Christopher A. Bode, Ph.D.
Affiliations: | 2001 | University of Texas at Austin, Austin, Texas, U.S.A. |
Area:
Chemical EngineeringGoogle:
"Christopher Bode"Parents
Sign in to add mentor| Thomas F Edgar | grad student | 2001 | UT Austin | |
| (Run -to -run control of overlay and linewidth in semiconductor manufacturing.) | ||||
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Publications
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| Bode CA, Wang J, He QP, et al. (2007) Run-to-run control and state estimation in high-mix semiconductor manufacturing Annual Reviews in Control. 31: 241-253 |
| Wang J, He QP, Qin SJ, et al. (2005) Recursive least squares estimation for run-to-run control with metrology delay and its application to STI etch process Ieee Transactions On Semiconductor Manufacturing. 18: 309-318 |
| Bode CA, Sonderman TJ. (2004) Controlling the margins in 300 mm manufacturing Solid State Technology. 47: 49-52 |
| Bode CA, Ko BS, Edgar TF. (2002) Run-to-run control and performance monitoring of overlay in semiconductor manufacturing Ifac Proceedings Volumes (Ifac-Papersonline). 15: 393-398 |
| Bode C, Ko B, Edgar T. (2002) RUN-TO-RUN CONTROL AND PERFORMANCE MONITORING OF OVERLAY IN SEMICONDUCTOR MANUFACTURING Ifac Proceedings Volumes. 35: 393-398 |
| Edgar TF, Butler SW, Campbell WJ, et al. (2000) Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities Automatica. 36: 1567-1603 |