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Jihong Choi, Ph.D. - Publications

Affiliations: 
2006 University of California, Berkeley, Berkeley, CA, United States 
Area:
Mechanical Engineering, Electronics and Electrical Engineering
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1 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2004 Choi J, Dornfeld DA. Modeling of Pattern Density Dependent Pressure Non-Uniformity at a Die Scale for ILD Chemical Mechanical Planarization Mrs Proceedings. 816. DOI: 10.1557/Proc-816-K4.4  0.338
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