Xin Lin, Ph.D. - Publications
Affiliations: | 2000 | Pennsylvania State University, State College, PA, United States |
Area:
Materials Science Engineering, Condensed Matter PhysicsYear | Citation | Score | |||
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2002 | Lin X, Fonash SJ. Low temperature silicon dioxide thin films deposited using tetramethylsilane for stress control and coverage applications Materials Research Society Symposium - Proceedings. 695: 371-376. DOI: 10.1557/Proc-695-L8.9.1 | 0.463 | |||
2001 | Lin X, Fonash SJ. Preparation and characterization of low temperature silicon dioxide thin films using tetramethylsilane (TMS) for microfabrication applications Materials Research Society Symposium Proceedings. 685: 341-346. DOI: 10.1557/Proc-685-D13.2.1 | 0.469 | |||
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