| Year |
Citation |
Score |
| 2023 |
Wisniewski HJ, Heilmann RK, Schattenburg ML, Chalifoux BD. Axial shift mapping: a self-referencing test for measuring the axial figure of near-cylindrical surfaces. Applied Optics. 62: 9307-9316. PMID 38108702 DOI: 10.1364/AO.504270 |
0.581 |
|
| 2020 |
Chalifoux BD, Heilmann RK, Marshall HL, Schattenburg ML. Optical design of diffraction-limited x-ray telescopes. Applied Optics. 59: 4901-4914. PMID 32543486 DOI: 10.1364/Ao.392479 |
0.736 |
|
| 2019 |
Chalifoux BD, Yao Y, Woller KB, Heilmann RK, Schattenburg ML. Compensating film stress in thin silicon substrates using ion implantation. Optics Express. 27: 11182-11195. PMID 31052966 DOI: 10.1364/Oe.27.011182 |
0.649 |
|
| 2019 |
Heilmann RK, Kolodziejczak J, Bruccoleri AR, Gaskin JA, Schattenburg ML. Demonstration of resolving power λ/Δλ > 10,000 for a space-based x-ray transmission grating spectrometer. Applied Optics. 58: 1223-1238. PMID 30873991 DOI: 10.1364/Ao.58.001223 |
0.729 |
|
| 2019 |
Yao Y, Chalifoux BD, Heilmann RK, Schattenburg ML. Thermal oxide patterning method for compensating coating stress in silicon substrates. Optics Express. 27: 1010-1024. PMID 30696174 DOI: 10.1364/Oe.27.001010 |
0.661 |
|
| 2019 |
Yao Y, Chalifoux BD, Heilmann RK, Chan K, Mori H, Okajima T, Zhang WW, Schattenburg ML. Progress of coating stress compensation of silicon mirrors for Lynx x-ray telescope mission concept using thermal oxide patterning method Journal of Astronomical Telescopes, Instruments, and Systems. 5: 1. DOI: 10.1117/1.Jatis.5.2.021011 |
0.668 |
|
| 2019 |
Chalifoux BD, Yao Y, Heilmann RK, Schattenburg ML. Simulations of film stress effects on mirror segments for the Lynx X-ray Observatory concept Journal of Astronomical Telescopes, Instruments, and Systems. 5: 1. DOI: 10.1117/1.Jatis.5.2.021004 |
0.673 |
|
| 2019 |
Song J, Heilmann RK, Bruccoleri AR, Schattenburg ML. Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction Journal of Vacuum Science & Technology B. 37: 062917. DOI: 10.1116/1.5119713 |
0.732 |
|
| 2018 |
Chalifoux BD, Heilmann RK, Schattenburg ML. Correcting flat mirrors with surface stress: analytical stress fields. Journal of the Optical Society of America. a, Optics, Image Science, and Vision. 35: 1705-1716. PMID 30462091 DOI: 10.1364/Josaa.35.001705 |
0.6 |
|
| 2016 |
Heilmann RK, Bruccoleri AR, Kolodziejczak J, Gaskin JA, O'Dell SL, Bhatia R, Schattenburg ML. Critical-angle x-ray transmission grating spectrometer with extended bandpass and resolving power > 10,000 Proceedings of Spie. 9905. DOI: 10.1117/12.2232955 |
0.756 |
|
| 2016 |
Champey P, Winebarger A, Kobayashi K, Savage S, Cirtain J, Cheimets P, Hertz E, Golub L, Ramsey B, McCracken J, Marquez V, Allured R, Heilmann RK, Schattenburg M, Bruccoleri A. On the Alignment and Focusing of the Marshall Grazing Incidence X-Ray Spectrometer (MaGIXS) Proceedings of Spie. 9905: 990573. DOI: 10.1117/12.2232820 |
0.753 |
|
| 2016 |
Chalifoux BD, Zuo HE, Wright G, Yao Y, Heilmann RK, Schattenburg ML. Gas bearing slumping and figure correction of x-ray telescope mirror substrates Proceedings of Spie. 9905: 990522. DOI: 10.1117/12.2232500 |
0.701 |
|
| 2016 |
Smith RK, Abraham MH, Allured R, Bautz MW, Bookbinder JA, Bregman J, Brenneman L, Brickhouse NS, Burrows DN, Burwitz V, Carvalho R, Cheimets PN, Costantini E, Dawson S, DeRoo CT, ... ... Schattenburg ML, et al. Arcus: the x-ray grating spectrometer explorer Proceedings of Spie. 9905: 1-7. DOI: 10.1117/12.2231778 |
0.711 |
|
| 2016 |
Brenneman LW, Smith RK, Bregman J, Kaastra J, Brickhouse N, Allured R, Foster A, Wolk S, Wilms J, Valencic L, Willingale R, Grant C, Bautz M, Heilmann R, Huenemoerder D, ... ... Schattenburg M, et al. The evolution of structure and feedback with Arcus Proceedings of Spie. 9905: 1-18. DOI: 10.1117/12.2231193 |
0.71 |
|
| 2016 |
Bruccoleri AR, Heilmann RK, Schattenburg ML. Fabrication process for 200 nm-pitch polished freestanding ultrahigh aspect ratio gratings Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 34: 06KD02. DOI: 10.1116/1.4966595 |
0.71 |
|
| 2016 |
Sung E, Chalifoux B, Fucetola J, Schattenburg ML, Heilmann RK. Non-contact position control via fluid shear force Precision Engineering. 45: 463-468. DOI: 10.1016/J.Precisioneng.2016.02.017 |
0.593 |
|
| 2015 |
