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Jaewoong Sohn, Ph.D. - Publications

Affiliations: 
2008 University of Wisconsin, Madison, Madison, WI 
Area:
Mechanical Engineering
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6 high-probability publications. We are testing a new system for linking publications to authors. You can help! If you notice any inaccuracies, please sign in and mark papers as correct or incorrect matches. If you identify any major omissions or other inaccuracies in the publication list, please let us know.

Year Citation  Score
2007 Nataraju M, Sohn J, Mikkelson AR, Engelstad RL, Turner KT, Van Peski CK, Orvek KJ. Electrostatic chucking of EUVL reticles Proceedings of Spie - the International Society For Optical Engineering. 6517. DOI: 10.1117/12.720621  0.586
2006 Nataraju M, Sohn J, Veeraraghavan S, Mikkelson AR, Turner KT, Engelstad RL, Van Peski CK, Orvek KJ. Electrostatic chucking for extreme ultraviolet lithography: Simulations and experiments Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24: 2834-2839. DOI: 10.1116/1.2388967  0.628
2005 Engelstad RL, Feng Z, Lovell EG, Mikkelson AR, Sohn J. Evaluation of intrinsic film stress distributions from induced substrate deformation Microelectronic Engineering. 78: 404-409. DOI: 10.1016/J.Mee.2005.01.011  0.714
2004 Mikkelson A, Engelstad R, Sohn J, Lovell E. Effect of electrostatic chucking and substrate thickness uniformity on extreme ultraviolet lithography mask flatness Journal of Vacuum Science & Technology B. 22: 3043-3048. DOI: 10.1116/1.1808738  0.59
2002 Feng Z, Lovell EG, Engelstad RL, Mikkelson AR, Reu PL, Sohn J. Film stress characterization using substrate shape data and numerical techniques Materials Research Society Symposium - Proceedings. 750: 249-254. DOI: 10.1557/Proc-750-Y3.4  0.677
2001 Sohn J, Engelstad RL, Lovell EG. Predicting pattern-specific distortions induced during optical mask patterning Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 19: 2626-2630. DOI: 10.1116/1.1408956  0.65
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