Jiangtao Hu, Ph.D.

Affiliations: 
2000 Harvard University, Cambridge, MA, United States 
Area:
nanoscience
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Charles M. Lieber grad student 2000 Harvard
 (Synthesis of novel materials by pulsed laser deposition and chemical vapor deposition: Part I: Energetic deposition and stability of carbon nitride thin films. Part II: Catalytic growth of one dimensional materials and devices.)
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Publications

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Hong W, Guo X, Zhang T, et al. (2023) Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing. Acs Applied Materials & Interfaces
Li J, Zangooie S, Boinapally K, et al. (2014) Scatterometry performance improvement by parameter and spectrum feed-forward Proceedings of Spie. 9050
Li J, Zangooie S, Boinapally K, et al. (2014) Scatterometry performance enhancement by holistic approach Journal of Micro/Nanolithography, Mems, and Moems. 13: 041406
Chin H, Ling M, Liu B, et al. (2013) Metrology solutions for high performance germanium multi-gate field-effect transistors using optical scatterometry Proceedings of Spie. 8681
Dasari P, Kritsun O, Li J, et al. (2013) Scatterometry evaluation of focus-dose effects of EUV structures Proceedings of Spie. 8681
Li J, Kritsun O, Dasari P, et al. (2013) Evaluating scatterometry 3D capabilities for EUV Proceedings of Spie. 8681
Li J, Kritsun O, Liu Y, et al. (2012) Faster diffraction-based overlay measurements with smaller targets using 3D gratings Proceedings of Spie. 8324
Dasari P, Li J, Hu J, et al. (2012) Scatterometry metrology challenges of EUV Proceedings of Spie. 8324
Dasari P, Li J, Hu J, et al. (2011) Metrology characterization of spacer double patterning by scatterometry Proceedings of Spie. 7971: 797111
Li J, Kritsun O, Liu Y, et al. (2011) Advancements of diffraction-based overlay metrology for double patterning Proceedings of Spie. 7971
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