Schattenburg ML, Chalifoux B, DeTienne MD, Heilmann RK, Zuo H. Progress report on air bearing slumping of thin glass mirrors for x-ray telescopes Proceedings of Spie - the International Society For Optical Engineering. 9603. DOI: 10.1117/12.2189970 |
0.685 |
|
| 2015 |
Chalifoux BD, Wright G, Heilmann RK, Schattenburg ML. Ion implantation for figure correction of thin X-ray telescope mirror substrates Proceedings of Spie. 9603. DOI: 10.1117/12.2189826 |
0.681 |
|
| 2015 |
Bruccoleri AR, Klingensmith M, Chalifoux B, Heilmann RK, Schattenburg ML. Liquid metal actuators: correctable mounting and assembly of thin-shell x-ray telescope mirrors Proceedings of Spie. 9603: 960312. DOI: 10.1117/12.2189499 |
0.648 |
|
| 2015 |
Heilmann RK, Bruccoleri AR, Schattenburg ML. High-efficiency blazed transmission gratings for high-resolution soft x-ray spectroscopy Proceedings of Spie. 9603: 960314. DOI: 10.1117/12.2188525 |
0.744 |
|
| 2014 |
O'Dell SL, Aldcroft TL, Allured R, Atkins C, Burrows DN, Cao J, Chalifoux BD, Chan KW, Cotroneo V, Elsner RF, Graham ME, Gubarev MV, Heilmann RK, Johnson-Wilke RL, Kilaru K, ... ... Schattenburg ML, et al. Toward large-area sub-arcsecond X-ray telescopes Proceedings of Spie - the International Society For Optical Engineering. 9208. DOI: 10.1117/12.2061882 |
0.718 |
|
| 2014 |
Heilmann RK, Bruccoleri AR, Guan D, Schattenburg ML. Fabrication of large-area and low mass critical-angle x-ray transmission gratings Proceedings of Spie. 9144. DOI: 10.1117/12.2056829 |
0.747 |
|
| 2014 |
Chalifoux B, Heilmann RK, Schattenburg ML. Shaping of thin glass X-ray telescope mirrors using air bearing slumping and ion implantation Proceedings of Spie. 9144. DOI: 10.1117/12.2056512 |
0.655 |
|
| 2013 |
Sung E, Chalifoux B, Schattenburg ML, Heilmann RK. Non-touch thermal air-bearing shaping of x-ray telescope optics Proceedings of Spie - the International Society For Optical Engineering. 8861. DOI: 10.1117/12.2026100 |
0.625 |
|
| 2013 |
Heilmann RK, Bruccoleri AR, Guan D, Schattenburg ML. Development of lightweight blazed transmission gratings and large-area soft x-ray spectrographs Proceedings of Spie. 8861: 886118. DOI: 10.1117/12.2024426 |
0.745 |
|
| 2013 |
Bruccoleri AR, Guan D, Heilmann RK, Vargo S, DiPiazza F, Schattenburg ML. Nanofabrication advances for high efficiency critical-angle transmission gratings Proceedings of Spie. 8861: 886119. DOI: 10.1117/12.2024357 |
0.733 |
|
| 2013 |
Chalifoux B, Sung E, Heilmann RK, Schattenburg ML. High-precision figure correction of x-ray telescope optics using ion implantation Proceedings of Spie - the International Society For Optical Engineering. 8861. DOI: 10.1117/12.2023535 |
0.667 |
|
| 2013 |
Bruccoleri A, Guan D, Mukherjee P, Heilmann RK, Schattenburg ML, Vargo S. Potassium hydroxide polishing of nanoscale deep reactive-ion etched ultrahigh aspect ratio gratings Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 31. DOI: 10.1116/1.4820901 |
0.723 |
|
| 2013 |
Guan D, Bruccoleri AR, Heilmann RK, Schattenburg ML. Stress control of plasma enhanced chemical vapor deposited silicon oxide film from tetraethoxysilane Journal of Micromechanics and Microengineering. 24: 027001. DOI: 10.1088/0960-1317/24/2/027001 |
0.592 |
|
| 2012 |
Anderson EH, Levine AM, Schattenburg ML. Transmission x-ray diffraction grating alignment using a photoelastic modulator. Applied Optics. 27: 3522-5. PMID 20539409 DOI: 10.1364/Ao.27.003522 |
0.495 |
|
| 2012 |
Davis JE, Bautza MW, Dewey D, Heilmann RK, Houck JC, Huenemoerder DP, Marshall HL, Nowak MA, Schattenburg ML, Schulz NS, Smith R. Raytracing with MARX - X-ray observatory design, calibration, and support Proceedings of Spie - the International Society For Optical Engineering. 8443. DOI: 10.1117/12.926937 |
0.715 |
|
| 2012 |
Heilmann RK, Bruccoleri AR, Mukherjee P, Schattenburg ML. Progress in the development of critical-angle transmission gratings Proceedings of Spie. 8443. DOI: 10.1117/12.926827 |
0.742 |
|
| 2012 |
Bautz MW, Cash WC, Davis JE, Heilmann RK, Huenemoerder DP, Schattenburg ML, McEntaffer R, Smith R, Wolk SJ, Zhang WW, Jordan SP, Lillie CF. Concepts for high-performance soft X-ray grating spectroscopy in a moderate-scale mission Proceedings of Spie - the International Society For Optical Engineering. 8443. DOI: 10.1117/12.926810 |
0.714 |
|
| 2012 |
