Year |
Citation |
Score |
2019 |
Zhang Y, D'Ambra CA, Katsumata R, Burns RL, Somervell M, Segalman RA, Hawker CJ, Bates CM. Rapid and Selective Deposition of Patterned Thin Films on Heterogeneous Substrates via Spin Coating. Acs Applied Materials & Interfaces. PMID 31117458 DOI: 10.1021/Acsami.9B05190 |
0.714 |
|
2019 |
Zhang Y, Discekici EH, Burns RL, Somervell MH, Hawker CJ, Bates CM. Single-Step, Spin-on Process for High Fidelity and Selective Deposition Acs Applied Polymer Materials. 2: 481-486. DOI: 10.1021/acsapm.9b00914 |
0.614 |
|
2017 |
Mohanty N, Smith JT, Huli L, Pereira C, Raley A, Kal S, Fonseca C, Sun X, Burns RL, Farrell RA, Hetzer DR, Metz AW, Ko A, Scheer SA, Biolsi P, et al. EPE improvement thru self-alignment via multi-color material integration Proceedings of Spie. 10147: 1014704. DOI: 10.1117/12.2258108 |
0.348 |
|
2008 |
Abdo A, Stobert I, Viswanathan R, Burns R, Herold K, Kallingal C, Meiring J, Oberschmidt J, Mansfield S. The comparison of OPC performance and run time for dense versus sparse solutions Proceedings of Spie - the International Society For Optical Engineering. 6924. DOI: 10.1117/12.772902 |
0.71 |
|
2005 |
Johnson S, Burns R, Kim EK, Dickey M, Schmid G, Meiring J, Burns S, Willson CG, Convey D, Wei Y, Fejes P, Gehoski K, Mancini D, Nordquist K, Dauksher WJ, et al. Effects of etch barrier densification on step and flash imprint lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23: 2553-2556. DOI: 10.1116/1.2102971 |
0.706 |
|
2005 |
Dickey MD, Burns RL, Kim EK, Johnson SC, Stacey NA, Willson CG. Study of the kinetics of step and flash imprint lithography photopolymerization Aiche Journal. 51: 2547-2555. DOI: 10.1002/Aic.10477 |
0.705 |
|
2004 |
Johnson S, Burns R, Kim EK, Schmid G, Dickey M, Meiring J, Burns S, Stacey N, Willson CG, Convey D, Wei Y, Fejes P, Gehoski K, Mancini D, Nordquist K, et al. Step and Flash Imprint Lithography modeling and process development Journal of Photopolymer Science and Technology. 17: 417-419. DOI: 10.2494/Photopolymer.17.417 |
0.705 |
|
2004 |
Skordas S, Burns RL, Goldfarb DL, Burns SD, Angelopoulos M, Brodsky CJ, Lawson MC, Pillette C, Bright JJ, Isaacson RL, Lagus ME, Vishnu V. Rinse additives for defect suppression in 193 nm and 248 nm lithography Proceedings of Spie - the International Society For Optical Engineering. 5376: 471-481. DOI: 10.1117/12.537764 |
0.725 |
|
2004 |
Goldfarb DL, Burns SD, Burns RL, Brodsky CJ, Lawson MC, Angelopoulos M. Rinse additives for line edge roughness control in 193 nm lithography Proceedings of Spie - the International Society For Optical Engineering. 5376: 343-351. DOI: 10.1117/12.537723 |
0.725 |
|
2004 |
Burns RL, Johnson SC, Schmid GM, Kim EK, Dickey MD, Meiring J, Burns SD, Stacey NA, Willson CG, Convey D, Wei Y, Fejes P, Gehoski K, Mancini D, Nordquist K, et al. Mesoscale modeling for SFIL simulating polymerization kinetics and densification Proceedings of Spie - the International Society For Optical Engineering. 5374: 348-360. DOI: 10.1117/12.536216 |
0.705 |
|
2004 |
Burns RL, Steel KM, Burns SD, Koros WJ. Explanation of a selectivity maximum, as a function of the material structure for organic gas separation membranes Industrial and Engineering Chemistry Research. 43: 5942-5949. DOI: 10.1021/Ie049800Z |
0.734 |
|
2003 |
Burns S, Schmid G, Trinque B, Willson J, Wunderlich J, Tsiartas P, Taylor JC, Burns R, Willson CG. A fundamental study of photoresist dissolution with real time spectroscopic ellipsometry and interferometry Proceedings of Spie - the International Society For Optical Engineering. 5039: 1063-1075. DOI: 10.1117/12.485182 |
0.715 |
|
2003 |
Burns RL, Koros WJ. Structure-property relationships for poly(pyrrolone-imide) gas separation membranes Macromolecules. 36: 2374-2381. DOI: 10.1021/Ma0259261 |
0.471 |
|
2003 |
Burns RL, Koros WJ. Defining the challenges for C3H6/C3H8 separation using polymeric membranes Journal of Membrane Science. 211: 299-309. DOI: 10.1016/S0376-7388(02)00430-1 |
0.433 |
|
2002 |
Burns RL, Punsalan D, Towidjaja MC, Koros WJ. Strategies for purging the pellicle space for 157 nm lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20: 1954-1960. DOI: 10.1116/1.1502703 |
0.702 |
|
2002 |
Mahajan R, Burns R, Schaeffer M, Koros WJ. Challenges in forming successful mixed matrix membranes with rigid polymeric materials Journal of Applied Polymer Science. 86: 881-890. DOI: 10.1002/App.10998 |
0.6 |
|
Show low-probability matches. |