Hyun-Mog Park, Ph.D.
Affiliations: | 2000 | University of Michigan, Ann Arbor, Ann Arbor, MI |
Area:
Electronics and Electrical Engineering, Mechanical EngineeringGoogle:
"Hyun-Mog Park"Parents
Sign in to add mentorJessy W. Grizzle | grad student | 2000 | University of Michigan | |
(Real-time feedback control and fault detection in deep-submicron plasma etch.) |