Bruccoleri A, Mukherjee P, Heilmann RK, Yam J, Schattenburg ML, DiPiazza F. Fabrication of nanoscale, high throughput, high aspect ratio freestanding gratings Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 30. DOI: 10.1116/1.4755815 |
0.726 |
|
| 2011 |
Heilmann RK, Ahn M, Bruccoleri A, Chang CH, Gullikson EM, Mukherjee P, Schattenburg ML. Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands. Applied Optics. 50: 1364-73. PMID 21460902 DOI: 10.1364/Ao.50.001364 |
0.734 |
|
| 2011 |
Husseini AMA, Heilmann RK, Schattenburg ML. Fabrication update on non-contact mirror slumping technology for the International X-ray Observatory mirrors Proceedings of Spie. 8147. DOI: 10.1117/12.895413 |
0.678 |
|
| 2011 |
Heilmann RK, Bruccoleri A, Mukherjee P, Yam J, Schattenburg ML. Fabrication update on critical-angle transmission gratings for soft x-ray grating spectrometers Proceedings of Spie. 8147. DOI: 10.1117/12.895389 |
0.752 |
|
| 2011 |
McEntaffer RL, Cash W, Lillie C, Casement S, Zhang W, Holland A, Murray N, O'Dell S, Schattenburg M, Heilmann R, Tsunemi H. Development of off-plane gratings for WHIMex and IXO Proceedings of Spie - the International Society For Optical Engineering. 8147. DOI: 10.1117/12.895037 |
0.732 |
|
| 2011 |
Cash W, McEntaffer R, Zhang W, Casement S, Lillie C, Schattenburg M, Bautz M, Holland A, Tsunemi H, O'Dell S. X-ray optics for WHIMex: the Warm Hot Intergalactic Medium Explorer Proceedings of Spie. 8147. DOI: 10.1117/12.895014 |
0.488 |
|
| 2010 |
Voronov DL, Ahn M, Anderson EH, Cambie R, Chang CH, Gullikson EM, Heilmann RK, Salmassi F, Schattenburg ML, Warwick T, Yashchuk VV, Zipp L, Padmore HA. High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths. Optics Letters. 35: 2615-7. PMID 20680076 DOI: 10.1364/Ol.35.002615 |
0.735 |
|
| 2010 |
Voronov DL, Ahn M, Anderson EH, Cambie R, Chang C, Goray LI, Gullikson EM, Heilmann RK, Salmassi F, Schattenburg ML, Warwick T, Yashchuk VV, Padmore HA. High-efficiency multilayer blazed gratings for EUV and soft x-rays: recent developments Proceedings of Spie. 7802: 780207. DOI: 10.1117/12.861287 |
0.731 |
|
| 2010 |
Heilmann RK, Davis JE, Dewey D, Bautz MW, Foster R, Bruccoleri A, Mukherjee P, Robinson D, Huenemoerder DP, Marshall HL, Schattenburg ML, Schulz NS, Guo LJ, Kaplan AF, Schweikart RB. Critical-angle transmission grating spectrometer for high-resolution soft x-ray spectroscopy on the International X-ray Observatory Proceedings of Spie - the International Society For Optical Engineering. 7732. DOI: 10.1117/12.856482 |
0.748 |
|
| 2010 |
Mukherjee P, Bruccoleri A, Heilmann RK, Schattenburg ML, Kaplan AF, Guo LJ. Plasma etch fabrication of 60:1 aspect ratio silicon nanogratings with 200 nm pitch Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28: C6P70-C6P75. DOI: 10.1116/1.3507427 |
0.697 |
|
| 2010 |
Zhao Y, Trumper DL, Heilmann RK, Schattenburg ML. Optimization and temperature mapping of an ultra-high thermal stability environmental enclosure Precision Engineering. 34: 164-170. DOI: 10.1016/J.Precisioneng.2009.05.006 |
0.597 |
|
| 2009 |
Voronov DL, Anderson EH, Cambie R, Salmassi F, Gullikson EM, Yashchuk VV, Padmore HA, Ahn M, Chang C, Heilmann RK, Schattenburg ML. 5000 Groove/mm multilayer-coated blazed grating with 33% efficiency in the 3rd order in the EUV wavelength range Proceedings of Spie. 7448. DOI: 10.1117/12.826921 |
0.726 |
|
| 2009 |
Heilmann RK, Ahn M, Bautz MW, Foster R, Huenemoerder DP, Marshall HL, Mukherjee P, Schattenburg ML, Schulz NS, Smith M. Development of a critical-angle transmission grating spectrometer for the International X-Ray Observatory Proceedings of Spie. 7437. DOI: 10.1117/12.825394 |
0.746 |
|
| 2008 |
Chang CH, Zhao Y, Heilmann RK, Schattenburg ML. Fabrication of 50 nm period gratings with multilevel interference lithography. Optics Letters. 33: 1572-4. PMID 18628801 DOI: 10.1364/Ol.33.001572 |
0.667 |
|
| 2008 |
Heilmann RK, Ahn M, Gullikson EM, Schattenburg ML. Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors. Optics Express. 16: 8658-69. PMID 18545579 DOI: 10.1364/Oe.16.008658 |
0.734 |
|
| 2008 |
Chang CH, Heilmann RK, Schattenburg ML, Glenn P. Design of a double-pass shear mode acousto-optic modulator. The Review of Scientific Instruments. 79: 033104. PMID 18376994 DOI: 10.1063/1.2894210 |
0.65 |
|
| 2008 |
