Swayambhu P. Behera, Ph.D.
Affiliations: | 2011 | University of North Texas, Denton, TX, United States |
Area:
Fluid and Plasma Physics, Materials Science Engineering, Analytical ChemistryGoogle:
"Swayambhu Behera"Mean distance: (not calculated yet)
Parents
Sign in to add mentor| Jeffry A. Kelber | grad student | 2011 | University of North Texas | |
| (The interactions of plasma with low-k dielectrics: Fundamental damage and protection mechanisms.) | ||||
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Publications
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| Behera SP, Wang Q, Kelber JA. (2011) He plasma pretreatment effects on oxygen plasma-induced carbon loss and surface roughening in an ultralow-k organosilicate glass film Journal of Physics D: Applied Physics. 44 |
| Rühl E, Riehs NF, Behera S, et al. (2010) Photofragmentation of the closo-carboranes part II: VUV assisted dehydrogenation in the closo-carboranes and semiconducting B10C2H(x) films. The Journal of Physical Chemistry. A. 114: 7284-91 |
| Behera S, Lee J, Gaddam S, et al. (2010) Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3 Applied Physics Letters. 97 |
| Behera S, Wilks J, Dowben PA, et al. (2010) Photo-induced site-specific nitridation of plasma-deposited B 10C2Hx films: A new pathway toward post-deposition doping of semiconducting boron carbides Surface Science. 604: L51-L54 |
| Goldman MA, Graves DB, Antonelli GA, et al. (2009) Oxygen radical and plasma damage of low- k organosilicate glass materials: Diffusion-controlled mechanism for carbon depletion Journal of Applied Physics. 106 |
| Chaudhari M, Du J, Behera S, et al. (2009) Fundamental mechanisms of oxygen plasma-induced damage of ultralow- k organosilicate materials: The role of thermal 3P atomic oxygen Applied Physics Letters. 94 |