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Yao-Sheng Lee, Ph.D.

Affiliations: 
2000 University of Kansas, Lawrence, KS, United States 
Area:
Chemical Engineering, Electronics and Electrical Engineering
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"Yao-Sheng Lee"
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Karen J. Nordheden grad student 2000 University of Kansas
 (Characterization of boron chloride(3)/Sulfur fluoride(6) plasmas used for selective etching of gallium arsenide/aluminum arsenide.)

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