Year |
Citation |
Score |
1998 |
Smith LL, Read WW, Yang CS, Srinivasan E, Courtney CH, Lamb HH, Parsons GN. Plasma enhanced selective area microcrystalline silicon deposition on hydrogenated amorphous silicon: Surface modification for controlled nucleation Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 16: 1316-1320. DOI: 10.1116/1.581144 |
0.68 |
|
1998 |
Srinivasan E, Parsons GN. Hydrogen abstraction kinetics and crystallization in low temperature plasma deposition of silicon Applied Physics Letters. 72: 456-458. DOI: 10.1063/1.120785 |
0.704 |
|
1997 |
Srinivasan E, Parsons GN. Real-Time Kinetic Analysis of Hydrogen Abstraction and Etching Reactions Using Pulsed-Gas PECVD of Amorphous and Microcrystalline Silicon Mrs Proceedings. 467. DOI: 10.1557/Proc-467-501 |
0.611 |
|
1997 |
Srinivasan E, Lloyd DA, Parsons GN. Dominant monohydride bonding in hydrogenated amorphous silicon thin films formed by plasma enhanced chemical vapor deposition at room temperature Journal of Vacuum Science and Technology a: Vacuum, Surfaces and Films. 15: 77-84. DOI: 10.1116/1.580480 |
0.689 |
|
1997 |
Smith LL, Srinivasan E, Parsons GN. Investigation of substrate-dependent nucleation of plasma-deposited microcrystalline silicon on glass and silicon substrates using atomic force microscopy Journal of Applied Physics. 82: 6041-6046. DOI: 10.1063/1.366471 |
0.627 |
|
1997 |
Srinivasan E, Parsons GN. Hydrogen elimination and phase transitions in pulsed-gas plasma deposition of amorphous and microcrystalline silicon Journal of Applied Physics. 81: 2847-2855. DOI: 10.1063/1.364309 |
0.719 |
|
1996 |
Srinivasan E, Ellis SJ, Nemanich R, Parsons GN. Large Crystallite Polysilicon Deposited Using Pulsed-Gas PECVD at Temperatures Less Than 250°C Mrs Proceedings. 452: 989-994. DOI: 10.1557/Proc-452-989 |
0.575 |
|
1996 |
Srinivasan E, Bordeaux JS, Parsons GN. Real-Time Monitoring of Hydrogen Elimination Processes in Pulsed-Gas PECVD Using in Situ Mass Spectroscopy Mrs Proceedings. 452. DOI: 10.1557/Proc-452-755 |
0.683 |
|
1996 |
Srinivasan E, Lloyd DA, Fang M, Parsons GN. Inert Gas Dilution and Ion Bombardment Effects in Room Temperature (35°C) Plasma Deposition of a-Si:H Mrs Proceedings. 420. DOI: 10.1557/Proc-420-399 |
0.664 |
|
1996 |
Srinivasan E, Yang H, Parsons GN. Ab initio calculation of hydrogen abstraction energetics from silicon hydrides Journal of Chemical Physics. 105: 5467-5471. DOI: 10.1063/1.472387 |
0.592 |
|
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