Heilmann RK, Ahn M, Schattenburg ML. Fabrication and performance of blazed transmission gratings for x-ray astronomy Proceedings of Spie. 7011: 701106. DOI: 10.1117/12.789176 |
0.75 |
|
| 2008 |
Chang C, Zhao Y, Heilmann RK, Schattenburg ML. Spatial-frequency multiplication with multilevel interference lithography Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 26: 2135-2138. DOI: 10.1116/1.2976604 |
0.671 |
|
| 2008 |
Ahn M, Heilmann RK, Schattenburg ML. Fabrication of 200nm period blazed transmission gratings on silicon-on-insulator wafers Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 26: 2179-2182. DOI: 10.1116/1.2968613 |
0.673 |
|
| 2007 |
Flanagan K, Ahn M, Davis J, Heilmann R, Huenemoerder D, Levine A, Marshall H, Prigozhin G, Rasmussen A, Ricker G, Schattenburg M, Schulz N, Zhao Y. Spectrometer concept and design for X-ray astronomy using a blazed transmission grating Proceedings of Spie. 6688. DOI: 10.1117/12.739941 |
0.724 |
|
| 2007 |
Zhao Y, Chang C, Heilmann RK, Schattenburg ML. Phase control in multiexposure spatial frequency multiplication Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 25: 2439. DOI: 10.1116/1.2794318 |
0.632 |
|
| 2007 |
Ahn M, Heilmann RK, Schattenburg ML. Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 25: 2593. DOI: 10.1116/1.2779048 |
0.754 |
|
| 2007 |
Akilian M, Forest CR, Slocum AH, Trumper DL, Schattenburg ML. Thin optic constraint Precision Engineering. 31: 130-138. DOI: 10.1016/J.Precisioneng.2006.04.002 |
0.429 |
|
| 2006 |
Seely JF, Goray LI, Kjornrattanawanich B, Laming JM, Holland GE, Flanagan KA, Heilmann RK, Chang CH, Schattenburg ML, Rasmussen AP. Efficiency of a grazing-incidence off-plane grating in the soft-x-ray region. Applied Optics. 45: 1680-7. PMID 16572682 DOI: 10.1364/Ao.45.001680 |
0.674 |
|
| 2006 |
Kowalski MP, Heilmann RK, Schattenburg ML, Chang CH, Berendse FB, Hunter WR. Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating. Applied Optics. 45: 1676-9. PMID 16572681 DOI: 10.1364/Ao.45.001676 |
0.684 |
|
| 2006 |
Cottam J, Cash W, Flanagan KA, Heilmann RK, Prigozhin GY, Rasmussen AP, Ricker GR, Schattenburg ML, Schindhelm E. The Constellation-X reflection grating spectrometer Proceedings of Spie - the International Society For Optical Engineering. 6266. DOI: 10.1117/12.672227 |
0.721 |
|
| 2006 |
Akilian M, Heilmann RK, Schattenburg ML. Assembly of thin gratings for soft x-ray telescopes Proceedings of Spie. 6266. DOI: 10.1117/12.672037 |
0.704 |
|
| 2006 |
Forest CR, Spenko M, Sun Y, Slocum AH, Heilmann RK, Schattenburg ML. Repeatable and accurate assembly of X-ray foil optics Precision Engineering-Journal of the International Societies For Precision Engineering and Nanotechnology. 30: 63-70. DOI: 10.1016/J.Precisioneng.2005.05.003 |
0.705 |
|
| 2005 |
Heilmann RK, Akilian M, Chang CH, Hallock R, Cleaveland E, Schattenburg ML. Shaping of thin grazing-incidence reflection grating substrates via magnetorheological finishing Proceedings of Spie - the International Society For Optical Engineering. 5900: 1-7. DOI: 10.1117/12.617788 |
0.738 |
|
| 2005 |
Seely JF, Goray LI, Kjornrattanawanich B, Laming JM, Holland GE, Flanagan KA, Heilmann RK, Chang CH, Schattenburg ML, Rasmussen AP. Off-plane grazing incidence constellation-X grating calibrations using polarized synchrotron radiation and PCGRATE code calculations Proceedings of Spie - the International Society For Optical Engineering. 5900: 1-8. DOI: 10.1117/12.615943 |
0.681 |
|
| 2005 |
Montoya JC, Chang C, Heilmann RK, Schattenburg ML. Doppler writing and linewidth control for scanning beam interference lithography Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 23: 2640. DOI: 10.1116/1.2127938 |
0.66 |
|
| 2005 |
Canizares CR, Davis JE, Dewey D, Flanagan KA, Galton EB, Huenemoerder DP, Ishibashi K, Markert TH, Marshall HL, Mcguirk M, Schattenburg ML, Schulz NS, Smith HI, Wise M. The Chandra high-energy transmission grating: Design, fabrication, ground calibration, and 5 years in flight Publications of the Astronomical Society of the Pacific. 117: 1144-1171. DOI: 10.1086/432898 |
0.378 |
|
| 2004 |
Heilmann RK, Akilian M, Chang C, Forest CR, Joo C, Lapsa A, Montoya JC, Schattenburg ML. Thin-foil reflection gratings for Constellation-X Proceedings of Spie. 5488: 283-290. DOI: 10.1117/12.552001 |
0.744 |
|
| 2004 |
