3 films grown using atomic layer deposition Surface and Coatings Technology. 205: 3334-3339. DOI: 10.1016/J.Surfcoat.2010.12.001 |
0.788 |
|
2011 |
Riley LA, Van Atta S, Cavanagh AS, Yan Y, George SM, Liu P, Dillon AC, Lee SH. Electrochemical effects of ALD surface modification on combustion synthesized LiNi1/3Mn1/3Co1/3O2 as a layered-cathode material Journal of Power Sources. 196: 3317-3324. DOI: 10.1016/J.Jpowsour.2010.11.124 |
0.606 |
|
2011 |
Kang E, Jung YS, Cavanagh AS, Kim GH, George SM, Dillon AC, Kim JK, Lee J. Fe3O4 nanoparticles confined in mesocellular carbon foam for high performance anode materials for lithium-ion batteries Advanced Functional Materials. 21: 2430-2438. DOI: 10.1002/Adfm.201002576 |
0.52 |
|
2011 |
Anderson VR, Leick N, Cavanagh AS, Hurst KE, Kocha S, Jones K, Dillon AC, George SM. Exploration of the surface reactions during platinum atomic layer ceposition for control of dispersion and size of Pt nanoparticles Acs National Meeting Book of Abstracts. |
0.302 |
|
2011 |
Baker L, Cavanagh AS, George SM, Kongkanand A, Wagner FT. Nucleation and growth of continuous and ultrathin Pt ALD films for improved oxygen reduction activity in fuel cells using W ALD adhesion layers Acs National Meeting Book of Abstracts. |
0.391 |
|
2010 |
Riley LA, Cavanagh AS, George SM, Jung YS, Yan Y, Lee SH, Dillon AC. Conformal surface coatings to enable high volume expansion Li-ion anode materials. Chemphyschem : a European Journal of Chemical Physics and Physical Chemistry. 11: 2124-30. PMID 20449864 DOI: 10.1002/Cphc.201000158 |
0.554 |
|
2010 |
Jung YS, Cavanagh AS, Riley LA, Kang SH, Dillon AC, Groner MD, George SM, Lee SH. Ultrathin direct atomic layer deposition on composite electrodes for highly durable and safe Li-ion batteries. Advanced Materials (Deerfield Beach, Fla.). 22: 2172-6. PMID 20376820 DOI: 10.1002/Adma.200903951 |
0.568 |
|
2010 |
Jung YS, Cavanagh AS, Dillon AC, Groner MD, George SM, Lee S. Enhanced Stability of LiCoO 2 Cathodes in Lithium-ion Batteries Using Surface Modification by Atomic Layer Deposition Journal of the Korean Ceramic Society. 47: 61-65. DOI: 10.4191/Kcers.2010.47.1.061 |
0.66 |
|
2010 |
Cavanagh AS, Lee Y, Yoon B, George SM. Atomic layer deposition of LiOH and Li2CO3 using lithium t-butoxide as the lithium source Ecs Transactions. 33: 223-229. DOI: 10.1149/1.3485259 |
0.542 |
|
2010 |
Jung YS, Cavanagh AS, Dillon AC, Groner MD, George SM, Lee SH. Enhanced stability of LiCoO2 cathodes in lithium-ion batteries using surface modification by atomic layer deposition Journal of the Electrochemical Society. 157. DOI: 10.1149/1.3258274 |
0.68 |
|
2010 |
Liang X, Lu X, Yu M, Cavanagh AS, Gin DL, Weimer AW. Modification of nanoporous supported lyotropic liquid crystal polymer membranes by atomic layer deposition Journal of Membrane Science. 349: 1-5. DOI: 10.1016/J.Memsci.2009.11.067 |
0.342 |
|
2009 |
Cavanagh AS, Wilson CA, Weimer AW, George SM. Atomic layer deposition on gram quantities of multi-walled carbon nanotubes. Nanotechnology. 20: 255602. PMID 19491468 DOI: 10.1088/0957-4484/20/25/255602 |
0.641 |
|
2009 |
Yoon B, Seghete D, Cavanagh AS, George SM. Molecular layer deposition of hybrid organic - Inorganic alucone polymer films using a three-step abc reaction sequence Chemistry of Materials. 21: 5365-5374. DOI: 10.1021/Cm9013267 |
0.837 |
|
2009 |
Scheffe JR, Francés A, King DM, Liang X, Branch BA, Cavanagh AS, George SM, Weimer AW. Atomic layer deposition of iron(III) oxide on zirconia nanoparticles in a fluidized bed reactor using ferrocene and oxygen Thin Solid Films. 517: 1874-1879. DOI: 10.1016/J.Tsf.2008.09.086 |
0.672 |
|
2009 |
Yoon B, O'Patchen JL, Seghete D, Cavanagh AS, George SM. Molecular layer deposition of hybrid organic-inorganic polymer films using diethylzinc and ethylene glycol Chemical Vapor Deposition. 15: 112-121. DOI: 10.1002/Cvde.200806756 |
0.827 |
|
2008 |
King DM, Du X, Cavanagh AS, Weimer AW. Quantum confinement in amorphous TiO(2) films studied via atomic layer deposition. Nanotechnology. 19: 445401. PMID 21832729 DOI: 10.1088/0957-4484/19/44/445401 |
0.753 |
|
2008 |
Dameron AA, Seghete D, Burton BB, Davidson SD, Cavanagh AS, Bertrand JA, George SM. Molecular layer deposition of alucone polymer films using trimethylaluminum and ethylene glycol Chemistry of Materials. 20: 3315-3326. DOI: 10.1021/Cm7032977 |
0.735 |
|
2008 |
Wilson CA, McCormick JA, Cavanagh AS, Goldstein DN, Weimer AW, George SM. Tungsten atomic layer deposition on polymers Thin Solid Films. 516: 6175-6185. DOI: 10.1016/J.Tsf.2007.11.086 |
0.778 |
|
2008 |
Cavanagh AS, Wilson CA, Weimer AW, George SM. Atomic layer deposition on quantities of multiwalled carbon nanotubes Materials Research Society Symposium Proceedings. 1054: 81-92. |
0.468 |
|
2007 |
Cavanagh AS, Wilson CA, Weimer AW, George SM. Atomic Layer Deposition on Quantities of Multiwalled Carbon Nanotubes Mrs Proceedings. 1054. DOI: 10.1557/Proc-1054-Ff03-10 |
0.546 |
|
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