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Geng Han, Ph.D. - Publications

Affiliations: 
2003 University of Wisconsin, Madison, Madison, WI 
Area:
Electronics and Electrical Engineering, Materials Science Engineering
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6 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2003 Han G, Khan M, Cerrina F. Stochastic modeling of high energy lithographies Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 21: 3166. DOI: 10.1116/1.1627798  0.59
2002 Han G, Khan M, Fang Y, Cerrina F. Comprehensive model of electron energy deposition Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 2666-2671. DOI: 10.1116/1.1526633  0.5
2001 Shin J, Han G, Ma Y, Moloni K, Cerrina F. Resist line edge roughness and aerial image contrast Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 19: 2890-2895. DOI: 10.1116/1.1418413  0.373
2001 Khan M, Han G, Tsvid G, Kitayama T, Maldonado J, Cerrina F. Can proximity x-ray lithography print 35 nm features? Yes Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 19: 2423-2427. DOI: 10.1116/1.1418407  0.62
2000 Han G, Cerrina F. Energy transfer between electrons and photoresist: Its relation to resolution Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 3297-3302. DOI: 10.1116/1.1318188  0.543
1999 Khan M, Han G, Bollepalli SB, Cerrina F, Maldonado J. Extension of x-ray lithography to 50 nm with a harder spectrum Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 17: 3426. DOI: 10.1116/1.591024  0.503
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