Flanagan KA, Davis JE, Heilmann RK, Levine AM, McGuirk M, Ricker GR, Schattenburg ML, Wise M, Rasmussen A, Bookbinder J, Freeman M, Gaetz T, Jerius D, Nguyen D, Podgorski W, et al. The constellation-X RGS options: Raytrace modeling of the off-plane gratings Proceedings of Spie - the International Society For Optical Engineering. 5488: 515-529. DOI: 10.1117/12.551766 |
0.715 |
|
| 2004 |
Forest CR, Canizares CR, Neal DR, McGuirk M, Schattenburg ML. Metrology of thin transparent optics using Shack-Hartmann wavefront sensing Optical Engineering. 43: 742-753. DOI: 10.1117/1.1645256 |
0.46 |
|
| 2004 |
Chang CH, Montoya JC, Akilian M, Lapsa A, Heilmann RK, Schattenburg ML, Li M, Flanagan KA, Rasmussen AP, Seely JF, Laming JM, Kjornrattanawanich B, Goray LI. High fidelity blazed grating replication using nanoimprint lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22: 3260-3264. DOI: 10.1116/1.1809614 |
0.746 |
|
| 2004 |
Heilmann RK, Chen CG, Konkola PT, Schattenburg ML. Dimensional metrology for nanometre-scale science and engineering: Towards sub-nanometre accurate encoders Nanotechnology. 15. DOI: 10.1088/0957-4484/15/10/002 |
0.614 |
|
| 2004 |
Flanagan KA, Canizares CR, Dewey D, Houck JC, Fredericks AC, Schattenburg ML, Markert TH, Davis DS. Chandra high-resolution X-ray spectrum of supernova remnant 1E 0102.2-7219 Astrophysical Journal. 605: 230-246. DOI: 10.1086/382145 |
0.39 |
|
| 2004 |
Rasmussen A, Aquila A, Bookbinder J, Chang C, Gullikson E, Heilmann R, Kahn SM, Paerels F, Schattenburg M. Grating arrays for high-throughput soft X-ray spectrometers Proceedings of Spie - the International Society For Optical Engineering. 5168: 248-259. |
0.711 |
|
| 2003 |
Hair JH, Stewart JW, Petre R, Zhang WW, Saha TT, Podgorski WA, Glenn PE, Schattenburg ML, Heilmann RK, Sun Y, Nanan G. Constellation-X spectroscopy x-ray telescope segmented optic assembly and alignment implementation Astronomical Telescopes and Instrumentation. 4851: 696-707. DOI: 10.1117/12.461468 |
0.688 |
|
| 2003 |
Podgorski WA, Glenn PE, Hair JH, Petre R, Saha TT, Schattenburg ML, Stewart J, Zhang WW. Constellation-X Spectroscopy X-ray Telescope Assembly and Alignment Astronomical Telescopes and Instrumentation. 4851: 491-502. DOI: 10.1117/12.461328 |
0.5 |
|
| 2003 |
Chang CH, Heilmann RK, Fleming RC, Carter J, Murphy E, Schattenburg ML, Bailey TC, Ekerdt JG, Frankel RD, Voisin R. Fabrication of sawtooth diffraction gratings using nanoimprint lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21: 2755-2759. DOI: 10.1116/1.1627814 |
0.676 |
|
| 2003 |
Sun Y, Heilmann RK, Chen CG, Forest CR, Schattenburg ML. Precision microcomb design and fabrication for x-ray optics assembly Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 21: 2970. DOI: 10.1116/1.1621668 |
0.713 |
|
| 2003 |
Konkola PT, Chen CG, Heilmann RK, Joo C, Montoya JC, Chang C, Schattenburg ML. Nanometer-level repeatable metrology using the Nanoruler Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 21: 3097. DOI: 10.1116/1.1610003 |
0.653 |
|
| 2003 |
Hartley JG, Groves TR, Smith HI, Mondol MK, Goodberlet JG, Schattenburg ML, Ferrera J, Bernshteyn A. Spatial-phase locking with shaped-beam lithography Review of Scientific Instruments. 74: 1377-1379. DOI: 10.1063/1.1535740 |
0.374 |
|
| 2002 |
Chen CG, Konkola PT, Ferrera J, Heilmann RK, Schattenburg ML. Analyses of vector Gaussian beam propagation and the validity of paraxial and spherical approximations. Journal of the Optical Society of America. a, Optics, Image Science, and Vision. 19: 404-12. PMID 11822605 DOI: 10.1364/Josaa.19.000404 |
0.615 |
|
| 2002 |
Chen CG, Konkola PT, Heilmann RK, Joo C, Schattenburg ML. Nanometer-accurate grating fabrication with scanning beam interference lithography Proceedings of Spie - the International Society For Optical Engineering. 4936: 126-134. DOI: 10.1117/12.469431 |
0.644 |
|
| 2002 |
Flanagan KA, Canizares CR, Dewey D, Fredericks A, Houck JC, Lee JC, Marshall HL, Schattenburg ML. Probing the cosmic X-ray laboratory with the Chandra HETGS Proceedings of Spie - the International Society For Optical Engineering. 4851: 45-56. DOI: 10.1117/12.461738 |
0.437 |
|
| 2002 |
Forest CR, Schattenburg ML, Chen CG, Heilmann RK, Konkola PT, Przbylowski J, Sun Y, You J, Kahn SM, Golini D. Precision shaping, assembly and metrology of foil optics for X-ray reflection gratings Proceedings of Spie - the International Society For Optical Engineering. 4851: 538-548. DOI: 10.1117/12.461477 |
