Victor Q. Pham, Ph.D. - Publications
Affiliations: | 2004 | Cornell University, Ithaca, NY, United States |
Area:
polymersYear | Citation | Score | |||
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2006 | Bums S, Pfeiffer D, Mahorowala A, Petrillo K, Clancy A, Babich K, Medeiros D, Allen S, Holmes S, Grouse M, Brodsky C, Pham V, Lin YH, Patel K, Lustig N, et al. Silicon containing polymer in applications for 193 nm high NA lithography processes Proceedings of Spie - the International Society For Optical Engineering. 6153. DOI: 10.1117/12.657197 | 0.303 | |||
2004 | Pham VQ, Rao N, Ober CK. Swelling and dissolution rate measurements of polymer thin films in supercritical carbon dioxide Journal of Supercritical Fluids. 31: 323-328. DOI: 10.1016/J.Supflu.2003.12.004 | 0.457 | |||
2002 | Pham VQ, Weibel GL, Rao N, Ober CK. Dissolution rate measurements for resist processing in supercritical carbon dioxide Proceedings of Spie - the International Society For Optical Engineering. 4690: 425-431. DOI: 10.1117/12.474241 | 0.366 | |||
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