Xianmin Tang, Ph.D. - Publications

2000 College of William and Mary, Williamsburg, VA 
Fluid and Plasma Physics, Electronics and Electrical Engineering, Industrial Engineering

4 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2000 Tang X, Wang Q, Manos DM. Process damage assessment of a low energy inductively coupled plasma-based neutral source Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 1262-1267. DOI: 10.1116/1.591372  0.554
2000 Tang X, Manos DM. Optical emission studies and neutral stream characterization of a surface reflection materials processing source Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 18: 1359-1365. DOI: 10.1116/1.582354  0.546
1999 Tang X, Manos DM. Time-resolved electrostatic probe studies of a pulsed inductively-coupled plasma Plasma Sources Science and Technology. 8: 594-602. DOI: 10.1088/0963-0252/8/4/311  0.526
1999 Tang X, Nichols CA, Manos DM. Stripping and cleaning of photoresist using low energy neutrals Journal of Applied Physics. 86: 2419-2424. DOI: 10.1063/1.371070  0.548
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