0.754 |
|
| 2002 |
Petre R, Zhang WW, Content DA, Saha TT, Stewart J, Hair JH, Nguyen D, Podgorski WA, Davis WR, Freeman MD, Cohen LM, Schattenburg ML, Heilmann RK, Sun Y, Forest C. Constellation-X spectroscopy X-ray telescope (SXT) Proceedings of Spie - the International Society For Optical Engineering. 4851: 433-440. DOI: 10.1117/12.461317 |
0.716 |
|
| 2002 |
Heilmann RK, Monnelly GP, Mongrard O, Butler N, Chen CG, Cohen LM, Cook CC, Goldman LM, Konkola PT, McGuirk M, Ricker GR, Schattenburg ML. Novel methods for shaping thin-foil optics for x-ray astronomy Proceedings of Spie - the International Society For Optical Engineering. 4496: 62-72. DOI: 10.1117/12.454373 |
0.709 |
|
| 2002 |
Schattenburg ML, Chen CG, Heilmann RK, Konkola PT, Pati GS. Progress towards a general grating patterning technology using phase-locked scanning beams Proceedings of Spie - the International Society For Optical Engineering. 4485: 378-384. DOI: 10.1117/12.454273 |
0.653 |
|
| 2002 |
Chen CG, Heilmann RK, Joo C, Konkola PT, Pati GS, Schattenburg ML. Beam alignment for scanning beam interference lithography Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 20: 3071. DOI: 10.1116/1.1523402 |
0.655 |
|
| 2002 |
Joo C, Pati GS, Chen CG, Konkola PT, Heilmann RK, Schattenburg ML, Liddle A, Anderson EH. Precision fringe metrology using a Fresnel zone plate Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 20: 3075. DOI: 10.1116/1.1523018 |
0.676 |
|
| 2002 |
Pati GS, Heilmann RK, Konkola PT, Joo C, Chen CG, Murphy E, Schattenburg ML. Generalized scanning beam interference lithography system for patterning gratings with variable period progressions Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 20: 2617. DOI: 10.1116/1.1520563 |
0.646 |
|
| 2001 |
Schattenburg ML. From nanometers to gigaparsecs: The role of nanostructures in unraveling the mysteries of the cosmos Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 19: 2319. DOI: 10.1116/1.1418410 |
0.486 |
|
| 2001 |
Heilmann RK, Konkola PT, Chen CG, Pati GS, Schattenburg ML. Digital heterodyne interference fringe control system Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 19: 2342. DOI: 10.1116/1.1410096 |
0.635 |
|
| 2001 |
Chen CG, Konkola PT, Heilmann RK, Pati GS, Schattenburg ML. Image metrology and system controls for scanning beam interference lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 19: 2335-2341. DOI: 10.1116/1.1409379 |
0.627 |
|
| 2000 |
Petre R, Chen CG, Cohen LM, Harms RJ, Monnelly GP, Saha TT, Schattenburg ML, Serlemitsos PJ, Zhang WW. Development of segmented x-ray mirrors for Constellation-X Astronomical Telescopes and Instrumentation. 4012: 370-378. DOI: 10.1117/12.391572 |
0.502 |
|
| 2000 |
Konkola PT, Chen CG, Heilmann RK, Schattenburg ML. Beam steering system and spatial filtering applied to interference lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 3282-3286. DOI: 10.1116/1.1314385 |
0.658 |
|
| 2000 |
Chen CG, Heilmann RK, Konkola PT, Mongrard O, Monnelly GP, Schattenburg ML. Microcomb design and fabrication for high accuracy optical assembly Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 18: 3272. DOI: 10.1116/1.1313585 |
0.72 |
|
| 2000 |
Heilmann RK, Konkola PT, Chen CG, Schattenburg ML. Relativistic corrections in displacement measuring interferometry Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 18: 3277-3281. DOI: 10.1116/1.1313584 |
0.588 |
|
| 2000 |
Canizares CR, Huenemoerder DP, Davis DS, Dewey D, Flanagan KA, Houck J, Markert TH, Marshall HL, Schattenburg ML, Schulz NS, Wise M, Drake JJ, Brickhouse NS. High-Resolution X-Ray Spectra of Capella: Initial Results from the [ITAL]Chandra[/ITAL] High-Energy Transmission Grating Spectrometer The Astrophysical Journal. 539: L41-L44. DOI: 10.1086/312823 |
0.358 |
|
| 1999 |
Schattenburg ML, Chen C, Everett PN, Ferrera J, Konkola P, Smith HI. Sub-100 nm metrology using interferometrically produced fiducials Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 17: 2692. DOI: 10.1116/1.591047 |
0.386 |
|
| 1999 |
Ross CA, Smith HI, Savas T, Schattenburg M, Farhoud M, Hwang M, Walsh M, Abraham MC, Ram RJ. Fabrication of patterned media for high density magnetic storage Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 17: 3168. DOI: 10.1016/S0167-9317(00)00267-7 |
