Ashwini K. Sinha, Ph.D. - Publications
Affiliations: | 2006 | Georgia Institute of Technology, Atlanta, GA |
Area:
Chemical EngineeringYear | Citation | Score | |||
---|---|---|---|---|---|
2007 | Sinha A, Hess DW, Henderson CL. A novel top surface imaging approach utilizing direct area selective atomic layer deposition of hard masks Proceedings of Spie - the International Society For Optical Engineering. 6519. DOI: 10.1117/12.712458 | 0.639 | |||
2007 | Sinha A, Hess DW, Henderson CL. Transport behavior of atomic layer deposition precursors through polymer masking layers: Influence on area selective atomic layer deposition Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25: 1721-1728. DOI: 10.1116/1.2782546 | 0.638 | |||
2006 | Sinha A, Hess DW, Henderson CL. A top surface imaging method using area selective ALD on chemically amplified polymer photoresist films Electrochemical and Solid-State Letters. 9. DOI: 10.1149/1.2335939 | 0.652 | |||
2006 | Sinha A, Hess DW, Henderson CL. Area-selective ALD of titanium dioxide using lithographically defined poly(methyl methacrylate) films Journal of the Electrochemical Society. 153. DOI: 10.1149/1.2184068 | 0.649 | |||
2006 | Sinha A, Hess DW, Henderson CL. Area selective atomic layer deposition of titanium dioxide: Effect of precursor chemistry Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24: 2523-2532. DOI: 10.1116/1.2359728 | 0.655 | |||
2005 | Hartung J, Kowalik J, Kranz C, Janata J, Josowicz M, Sinha A, McCoy K. Electropolymerization of bilayer with phosphonic acid tethers for immobilization of biomolecules Journal of the Electrochemical Society. 152: E345-E350. DOI: 10.1149/1.2041868 | 0.437 | |||
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