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Xin Lin, Ph.D.

Affiliations: 
2000 Pennsylvania State University, State College, PA, United States 
Area:
Materials Science Engineering, Condensed Matter Physics
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Stephen J. Fonash grad student 2000 Penn State
 (Low temperature silicon dioxide deposition using tetramethylsilane for micro- and nanofabrication applications.)

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Publications

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Lin X, Fonash SJ. (2002) Low temperature silicon dioxide thin films deposited using tetramethylsilane for stress control and coverage applications Materials Research Society Symposium - Proceedings. 695: 371-376
Lin X, Fonash SJ. (2001) Preparation and characterization of low temperature silicon dioxide thin films using tetramethylsilane (TMS) for microfabrication applications Materials Research Society Symposium Proceedings. 685: 341-346
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