0.305 |
|
| 1999 |
Kahn SM, Paerels FB, Peterson JR, Rasmussen AP, Schattenburg ML, Ricker GR, Bautz MW, Doty JP, Prigozhin GY, Nousek JA, Burrows DN, Hill JE, Cash WC. Large-area reflection grating spectrometer for the Constellation-X mission Proceedings of Spie - the International Society For Optical Engineering. 3765: 94-103. |
0.425 |
|
| 1998 |
Balkey MM, Scime EE, Schattenburg ML, van Beek J. Effects of Gap Width on Vacuum-Ultraviolet Transmission Through Submicrometer-Period, FreeStanding Transmission Gratings. Applied Optics. 37: 5087-92. PMID 18285979 DOI: 10.1364/Ao.37.005087 |
0.362 |
|
| 1998 |
Farhoud M, Hwang M, Smith H, Schattenburg M, Bae J, Youcef-Toumi K, Ross C. Fabrication of large area nanostructured magnets by interferometric lithography Ieee Transactions On Magnetics. 34: 1087-1089. DOI: 10.1109/20.706365 |
0.313 |
|
| 1997 |
Franke AE, Schattenburg ML, Gullikson EM, Cottam J, Kahn SM, Rasmussen A. Super-smooth x-ray reflection grating fabrication Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 15: 2940-2945. DOI: 10.1116/1.589759 |
0.579 |
|
| 1997 |
Goodberlet J, Silverman S, Ferrera J, Mondol M, Schattenburg M, Smith HI. A one-dimensional demonstration of spatial-phase-locked electron-beam lithography Microelectronic Engineering. 35: 473-476. DOI: 10.1016/S0167-9317(96)00188-8 |
0.34 |
|
| 1996 |
Smith HI, Schattenburg M, Hector S, Ferrera J, Moon E, Yang I, Burkhardt M. X-ray nanolithography: Extension to the limits of the lithographic process Microelectronic Engineering. 32: 143-158. DOI: 10.1016/0167-9317(95)00183-2 |
0.529 |
|
| 1995 |
Scime EE, Anderson EH, McComas DJ, Schattenburg ML. Extreme-ultraviolet polarization and filtering with gold transmission gratings. Applied Optics. 34: 648-54. PMID 20963164 DOI: 10.1364/Ao.34.000648 |
0.387 |
|
| 1995 |
Schattenburg ML. Optically matched trilevel resist process for nanostructure fabrication Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 13: 3007. DOI: 10.1116/1.588296 |
0.349 |
|
| 1994 |
Schattenburg ML, Fuentes RI, Czernienko G, Fleming RC, Porter J. Maskless Single-Sided Wet Etching Process for the Fabrication of Ultra-Low Distortion Polyimide Membranes Mrs Proceedings. 356. DOI: 10.1557/Proc-356-615 |
0.335 |
|
| 1994 |
Hector SD, Smith HI, Gupta N, Schattenburg M. Optimizing synchroton-based x-ray lithography for 0.1 μm lithography Microelectronic Engineering. 23: 203-206. DOI: 10.1016/0167-9317(94)90137-6 |
0.45 |
|
| 1993 |
Schattenburg ML, Carter J, Chu W, Fleming RC, Ghanbari RA, Mondol M, Polce N, Smith HI. Mask Technology For X-Ray Nanolithography Mrs Proceedings. 306. DOI: 10.1557/Proc-306-63 |
0.541 |
|
| 1993 |
Smith HI, Schattenburg ML. X-ray lithography from 500 to 30 nm: X-ray nanolithography Ibm Journal of Research and Development. 37: 319-329. DOI: 10.1147/Rd.373.0319 |
0.518 |
|
| 1993 |
Schattenburg ML. Fabrication of flip-bonded mesa masks for x-ray lithography Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 11: 2906. DOI: 10.1116/1.586559 |
0.381 |
|
| 1992 |
Yen A, Anderson EH, Ghanbari RA, Schattenburg ML, Smith HI. Achromatic holographic configuration for 100-nm-period lithography. Applied Optics. 31: 4540-5. PMID 20725456 DOI: 10.1364/Ao.31.004540 |
0.445 |
|
| 1992 |
Yen A, Schattenburg ML, Smith HI. Proposed method for fabricating 50-nm-period gratings by achromatic holographic lithography. Applied Optics. 31: 2972-3. PMID 20725235 DOI: 10.1364/Ao.31.002972 |
0.366 |
|
| 1992 |
Lum KSK, Canizares CR, Clark GW, Coyne JM, Markert TH, Saez PJ, Schattenburg ML, Winkler PF. The spectral archive of cosmic X-ray sources observed by the Einstein Observatory Focal Plane Crystal Spectrometer Astrophysical Journal, Supplement Series. 78: 423-503. DOI: 10.1086/191635 |
0.456 |
|
| 1992 |
Chu W, Schattenburg M, Smith HI. Low-stress gold electroplating for x-ray masks Microelectronic Engineering. 17: 223-226. DOI: 10.1016/0167-9317(92)90046-T |
0.35 |
|
| 1992 |
Early K, Schattenburg M, Olster D, Shepard M, Smith HI. Diffraction in proximity x-ray lithography: Comparing theory and experiment for gratings, lines, and spaces Microelectronic Engineering. 17: 149-152. DOI: 10.1016/0167-9317(92)90030-U |
0.43 |
|
| 1991 |
Schattenburg ML. Transmission grating spectroscopy and the Advanced X-Ray Astrophysics Facility Optical Engineering. 30: 1590. DOI: 10.1117/12.55976 |
0.519 |
|
| 1991 |
Markert TH, Bauer JM, Canizares CR, Isobe T, Nenonen SAA, O'Connor J, Schattenburg ML, Flanagan KA, Zombeck MV. Proportional counter windows for the Bragg crystal spectrometer on AXAF Proceedings of Spie. 1549: 408-419. DOI: 10.1117/12.48357 |
0.419 |
|
| 1991 |
Flanagan KA, Austin GK, Cobuzzi JC, Goddard RE, Hughes JP, McLaughlin E, Podgorski WA, Rose VD, Roy AG, Zombeck MV, Markert TH, Bauer JM, Isobe T, Schattenburg ML. Uniformity and transmission of proportional counter window materials for use with AXAF Proceedings of Spie. 1549: 395-407. DOI: 10.1117/12.48356 |
0.476 |
|
| 1991 |
Schattenburg ML. Electromagnetic calculation of soft x-ray diffraction from 0.1-μm scale gold structures Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 9: 3232. DOI: 10.1116/1.585293 |
0.427 |
|
| 1991 |
Chu W, Smith HI, Schattenburg ML. Replication of 50‐nm‐linewidth device patterns using proximity x‐ray lithography at large gaps Applied Physics Letters. 59: 1641-1643. DOI: 10.1063/1.106256 |
0.387 |
|
| 1991 |
Yen A, Ghanbari RA, Ku YC, Chu W, Schattenburg ML, Carter JM, Smith HI. X-ray masks with large-area 100nm-period gratings for quantum-effect device applications Microelectronic Engineering. 13: 271-274. DOI: 10.1016/0167-9317(91)90091-Q |
0.522 |
|
| 1990 |
Schattenburg ML. Fabrication and testing of 0.1-μm-linewidth microgap x-ray masks Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 8: 1604. DOI: 10.1116/1.585124 |
0.484 |
|
| 1990 |
Schattenburg ML, Anderson EH, Smith HI. X-ray/VUV transmission gratings for astrophysical and laboratory applications Physica Scripta. 41: 13-20. DOI: 10.1088/0031-8949/41/1/004 |
0.517 |
|
| 1990 |
Early K, Schattenburg M, Smith HI. Absence of resolution degradation in X-ray lithography for λ from 4.5nm to 0.83nm Microelectronic Engineering. 11: 317-321. DOI: 10.1016/0167-9317(90)90122-A |
0.508 |
|
| 1990 |
Smith HI, Ismail K, Schattenburg M, Antoniadis D. Sub-100 nm electronic devices and quantum-effects research using x-ray nanolithography Microelectronic Engineering. 11: 53-59. DOI: 10.1016/0167-9317(90)90072-2 |
0.462 |
|
| 1988 |
Keith DW, Schattenburg ML, Smith HI, Pritchard DE. Diffraction of atoms by a transmission grating. Physical Review Letters. 61: 1580-1583. PMID 10038842 DOI: 10.1103/Physrevlett.61.1580 |
0.306 |
|
| 1988 |
Schattenburg ML, Canizares CR, Dewey D, Levine AM, Markert TH, Smith HI. Transmission grating spectroscopy and the advanced x-ray astrophysics facility (axaf) Proceedings of Spie - the International Society For Optical Engineering. 982: 210-218. DOI: 10.1117/12.948717 |
0.375 |
|
| 1987 |
Schattenburg M, Tanaka I, Smith HI. Microgap x-ray nanolithography Microelectronic Engineering. 6: 273-279. DOI: 10.1016/0167-9317(87)90049-9 |
0.519 |
|
| 1986 |
Warren AC, Plotnik I, Anderson EH, Schattenburg ML, Antoniadis DA, Smith HI. FABRICATION OF SUB-100-NM LINEWIDTH PERIODIC STRUCTURES FOR STUDY OF QUANTUM EFFECTS FROM INTERFERENCE AND CONFINEMENT IN Si INVERSION LAYERS Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 4: 365-368. DOI: 10.1116/1.583333 |
0.392 |
|
| 1986 |
Schattenburg ML, Canizares CR. High-resolution X-ray spectroscopy of the Crab Nebula and the oxygen abundance of the interstellar medium The Astrophysical Journal. 301: 759. DOI: 10.1086/163942 |
0.333 |
|
| 1985 |
Schattenburg ML. Reactive-ion etching of 0.2 μm period gratings in tungsten and molybdenum using CBrF3 Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 3: 272. DOI: 10.1116/1.583244 |
0.41 |
|
| 1980 |
Schattenburg ML, Canizares CR, Berg CJ, Clark GW, Markert TH, Winkler PF. Upper limits on X-ray line emission from the Crab Nebula The Astrophysical Journal. 241: L151. DOI: 10.1086/183380 |
0.396 |
|
| 1980 |
Canizares CR, Berg C, Clark G, Jernigan JG, Kriss G, Markert TH, Schattenburg M, Winkler PF. High Resolution X-Ray Spectroscopy of The Gas Surrounding M87 and NGC1275: Emission Line Detection and Evidence for Radiatively Regulated Accretion Highlights of Astronomy. 5: 657-662. DOI: 10.1017/S153929960000455X |
0.345 |
|
| 1978 |
Henke BL, Perera RCC, Gullikson EM, Schattenburg ML. High‐efficiency low‐energy x‐ray spectroscopy in the 100–500‐eV region Journal of Applied Physics. 49: 480-494. DOI: 10.1063/1.324671 |
0.442 |
|
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